Veeco MS40 Operation And Maintenance Manual page 119

Glossary Of Terms Used In
Leak Detection
1. Leak - In vacuum technology a hole, or porosity, in the wall of an
2. Gross Leak - A leak that exhibits a leak rate in the range of 10
3. Fine Leak - A leak that exhibits a leak rate in the range of 10
4. Leak Rate - In leak detection practice, leak rate is defined as the rate
5. Leak Detector - A device for detecting and locating leaks, and
6. Tracer Gas - A gas that, passing through a leak, can then be
7. Probe Gas - A tracer gas which issues from a more-or-less fine
8. Pressure Testing - A leak detecting procedure in which tracer gas is
9. Soap Bubble Test - A type of pressure testing in which the tracer gas
Vacuum Instrument Corp.
2099 Ninth Avenue
Ronkonkoma, NY 11779
631.737.0900
1109-186-00 Rev. C
enclosure capable of passing gas from one side of the wall to the
other under action of a pressure or concentration differential existing
across the wall.
1 std cc/sec or higher.
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10 std cc/sec or lower.
of flow (in pressure-volume units per unit time) through a leak with
gas at a specified high pressure (usually atmospheric pressure) on the
inlet side and gas at a pressure on the exit side which is low enough
to have negligible effect on the rate of flow.
indicating the magnitude thereof.
detected by a specific leak detector and thus disclose the presence of
a leak. Also called search gas.
orifice so as to impinge on a restricted test area.
introduced under pressure into the enclosure under examination, and
detected as it is emitted from a leak.
is detected by bubbles formed in a layer of soap solution applied to
the surface of the test object.
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