Cleaning Requirements - Veeco MS40 Operation And Maintenance Manual

To restart the MS-40, reconnect the pumps power cord and perform a
normal start-up procedure (as stated in Section 2.3).
4.7
When it has been determined that the vacuum system is contaminated,
components of the vacuum system will need to be cleaned and serviced as
stated in the remainder of this section. Since contamination should not be a
frequent occurrence, it is recommended that as many as possible of the
components listed in this section be cleaned and/or serviced at the same time.
Vacuum Instrument Corp.
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b. Pressing the black pushbutton on the upper right of the
circuit board (mounted on the rear door).
2. From the Valve section of the Service Panel, close all valves
except the fore-line valve.
3. Press the ZERO momentary switch. This will shut down the turbo-
molecular pump. Wait three minutes for the turbo-molecular pump
to spin down.
4. Press the FORE momentary switch on the Service Panel to close
the fore-line valve.
5. Turn off the power to the internal pump by disconnecting the pumps
power cord.
6. Open the vent valve by pressing the momentary switch on the
Service Panel.
7. Open the Fine valve by pressing the momentary switch on the
Service Panel. The turbo-molecular pump will rapidly decelerate
(this produces a highly distinctive noise).
8. Open the fore-line valve by pressing the momentary switch on the
Service Panel. This vents the mechanical pump.
9. Close the vent, fine and fore-line valves.
10. Turn off the unit.

Cleaning Requirements

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