Veeco MS40 Operation And Maintenance Manual page 66

Calibrator Valve: A three-way valve that connects the calibrator to the
test port. With the use of a filter, this valve is also used to vent the
calibrator to atmosphere.
Fine Valve: Connects the test port to the high-vacuum section. Open during
Direct Mode testing.
Vent Valve: Connects the test port to atmosphere through a sintered metal
filter.
Rough Valve: Connects the inlet port to the internal mechanical pump for
initial evacuation of the test object.
Fore-line/Reverse Valve: Connects the fore-line of the turbo-molecular
pump to the internal mechanical pump and is also used in
conjunction with the rough valve for reverse flow testing. This valve is
always open on units equipped with an external roughing pump.
Gross Valve: Connects the test port to the fore-line of the turbo-molecular
pump (through a restriction). Open during Gross Mode testing.
Sniffer Valve: Connects the sniffer port to the fore-line of the turbo-
molecular pump. Open during sniff testing.
Purge Valve: Connects the gas ballast port of the internal mechanical
pump (through Poly-flo tubing) to atmosphere through a sintered filter.
Can be connected to dry nitrogen. Opening this valve assists in "purging"
the system of trapped gases and "condensable elements" from the pump's oil.
Test Port: A standard KF-25 vacuum connection. Used to attach test
objects to the MS-40.
Test Port Pirani: A pressure gauge that monitors the test port pressure
-3
from atmosphere to 10 Torr.
Vent Filter: A sintered metal filter that prevents particles from being
drawn into the valve block during venting.
Sniff Hose Connection: 1/4" Poly-flo tube fitting and tubing. Connects
the rear sniff QCF to the sniff valve.
Vacuum Instrument Corp.
2099 Ninth Avenue
Ronkonkoma, NY 11779
631.737.0900
1109-186-00 Rev. C 3-13