Veeco MS40 Operation And Maintenance Manual page 87

Vacuum Instrument Corp.
2099 Ninth Avenue
Ronkonkoma, NY 11779
631.737.0900
1109-186-00 Rev. C
2. Open the rear door of the unit. With a screwdriver turn the screw on the
door 1/4 turn and gently lower the door.
NOTE:
Note the alignment and orientation of all parts removed.
Proper alignment is critical when replacing the
components removed in this procedure.
3. Disconnect the electrical connector to the turbo-molecular pump.
4. Disconnect the electrical connectors to the source and collector on the
mass spectrometer.
5. Remove the KF clamp and centering ring from the pump. Be careful
not to drop the centering ring.
6. Note the orientation of the claw clamps that connect the pump to the
vacuum manifold and the manifold to the fore-line section.
7. Loosen the nuts on the claw clamps. Remove the clamps. Make
sure to record the position of each clamp.
8. Lift off the manifold and the centering ring between the pump and
the manifold. Place on a clean, flat surface near the unit.
9. Lift off the turbo-molecular pump and place on a clean, flat surface
near the unit.
10. Refer to the instructions in the Manufacturer's Manual for cleaning
the pump. Pump service should be limited to cleaning procedures
only - additional work performed on the pump may void the
warranty.
11. Clean and lightly grease the O-ring on the large centering ring
assembly as necessary. Replace the turbomolecular pump,
manifold and centering ring within the unit.
12. Replace all of the claw clamps removed in Step 7. Replace the
clamps to the same positions from which they were removed earlier.
Replace and tighten the nuts removed in Step 7.
13. Clean and lightly grease the O-ring on the KF16 centering ring as
necessary. Replace the KF-16 clamp and centering ring removed in
Step 5 onto the turbo-molecular pump.
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