1.4 Features & Specifications - Veeco MS40 Operation And Maintenance Manual

1.4 Features & Specifications
FEATURES
Sensitivity:
Leak Rate Range:
Start-Up:
Internal Calibrator:
Testable Masses:
Tuning:
Calibration:
Auto Zero:
Background
Compensation:
Remote Control
Unit:
RS-232C Port:
Vacuum Instrument Corp.
2099 Ninth Avenue
Ronkonkoma, NY 11779
631.737.0900
1109-186-00 Rev. C
-11
4 x 10 std cc/sec air equivalent
-11
10 to 4 x 10 std cc/sec air equivalent
(with optional external pump)
-4 -11
10 x 10 to 4 x 10
(without external pump)
Fully functional in less than 3 minutes. Consists of:
Turbo-molecular pump acceleration, a complete set
of self-diagnostics, turning on filament, checking
and assuring Hi-Vac status, measuring system
offsets and measuring background helium
-8
Helium 4, 1 x 10 to 3 x 10
equivalent with integral solenoid valve
Helium Mass 3 or 4
Automatic
Automatic for Helium 4 using an internal calibrator
-8 -8
of 1 x 10 to 3 x 10
Automatic zeroing of leak rate while in test mode
initiated by pressing the ZERO pushbutton
Continuous automatic compensation for system back
ground
Molded A.B.S. plastic laminate over tactile
membrane switch array Controls similar to User
Panel
Two standard bi-directional ports. One port
dedicated to the remote control unit. The second
port is dedicated to data transfer to an external
computer or control module.
1-8
std cc/sec air equivalent
-8
std cc/sec air
std cc/sec air equivalent