HRX-OM-R026
Contents
Option ............................................................................... 6-1
6.1
6.1.1
Option M [DI water (Pure water) piping] .............................................................................. 6-1
6.2
6.2.1
Option J [Automatic fluid filling] ........................................................................................... 6-2
7.1
Alarm Display ........................................................................................................... 7-1
7.2
Alarm buzzer stop .................................................................................................... 7-3
7.3
Troubleshooting ....................................................................................................... 7-4
7.3.1
7.3.2
7.3.3
7.4
Other Errors ........................................................................................................... 7-12
8.1
8.2
Inspection and Cleaning .......................................................................................... 8-2
8.2.1
Daily check .......................................................................................................................... 8-2
8.2.2
Monthly check ...................................................................................................................... 8-3
8.2.3
Inspection every 3 months ................................................................................................... 8-4
8.2.4
Inspection every 6 months ................................................................................................... 8-5
8.2.5
8.3
Consumables ........................................................................................................... 8-6
8.4
Stop for a Long Time ............................................................................................... 8-7
8.4.1
8.4.2
Documents ....................................................................... 9-1
9.1
Specifications ........................................................................................................... 9-1
9.1.1
HRSH090-A-20- ............................................................................................................... 9-1
9.1.2
HRSH090-A-40- ............................................................................................................... 9-2
9.1.3
HRSH090-W-20- .............................................................................................................. 9-3
9.1.4
HRSH090-W-40- .............................................................................................................. 9-4
9.1.5
9.2
Outline dimensions .................................................................................................. 9-7
9.2.1
HRSH090-A-20/40- .......................................................................................................... 9-7
9.2.2
HRSH090-W-20/40- ......................................................................................................... 9-8
9.3
Flow diagram ............................................................................................................ 9-9
9.3.1
HRSH090-A-20/40- .......................................................................................................... 9-9
9.3.2
HRSH090-W-20/40- ......................................................................................................... 9-9
9.4
Cooling capacity .................................................................................................... 9-10
9.4.1
HRSH090-A-20- ............................................................................................................. 9-10
HRSH Series