Flow Path Diagrams - Hitachi 902 Service Manual

3.1 List of Solenoid Valves.............................................................................................3-1
3.2 Overall Piping Diagramm..........................................................................................3-2
3.3 Flow Rate at Each Location .....................................................................................3-3
3.4 WASH ...................................................................................................................3-4
3.4.1 Details of WASH Processing ......................................................................3-5
3.5 Carry-over Evasion Function ....................................................................................3-6

3. FLOW PATH DIAGRAMS

3 - 0