2
Technical data
Note:
To comply with CSA standards, the pump must be installed and used indoors, and within the operating
conditions specified in
2.1
Operating and storage conditions
Ambient temperature range (operation)
Ambient temperature range (storage)
Normal surface temperature of the pump-body *
Maximum humidity (operation)
Maximum altitude (operation)
Pollution degree
Installation category
* At ultimate vacuum, with ambient temperature of 20°C.
2.2
Performance
2.2.1
General
Note:
In Tables
2
and 3, total pressures have been measured by a capacitance diaphragm gauge on a vacuum
chamber without a cold trap, as specified by Pneurop Standard 6602 (1979).
High Vacuum mode
performance
High Throughput mode
Suckback protection
Maximum initial pressure rise with no
gas-ballast flow
Maximum displacement: m
50 Hz electrical supply
60 Hz electrical supply
Maximum pumping speed
3
(Pneurop 6602, 1979): m
50 Hz electrical supply
60 Hz electrical supply
Maximum permitted inlet pressure and
gas-ballast inlet pressure
bar gauge
Pa
Maximum permitted outlet pressure
bar gauge
Pa
© Edwards Limited 2007. All rights reserved.
Edwards and the Edwards logo are trade marks of Edwards Limited.
Table 1
below.
Table 1 - Operating and storage conditions
Table 2 - General performance data
See
performance
See
1 x 10
1 x 10
RV3
3
-1
h
3.7
4.5
-1
h
3.3
3.9
0.5
1.5 x 10
1
2 x 10
12 to 40°C
–30 to 70°C
50 to 70°C
90% RH
2000 m
2
II
Table 3
Table 4
-5
-1
-3
mbar l s
, 1 x 10
Pa l s
-1
mbar, 10 Pa
RV5
5.8
5.0
5.1
6.2
0.5
5
5
1.5 x 10
1
5
5
2 x 10
A652–01–880 Issue S
-1
RV8
RV12
9.7
14.2
11.7
17.0
8.5
12.0
10.0
14.2
0.5
0.5
5
1.5 x 10
1.5 x 10
1
1
5
5
2 x 10
2 x 10
5
Page 7
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