Table of Contents
Advertisement
7 TROUBLESHOOTING
54
Fault Description
Part Evac Fault
High Background Fault The Helium background
He Fill Fault
Air Fill Fault
ATLAS Operations and Maintenance Manual
Fault Causes
The part was not
evacuated to the
evacuation setpoint.
inside the chamber was
too high to fill with
Helium an began the test
step of the cycle.
The pressure inside the
part did not reach the
designated fill pressure.
Fault Troubleshooting
Manual mode can
help.
•
Increase the
pumpdown time in the
advanced settings.
•
Ensure pumping
system is performing
properly.
•
Ensure oil is changed
regularly in vacuum
pumps.
•
Check to make sure
the evac valve is
working properly.
•
Check for leaks in the
connection to the part.
•
Confirm that the part
in the chamber is
properly connected.
•
Change all O-rings on
the part and fittings
inside the chamber.
•
Increase Background
Factor or Background
Time in the recipe.
•
Check for any leaks in
the part, hoses, and
chamber.
•
Clean the test
chamber.
•
Adjust the fill
regulator.
•
Increase the fill time in
the recipe.
•
Verify the fill pressure
in the recipe.
LACO Technologies
Advertisement
Table of Contents
