ii
5.4.
5.5.
Electrical Interfaces ............................................................................................... 15
Operation ............................................................................................................................. 16
6.1.
Prerequisites for Use ............................................................................................ 16
6.2.
Power-On Process ................................................................................................ 17
6.3.
Power-Off Process ................................................................................................ 17
6.4.
Touchscreen Layout ................................................................................ 18
Status Icons ............................................................................................... 19
User Access Levels .................................................................................. 20
6.5.
Main Menu ................................................................................................ 23
Maintenance ............................................................................................. 33
System Screen .......................................................................................... 35
Recipe ......................................................................................................... 37
User Data Logging ................................................................................... 43
6.6.
Hard Vac Operation ................................................................................ 44
Sniffing Operation ................................................................................... 46
Troubleshooting .................................................................................................................. 52
7.1.
Global Faults ........................................................................................................... 52
7.2.
Process Faults ........................................................................................................ 53
8.1.
8.2.
8.3.
8.4.
Opening Enclosure ................................................................................................ 58
Enclosure Door ........................................................................................ 58
8.5.
Cleaning ................................................................................................................... 58
External cleaning ...................................................................................... 58
ATLAS Operations and Maintenance Manual
TABLE OF CONTENTS
LACO Technologies