Instllation; Installation And Storage Conditions; Installation; Other Conditions - Ulvac ECO-SHOCK ES10 Instruction Manual

Dry pump power-saving attachment
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2. INSTLLATION

2.1 Installation and Storage Conditions

2.1.1 Installation

Meet the following conditions in installation and storage of this attachment.
Temperature, humidity
(during storage)
Temperature, humidity
(during operation)
Altitude
External vibration
* Not condensing

2.1.2 Other conditions

CAUTION
Item
This attachment must be installed or stored indoors. It cannot be
used outdoors (where no measures are taken against rain, wind
and dust).
Do not place anything on this attachment.
Do not install this attachment sideways.
Condition
-30 to 60℃, relative humidity not
more than 95%
5 to 35℃, relative humidity not
more than 95%
Not more than 1000m
Not more than 0.5G
6
Instruction Manual ECO-SHOCK

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