Aerotech ALAR-LP Series Hardware Manual

Large aperture low-profile rotary stage
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ALAR-LP Large Aperture
Low-Profile Rotary Stage
HARDWARE MANUAL
Revision 2.00

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Summary of Contents for Aerotech ALAR-LP Series

  • Page 1: Alar-Lp Large Aperture Low-Profile Rotary Stage

    ALAR-LP Large Aperture Low-Profile Rotary Stage HARDWARE MANUAL Revision 2.00...
  • Page 2 Global Technical Support Portal for information and support about your Aerotech, Inc. products. The website supplies software, product manuals, Help files, training schedules, and PC-to-PC remote technical support. If necessary, you can complete Product Return (RMA) forms and get information about repairs and spare or replacement parts.
  • Page 3: Table Of Contents

    3.5. Motor and Feedback Phasing Chapter 4: Maintenance 4.1. Service and Inspection Schedule 4.2. Cleaning and Lubrication 4.3. Travel Adjustment 4.3.1. Electrical Limit Adjustments 4.3.2. Mechanical Hard Stop Adjustments 4.4. Troubleshooting Appendix A: Warranty and Field Service Appendix B: Revision History Index www.aerotech.com...
  • Page 4: List Of Figures

    Figure 3-3: ALAR Motor and Feedback Wiring (Absolute Encoder Option) Figure 3-4: Machine Direction Figure 3-5: Hall Phasing Diagram Figure 3-6: Encoder Phasing Reference Diagram (Standard/Square Wave) Figure 3-7: Encoder Phasing Reference Diagram (Analog/Sine Wave) Figure 4-1: Limit Flag Adjustment www.aerotech.com...
  • Page 5: List Of Tables

    Mating Connector Part Numbers for the Feedback Connector Table 3-7: Hall-Effect Sensor Specifications Table 3-8: Thermistor Specifications Table 3-9: Encoder Specifications Table 3-10: Encoder Resolution Table 3-11: Maximum Speed Per Encoder Option Table 3-12: Limit Switch Specifications Table 3-13: ALAR-LP Motor Specifications Table 4-1: Troubleshooting www.aerotech.com...
  • Page 6: Eu Declaration Of Incorporation

    ALAR-LP Hardware Manual EU Declaration of Incorporation Manufacturer Aerotech, Inc. 101 Zeta Drive Pittsburgh, PA 15238-2811 herewith declares that the product: ALAR Rotary Stage is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006/42/EC as amended;...
  • Page 7: Safety Procedures And Warnings

    To find the newest information about this product, refer to www.aerotech.com. If you do not understand the information in this manual, contact Aerotech Global Technical Support. IMPORTANT: This product has been designed for light industrial manufacturing or laboratory environments.
  • Page 8: Installation And Operation

    Use care when you move the ALAR or you could negatively affect the performance of WARNING: Trip Hazard! Route, house, and secure all cables, duct work, air, or water lines. Failure to do so could introduce trip hazards around the system that could result in physical injury or could damage the equipment. www.aerotech.com...
  • Page 9: Electrical Warnings

    It is the responsibility of the End User/System Integrator to make sure that stages are properly connected and grounded per Engineering Standards and applicable safety requirements. It is the responsibility of the End User/System Integrator to configure the system drive or controller within the Aerotech motor/stage electrical and mechanical specifications. www.aerotech.com...
  • Page 10: Motor-Related Warnings

    ALAR-LP Hardware Manual Motor-Related Warnings Aerotech motors are capable of producing high forces and velocities. Obey all warnings and all applicable codes and standards when you use or operate a stage or system that incorporates Aerotech motors. DANGER: Mechanical Hazard! Personnel must be made aware of the mechanical hazards during set up or when you do service to the stage.
  • Page 11: Pinch Points

    (during normal operation, for example). when the system is moved manually (during the installation process or when you do maintenance, for example). Motors are capable of very high speeds and acceleration rates. Figure 1: Typical Pinch Point Locations www.aerotech.com...
  • Page 12: Handling And Storage

    Lift this product only by the base. Use lifting hardware if it has been provided (refer to Figure 1-1). For multi-axis assemblies, always lift the system by the lower axis. Use a cart, dolly, or similar device to move the stage to a new location. www.aerotech.com...
  • Page 13: Figure 1-1: Lifting Bolts

    Before you operate the stage, let it stabilize at room temperature for at least 12 hours. This will ensure that all of the alignments, preloads, and tolerances are the same as they were when they were tested at Aerotech. Each stage  has a label listing the system part number and serial number. These numbers contain information necessary for maintenance or system hardware and software updates.
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  • Page 15: Chapter 1: Overview

    -TR300 Limited travel, ±150 degrees -TR340 Limited travel, ±170 degrees Feedback (Required) Incremental encoder, 1 Vpp sine Incremental encoder, x4 interpolation Incremental encoder, x20 interpolation Incremental encoder, x40 interpolation Incremental encoder, x100 interpolation Incremental encoder, x200 interpolation Absolute encoder www.aerotech.com...
  • Page 16: Environmental Specifications

    Indoor use only 1.2. Accuracy and Temperature Effects Aerotech products are designed for and built in a 20°C (68°F) environment. Temperature changes could cause a decrease in performance or permanent damage to the stage. At a minimum, the environmental temperature must be controlled to within 0.25ºC per 24 hours to ensure the stage specifications are repeatable over an extended period of time.
  • Page 17: Basic Specifications

    (1) Square-wave digital encoder options will limit maximum speed below the listed value. (2) Resolution assumes -E1 encoder with 2000X controller multiplication. (3) The ALAR-LP base must be fully supported by a rigid mounting plate to achieve this moment load. (4) Certified with each stage. Requires an Aerotech controller. www.aerotech.com...
  • Page 18: Table 1-4: Alar Series Specifications (Alar250Lp, Alar325Lp)

    (1) Square-wave digital encoder options will limit maximum speed below the listed value. (2) Resolution assumes -E1 encoder with 2000X controller multiplication. (3) The ALAR-LP base must be fully supported by a rigid mounting plate to achieve this moment load. (4) Certified with each stage. Requires an Aerotech controller. www.aerotech.com...
  • Page 19: Vacuum Operation

    Hardware Manual ALAR-LP 1.4. Vacuum Operation Vacuum option preparations are available as special orders. Contact Aerotech for more information. There are two vacuum preparation options: Low Vacuum (for use in atmospheric pressures to 10 Torr) High Vacuum (preparation for environments from 10 to 10 Torr).
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  • Page 21: Chapter 2: Installation

    Chapter 2: Installation The stage installation must be in accordance with the instructions provided by this manual and any accompanying documentation. Failure to follow these instructions could result in injury or damage to the equipment. 2.1. Dimensions Figure 2-1: ALAR100LP Dimensions www.aerotech.com...
  • Page 22: Figure 2-2: Alar150Lp Dimensions

    ALAR-LP Hardware Manual Figure 2-2: ALAR150LP Dimensions www.aerotech.com...
  • Page 23: Figure 2-3: Alar200Lp Dimensions

    Hardware Manual ALAR-LP Figure 2-3: ALAR200LP Dimensions www.aerotech.com...
  • Page 24: Figure 2-4: Alar250Lp Dimensions

    ALAR-LP Hardware Manual Figure 2-4: ALAR250LP Dimensions www.aerotech.com...
  • Page 25: Figure 2-5: Alar325Lp Dimensions

    Hardware Manual ALAR-LP Figure 2-5: ALAR325LP Dimensions www.aerotech.com...
  • Page 26: Securing The Stage To The Mounting Surface

    Refer to Section 2.1. for specific model mounting locations and dimensions. Table 2-2: Stage to Mounting Surface Hardware Mounting Hardware Typical Screw Torque M6 (ALAR100/ALAR150) 7 N·m M8 (ALAR200/ALAR250/ALAR325) 17 N·m www.aerotech.com...
  • Page 27: Figure 2-6: Alar Stage Mounting Holes

    Hardware Manual ALAR-LP Figure 2-6: ALAR Stage Mounting Holes www.aerotech.com...
  • Page 28: Attaching The Payload Or Fixturing To The Stage

    If you start the ALAR without a payload, the servo gains provided by Aerotech with the shipment may not be appropriate and servo instability can occur. Refer to the controller help file for tuning assistance.
  • Page 29: Chapter 3: Electrical Installation

    Aerotech motion control systems are adjusted at the factory for optimum performance. When the ALAR is part of a complete Aerotech motion control system, setup should only require that you connect the stage to the appropriate drive chassis with the cables provided. Labels on the system components should indicate the appropriate connections.
  • Page 30: Motor And Feedback Connectors

    Stages equipped with standard motors and encoders come from the factory completely wired and assembled. IMPORTANT: Refer to the other documentation accompanying your Aerotech equipment. Call your Aerotech representative if there are any questions on system configuration. IMPORTANT: If you are using standard Aerotech motors and cables, motor and encoder connection adjustments are not required.
  • Page 31: Table 3-1: High Power D-Style Motor Connector Pinout

    Reserved Reserved Reserved Reserved Reserved Frame Ground (motor protective ground) Table 3-2: Mating Connector Part Numbers for the Motor Connector Mating Connector Aerotech P/N Third Party P/N Backshell ECK00656 Amphenol #17E-1726-2 Sockets [QTY. 4] ECK00659 ITT Cannon #DM53744-6 Connector ECK00657 ITT Cannon #DBM9W4SA197 www.aerotech.com...
  • Page 32: Table 3-3: Feedback Connector Pinout (Incremental Encoder Options)

    “machine negative” or “machine counter-clockwise” direction.) [with the Limited Travel option] Reserved Table 3-4: Mating Connector Part Numbers for the Feedback Connector Mating Connector Aerotech P/N Third Party P/N 25-Socket D-Connector ECK00300 FCI DB25S064TLF Backshell ECK00656 Amphenol 17E-1726-2 www.aerotech.com...
  • Page 33: Table 3-5: Feedback Connector Pinout (Absolute Encoder Option)

    “machine negative” or “machine counter-clockwise” direction.) [with the Limited Travel option] Reserved Table 3-6: Mating Connector Part Numbers for the Feedback Connector Mating Connector Aerotech P/N Third Party P/N 25-Socket D-Connector ECK00300 FCI DB25S064TLF Backshell ECK00656 Amphenol 17E-1726-2 www.aerotech.com...
  • Page 34: Motor And Feedback Wiring

    ALAR-LP Hardware Manual 3.2. Motor and Feedback Wiring Shielded cables are required for the motor and feedback connections. Figure 3-2: ALAR Motor and Feedback Wiring (Incremental Encoder Options) www.aerotech.com...
  • Page 35: Figure 3-3: Alar Motor And Feedback Wiring (Absolute Encoder Option)

    Hardware Manual ALAR-LP Figure 3-3: ALAR Motor and Feedback Wiring (Absolute Encoder Option) www.aerotech.com...
  • Page 36: Motor And Feedback Specifications

    0.69 0.588 -E5 (arcsec / line) 0.413 0.36 0.28 0.235 -E6 (arcsec / line) 0.205 0.18 0.14 0.118 -E7 (arcsec / line) 0.0003 0.0003 0.0003 0.0003 0.0003 (1) Incremental encoder resolutions include quadrature (2) Resolution assumes 2000X controller multiplication. www.aerotech.com...
  • Page 37: Table 3-11: Maximum Speed Per Encoder Option

    Warning: If you set the electrical limits so that there is too much distance between the electrical limit and the hard stop, you can create a situation where the stage travel could exceed the electrical limit. The stage can then continue into the hard stop or do so the next time it is enabled. www.aerotech.com...
  • Page 38: Table 3-13: Alar-Lp Motor Specifications

    7. Maximum winding temperature is 100 °C (thermistor trips at 100 °C). 8. Ambient operating temperature range 0 °C - 25 °C; consult Aerotech for performance in elevated ambient temperatures.Ambient operating temperature range 0 °C - 25 °C; consult Aerotech for performance in elevated ambient temperatures 9.
  • Page 39: Limits, Marker, And Machine Direction

    Hardware Manual ALAR-LP 3.4. Limits, Marker, and Machine Direction Aerotech stages are configured to have positive and negative "machine" directions. The machine direction defines the phasing of the feedback and motor signals and is dictated by the stage wiring (refer to Section 3.2.).
  • Page 40: Motor And Feedback Phasing

    ALAR-LP Hardware Manual 3.5. Motor and Feedback Phasing Motor phase voltage is measured relative to the virtual wye common point. Figure 3-5: Hall Phasing Diagram www.aerotech.com...
  • Page 41: Figure 3-6: Encoder Phasing Reference Diagram (Standard/Square Wave)

    Hardware Manual ALAR-LP Figure 3-6: Encoder Phasing Reference Diagram (Standard/Square Wave) Figure 3-7: Encoder Phasing Reference Diagram (Analog/Sine Wave) www.aerotech.com...
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  • Page 43: Chapter 4: Maintenance

    Visually inspect the stage and cables. Re-tighten loose connectors. Replace or repair damaged cables. Clean the ALAR and any components and cables as needed. Repair any damage before operating the ALAR. Inspect and perform an operational check on all safeguards and protective devices. www.aerotech.com...
  • Page 44: Cleaning And Lubrication

    4. We recommend that you do not disassemble the stage beyond the instructions given in this manual. Proper assembly and calibration can only be done at the factory. Contact Aerotech for more information. Cleaning Use isopropyl alcohol on a lint-free cloth to clean any external metal surface of the ALAR.
  • Page 45: Travel Adjustment

    If you are unsure how to adjust the electrical limit, contact Aerotech for support. If you set the electrical limits to an angle greater than the mechanical hard stop, the stage will hit the hard stop before it is able to safely stop at the electrical limit.
  • Page 46: Mechanical Hard Stop Adjustments

    Hardware Manual Figure 4-1: Limit Flag Adjustment 4.3.2. Mechanical Hard Stop Adjustments The mechanical hard stop-to-hard stop limit travel is not adjustable in the field and must be sent back to the factory to change. Contact Aerotech for details. www.aerotech.com...
  • Page 47: Troubleshooting

    Chapter 3: Electrical Installation and Controller documentation). Stage moves uncontrollably Motor Connections (refer to Chapter 3: Electrical Installation and the Controller documentation). Gains misadjusted (refer to the Controller documentation). Stage oscillates or squeals Encoder signals (refer to the Controller documentation). www.aerotech.com...
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  • Page 49: Appendix A: Warranty And Field Service

    All Other Repairs - After Aerotech's evaluation, the buyer shall be notified of the repair cost. At such time the buyer must issue a valid purchase order to cover the cost of the repair and freight, or authorize the product(s) to be shipped back as is, at the buyer's expense.
  • Page 50 Aerotech's approval. On-site Warranty Repair If an Aerotech product cannot be made functional by telephone assistance or by sending and having the customer install replacement parts, and cannot be returned to the Aerotech service center for...
  • Page 51: Appendix B: Revision History

    Separated -SP, -LP, and -XP into separate manuals 2.00 Updated safety information 1.10 1.09 1.08 1.07 1.06 Revision changes have been archived. If you need a copy of this revision, contact 1.05 Aerotech Global Technical Support. 1.04 1.03 1.02 1.01 1.00 www.aerotech.com...
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  • Page 53: Index

    Solution Electrical Installation solvents Electrical Warnings Specifications EN 60204-1 2010 Encoder EN ISO 12100 2010 Hall-Effect Sensors Encoder Specifications Limit Switch EU 2015/863 Thermistor Specifications stabilizing stage stage distortion grease stabilizing Storage Symptom Hall-Effect Sensors Specifications Handling Humidity www.aerotech.com...
  • Page 54 Index ALAR-LP Hardware Manual Table of Contents Temperature Effects Thermistor Specifications Troubleshooting vacuum guidelines vacuum lubricant (Braycote 602EF) Vacuum Operation Vibration Warnings Warranty and Field Service www.aerotech.com...

This manual is also suitable for:

Alar100lpAlar150lpAlar200lpAlar250lpAlar325lp

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