Aerotech ATX165SL Hardware Manual

Mechanical-bearing, screw-driven linear stage
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ATX165SL and SLE Mechanical-Bearing,
Screw-Driven Linear Stage
HARDWARE MANUAL
Revision 2.00

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Summary of Contents for Aerotech ATX165SL

  • Page 1: Atx165Sl And Sle Mechanical-Bearing, Screw-Driven Linear Stage

    ATX165SL and SLE Mechanical-Bearing, Screw-Driven Linear Stage HARDWARE MANUAL Revision 2.00...
  • Page 2 Global Technical Support Portal for information and support about your Aerotech, Inc. products. The website supplies software, product manuals, Help files, training schedules, and PC-to-PC remote technical support. If necessary, you can complete Product Return (RMA) forms and get information about repairs and spare or replacement parts.
  • Page 3: Table Of Contents

    Hardware Manual ATX165SL/SLE Table of Contents ATX165SL and SLE Mechanical-Bearing, Screw-Driven Linear Stage Table of Contents List of Figures List of Tables EU Declaration of Incorporation UKCA Declaration of Incorporation Safety Procedures and Warnings Installation and Operation Electrical Warnings Motor-Related Warnings...
  • Page 4: List Of Figures

    Load Torque Equation Figure 2-6: Torque Required to Turn Ball Screw in Vertical Orientation Figure 3-1: ATX165SL BM/BMS Motor and Feedback Wiring Figure 3-2: ATX165SLE-E1 and -E2 BM/BMS Motor and Feedback Wiring Figure 3-3: ATX165SLE-E3 BM/BMS Motor and Feedback Wiring...
  • Page 5: List Of Tables

    Encoder Specifications Table 3-17: Rotary Encoder Resolution Specifications Table 3-18: Limit Switch Specifications Table 3-19: Brake Specifications Table 3-20: ATX165SL/SLE Motor Specifications (BMS60) Table 3-21: ATX165SL/SLE Motor Specifications (BM75) Table 3-22: ATX165SL/SLE Motor Specifications (SM60-VT2) Table 4-1: Hardware Requirements www.aerotech.com...
  • Page 6: Eu Declaration Of Incorporation

    101 Zeta Drive Pittsburgh, PA 15238-2811 herewith declares that the product: ATX165SL/SLE stage is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006/42/EC as amended; and that the following harmonized European standards have been applied:...
  • Page 7: Ukca Declaration Of Incorporation

    101 Zeta Drive Pittsburgh, PA 15238-2811 herewith declares that the product: ATX165SL/SLE stage To which this declaration relates, meets the essential health and safety requirements and is in conformity with the relevant UK Legislation listed below: Supply of Machinery (Safety) Regulations 2008...
  • Page 8: Safety Procedures And Warnings

    To find the newest information about this product, refer to www.aerotech.com. If you do not understand the information in this manual, contact Aerotech Global Technical Support. IMPORTANT: This product has been designed for light industrial manufacturing or laboratory environments.
  • Page 9: Installation And Operation

    Hardware Manual ATX165SL/SLE Installation and Operation To decrease the risk of damage to the equipment, you must obey the precautions that follow. DANGER: General Hazard Warning! This product can produce high forces and move at velocities that could cause injury.
  • Page 10: Electrical Warnings

    It is the responsibility of the End User/System Integrator to make sure that stages are properly connected and grounded per Engineering Standards and applicable safety requirements. It is the responsibility of the End User/System Integrator to configure the system drive or controller within the Aerotech motor/stage electrical and mechanical specifications. www.aerotech.com...
  • Page 11: Motor-Related Warnings

    Hardware Manual ATX165SL/SLE Motor-Related Warnings Aerotech motors are capable of producing high forces and velocities. Obey all warnings and all applicable codes and standards when you operate a system that incorporates Aerotech motors. DANGER: Mechanical Hazard! Personnel must be made aware of the mechanical hazards during set up or when you do service to the stage.
  • Page 12: Pinch Points

    ATX165SL/SLE Hardware Manual Pinch Points A pinch point is a mechanical hazard that can occur when there are exposed parts of the stage or system that can move. For example, the travel of a stage tabletop could expose the user to a pinch point between the tabletop and the stage housing.
  • Page 13: Handling And Storage

    Hardware Manual ATX165SL/SLE Handling and Storage IMPORTANT: It is the responsibility of the customer to safely and carefully lift and move the stage. Be careful when you move or transport the stage. Retain the shipping materials for future use. Transport or store the stage in its protective packaging.
  • Page 14 Lifting Features The ATX165SL/SLE has two lifting options: lifting handles (-LF1) and hoist rings (-LF2). The lifting hardware must be removed before the stage can be operated. These options are not available with the foldback version of the stage.
  • Page 15: Chapter 1: Overview

    Hardware Manual ATX165SL/SLE Chapter 1: Overview Table 1-1: Model Numbers and Ordering Options ATX165SL/SLE Mechanical-Bearing Screw-Driven Linear Stage Direct Linear Feedback (Required) No direct linear feedback SLE-E1 Incremental linear encoder, 1 Vpp SLE-E2 Incremental linear encoder, 0.05 µm digital TTL output...
  • Page 16: Environmental Specifications

    Altitude Operating: 0 m to 2,000 m (0 ft to 6,562 ft) above sea level Contact Aerotech if your specific application involves use above 2,000 m or below sea level. Vibration Use the system in a low vibration environment. Floor or acoustical vibration can affect system performance.
  • Page 17: Accuracy And Temperature Effects

    ATX165SL/SLE 1.2. Accuracy and Temperature Effects Aerotech products are designed for and built in a 20°C (68°F) environment. Temperature changes could cause a decrease in performance or permanent damage to the stage. At a minimum, the environmental temperature must be controlled to within 0.25ºC per 24 hours to ensure the stage specifications are repeatable over an extended period of time.
  • Page 18: Basic Specifications

    1. Certified with each stage. 2. Available with Aerotech controllers. 3. Achieved with Aerotech rotary motor with amplified sine encoder. The specification is unidirectional. 4. Achieved with Aerotech rotary motor with 10,000 lines/rev digital encoder.The specification is unidirectional. 5. Requires the selection of an applicable amplifier with sufficient voltage and current.
  • Page 19: Chapter 2: Installation

    IMPORTANT: The stage installation must be in accordance with the instructions provided by this manual and any accompanying documentation. Failure to follow these instructions could result in injury or damage to the equipment. 2.1. Dimensions Figure 2-1: ATX165SL/SLE Dimensions www.aerotech.com...
  • Page 20: Figure 2-2: Atx165Sl/Sle Mounting Plate Dimensions

    ATX165SL/SLE Hardware Manual Figure 2-2: ATX165SL/SLE Mounting Plate Dimensions www.aerotech.com...
  • Page 21: Securing The Stage To The Mounting Surface

    Hardware Manual ATX165SL/SLE 2.2. Securing the Stage to the Mounting Surface DANGER: Mechanical Hazard! Personnel must be made aware of the mechanical hazards during set up or when you do service to the stage. Do not manually move the stage if it is connected to a power source.
  • Page 22: Attaching The Payload To The Stage

    If you start the ATX165SL/SLE without a payload, the servo gains provided by Aerotech with the shipment may not be appropriate and servo instability can occur. Refer to the controller help file for tuning assistance.
  • Page 23: Figure 2-3: Stage Orientations

    Hardware Manual ATX165SL/SLE For a cantilevered load, first determine if it is a Vertical, Horizontal, or a Side cantilever system (refer to Figure 2-3). The Vertical curve is for situations where the stage is mounted in a vertical orientation and the payload is mounted to the table top with its center of gravity extended outward in a direction normal to the tabletop surface.
  • Page 24: Figure 2-4: Cantilevered Load Capability

    ATX165SL/SLE Hardware Manual Figure 2-4: Cantilevered Load Capability www.aerotech.com...
  • Page 25: Figure 2-5: Load Torque Equation

    Hardware Manual ATX165SL/SLE The approximate amount of torque required to turn the ball screw of ATX165SL/SLE series stages can be found from Figure 2-6 or the following equation: Figure 2-5: Load Torque Equation (AxialLoad) (LeadofScrew) Torque π (Efficiency) For ATX165SL/SLE series stages, the ball screw efficiency is rated at 90% (0.90). Refer to Section 1.3.
  • Page 26 ATX165SL/SLE Hardware Manual This page intentionally left blank. www.aerotech.com...
  • Page 27: Chapter 3: Electrical Installation

    Aerotech motion control systems are adjusted at the factory for optimum performance. When the ATX165SL/SLE is part of a complete Aerotech motion control system, setup should only require that you connect the stage to the appropriate drive chassis with the cables provided. Labels on the system components should indicate the appropriate connections.
  • Page 28: Motor And Feedback Connectors

    The motor output of the second axis will not be available to drive a motor. The protective ground connection of the ATX165SL/SLE provides motor frame ground protection only. Additional grounding and safety precautions are required for applications requiring access to the stage while it is energized.
  • Page 29: Table 3-1: 4-Pin Motor Connector Pinout For The -M1 Through -M8 Options

    Hardware Manual ATX165SL/SLE Table 3-1: 4-Pin Motor Connector Pinout for the -M1 through -M8 Options Description Connector Case Shield Connection Motor Phase A Motor Phase B Motor Phase C Reserved Reserved Reserved Reserved Reserved Frame Ground (motor protective ground) Table 3-2:...
  • Page 30: Table 3-3: 25-Pin Feedback Connector Pinout For The -M1 Through -M8 Options

    ATX165SL/SLE Hardware Manual Table 3-3: 25-Pin Feedback Connector Pinout for the -M1 through -M8 Options Description Connector Case Shield Connection Reserved BMS Motors: Over-Temperature Thermistor Sensor BM Motors: Reserved 5V Power Supply Input Reserved Hall Effect Sensor (Phase B) MRK- (Encoder Marker-)
  • Page 31: Table 3-5: 4-Pin Motor Connector Pinout For The -M9 Option

    Hardware Manual ATX165SL/SLE Table 3-5: 4-Pin Motor Connector Pinout for the -M9 Option Description Connector Case Shield Connection Motor Phase A Motor Phase B Motor Phase A Return Brake - (with Brake Option) Brake + (with Brake Option) Reserved Frame Ground (motor protective ground)
  • Page 32: Table 3-7: 25-Pin Feedback Connector Pinout For The -M9 Option

    ATX165SL/SLE Hardware Manual Table 3-7: 25-Pin Feedback Connector Pinout for the -M9 Option Description Connector Case Shield Connection Reserved Reserved 5V Power Supply Input Reserved Reserved MRK- (Encoder Marker-) MRK+ (Encoder Marker+) Reserved Reserved Reserved Reserved Reserved Reserved COS+ (Encoder Cosine+)
  • Page 33: Table 3-9: 9-Pin Limit Connector Pinout

    Hardware Manual ATX165SL/SLE Table 3-9: 9-Pin Limit Connector Pinout Limits Description Connector Case Shield Connection 5V Power Supply Limit Input Limit Common +Limit/CW (Positive/Clockwise Travel Limit) Home Limit -Limit/CCW (Negative/Counterclockwise Limit) Reserved Common ground Reserved Reserved Table 3-10: 9-Pin Mating Connector Part Numbers...
  • Page 34: Table 3-11: 15-Pin Linear Encoder Connector Pinout (-Sle1/-Sle2)

    ATX165SL/SLE Hardware Manual Table 3-11: 15-Pin Linear Encoder Connector Pinout (-SLE1/-SLE2) Description Connector Case Shield Connection Reserved 5 V Supply Common, 0 V (PIN 2 is connected internally to PIN 9) Reserved MRK- (Encoder Marker-) SIN- (Encoder Sine-) COS- (Encoder Cosine-) 5V Power Supply Input (PIN 7 is internally connected to PIN 8) 5V Power Supply Input (PIN 8 is internally connected to PIN 7)
  • Page 35: Motor And Feedback Wiring

    Hardware Manual ATX165SL/SLE 3.2. Motor and Feedback Wiring Shielded cables are required for the motor and feedback connections. Figure 3-1: ATX165SL BM/BMS Motor and Feedback Wiring www.aerotech.com...
  • Page 36: Figure 3-2: Atx165Sle-E1 And -E2 Bm/Bms Motor And Feedback Wiring

    ATX165SL/SLE Hardware Manual Figure 3-2: ATX165SLE-E1 and -E2 BM/BMS Motor and Feedback Wiring www.aerotech.com...
  • Page 37: Figure 3-3: Atx165Sle-E3 Bm/Bms Motor And Feedback Wiring

    Hardware Manual ATX165SL/SLE Figure 3-3: ATX165SLE-E3 BM/BMS Motor and Feedback Wiring www.aerotech.com...
  • Page 38: Figure 3-4: Atx165Sl Stepper Motor And Feedback Wiring

    ATX165SL/SLE Hardware Manual Figure 3-4: ATX165SL Stepper Motor and Feedback Wiring www.aerotech.com...
  • Page 39: Figure 3-5: Atx165Sle-E1 And -E2 Stepper Motor And Feedback Wiring

    Hardware Manual ATX165SL/SLE Figure 3-5: ATX165SLE-E1 and -E2 Stepper Motor and Feedback Wiring www.aerotech.com...
  • Page 40: Figure 3-6: Atx165Sle-E3 Stepper Motor And Feedback Wiring

    ATX165SL/SLE Hardware Manual Figure 3-6: ATX165SLE-E3 Stepper Motor and Feedback Wiring www.aerotech.com...
  • Page 41: Motor And Feedback Specifications

    Hardware Manual ATX165SL/SLE 3.3. Motor and Feedback Specifications IMPORTANT: All 5 V supplies share one common connection within the stage. Table 3-14: Hall-Effect Sensor Specifications Specification Supply Voltage 5 V ±5% Supply Current 50 mA Output Type Open Collector Output Voltage 24 V max (pull up)
  • Page 42: Table 3-18: Limit Switch Specifications

    Third party controller LIMIT inputs typically require 10 kΩ pull-up to logic VDC supply. Note: If the ATX165SL/SLE is driven beyond the electrical limit, it will encounter a mechanical stop. Impacting the mechanical stop could cause damage to the stage, even at low speeds. Refer to Section 3.2.
  • Page 43: Table 3-21: Atx165Sl/Sle Motor Specifications (Bm75)

    (2) All performance and electrical specifications have a tolerance of ±10%. (3) Values shown at maximum coil temperature, with housed motor mounted to a 305×305×12.7 mm aluminum heat sink. (4) Peak torque assumes correct rms current; consult Aerotech. (5) Torque constant and motor constant specified at stall. Table 3-22:...
  • Page 44: Limits, Marker, And Machine Direction

    ATX165SL/SLE Hardware Manual 3.4. Limits, Marker, and Machine Direction Aerotech stages have both a positive and negative Machine Direction and a positive and negative Programming Direction. Machine Direction: The machine direction is defined by how the encoder and motor are mounted and the electrical wiring connections in the stage.
  • Page 45: Motor And Feedback Phasing

    Hardware Manual ATX165SL/SLE 3.5. Motor and Feedback Phasing Motor phase voltage is measured relative to the virtual wye common point. Figure 3-8: Hall Phasing Diagram www.aerotech.com...
  • Page 46: Figure 3-9: Encoder Phasing Reference Diagram (Standard/Square Wave)

    ATX165SL/SLE Hardware Manual Figure 3-9: Encoder Phasing Reference Diagram (Standard/Square Wave) Figure 3-10: Digital Encoder Phasing Reference Diagram (Sine Wave) www.aerotech.com...
  • Page 47: Chapter 4: Maintenance

    4.1. Service and Inspection Schedule Inspect the ATX165SL/SLE at least once per month. The need for a longer or shorter inspection interval will depend on the application and conditions, such as the duty cycle, speed, and environment.
  • Page 48: Cleaning And Lubrication

    5. We recommend that you do not disassemble the stage beyond the instructions given in this manual. Proper assembly and calibration can only be done at the factory. Contact Aerotech for more information.
  • Page 49: Figure 4-1: Hardcover Removal (Left)

    1. Drive the stage to the end of travel closest to the motor. Remove the four flat head screws Slide the exposed hardcover out from under the carriage. Note that the 250 mm travel version of the ATX165SL/SLE has a two-piece hardcover on this side of the stage. Figure 4-1:...
  • Page 50: Figure 4-2: Hardcover Removal (Right)

    8. Apply a thin, continuous film of lubricant to the ball-screw threads and linear bearing guides. Aerotech recommends that you use a good quality, natural bristle artist's brush. 9. Move the stage to the opposite end of travel. If the stage has an optional brake, the stage cannot be moved by hand.
  • Page 51: Motor Mounting

    4-3). Loctite products are printed with an expiration date. Before use, be sure that the expiration date is legible and the product has not expired. If your stage is used in a vacuum or cleanroom environment, contact Aerotech. Figure 4-3: Motor Mounting Overview www.aerotech.com...
  • Page 52: Figure 4-4: Attach The Coupling Adapter To The Motor Shaft

    ATX165SL/SLE Hardware Manual How to Mount a Motor 1. Remove the hard cover from the stage. 2. Locate the Shaft Coupling access holes (refer to Figure 4-3). 3. Test fit the Motor and Shaft Coupling to the Stage to ensure that you have access to the Shaft Coupling clamp screws.
  • Page 53: Figure 4-6: Tighten The Shaft Coupling To The Drive Screw

    Hardware Manual ATX165SL/SLE 7. Tighten the Shaft Coupling to the drive screw (Figure 4-6). Refer to Table 4-1 for the correct hardware and torque requirements. Figure 4-6: Tighten the Shaft Coupling to the Drive Screw 8. Rotate the drive screw by hand to ensure that the drive screw rotates freely.
  • Page 54: Foldback Motor Belt Adjustment

    ATX165SL/SLE Hardware Manual 4.4. Foldback Motor Belt Adjustment This section applies to stages equipped with foldback motor options. On foldback stages, the motor torque is transferred to the ball screw via a timing belt. Belt tension is critical to stage performance and accuracy.
  • Page 55: Figure 4-7: Foldback Motor Cover Removal

    Hardware Manual ATX165SL/SLE Figure 4-7: Foldback Motor Cover Removal IMPORTANT: If the stage has been calibrated (-PL2 option), note the orientation of the two pulleys with regard to each other or recalibration might be required. www.aerotech.com...
  • Page 56: Figure 4-8: Foldback Motor Part Callouts

    ATX165SL/SLE Hardware Manual Figure 4-8: Foldback Motor Part Callouts Figure 4-9: Lubricate the Pulley Flanges www.aerotech.com...
  • Page 57: Troubleshooting

    Hardware Manual ATX165SL/SLE 4.5. Troubleshooting Symptom Possible Cause and Solution Shipping brackets still installed. Remove the red anodized shipping brackets. Brake not released (if equipped with brake). In Limit condition. Check limits (refer to Chapter 3: Electrical Installation) and Stage will not move refer to the Controller documentation for polarity and compatibility requirements (Example: voltage requirements).
  • Page 58 ATX165SL/SLE Hardware Manual This page intentionally left blank. www.aerotech.com...
  • Page 59: Appendix A: Warranty And Field Service

    All Other Repairs - After Aerotech's evaluation, the buyer shall be notified of the repair cost. At such time the buyer must issue a valid purchase order to cover the cost of the repair and freight, or authorize the product(s) to be shipped back as is, at the buyer's expense.
  • Page 60 Aerotech's approval. On-site Warranty Repair If an Aerotech product cannot be made functional by telephone assistance or by sending and having the customer install replacement parts, and cannot be returned to the Aerotech service center for...
  • Page 61: Appendix B: Revision History

    Hardware Manual ATX165SL/SLE Appendix B: Revision History Revision Description Safety section updated 2.00 New Section: Section 4.3. Motor Mounting 1.01 Added maximum speed for all motor options: Section 1.3. 1.00 New Manual www.aerotech.com...
  • Page 62 ATX165SL/SLE Hardware Manual This page intentionally left blank. www.aerotech.com...
  • Page 63: Index

    ATX165SL/SLE Hardware Manual Index Index EU 2015/863 eyebolts 2006/42/EC foldback Foldback Motor Belt Tension Adjustment Procedure Accuracy and Temperature Effects Accuracy of the Ballscrew Hall-Effect Sensors Specifications acetone (caution) Handling Altitude Humidity Ambient Temperature Attaching the Payload Inspection Schedule isopropyl alcohol...
  • Page 64 Index ATX165SL/SLE Hardware Manual Specifications BM75 Motor BMS60 Motor Brake Encoder Hall-Effect Sensors Limit Switch SM60-VT2 Motor Thermistor Specifications stabilizing stage stage distortion stabilizing standoffs Storage Symptom Table of Contents Temperature Effects thermal expansion coefficient Thermistor Specifications torque Troubleshooting Vibration...

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