State
Valve has a short circuit.
Pressure sensor has a short
circuit.
SF LED is red ON.
Pressure sensor has a
failure/disconnection.
No connection or a disconnection
between the SI Unit and the
vacuum manifold.
A firmware error is occurring.
State
Incorrect connection at the valve
Valve is not
or the wiring of the valve is
working even
broken.
though the LED
on the valve is
There is a problem other than
ON.
electrical matter.
The LED on valve
is OFF even
Incorrect programming of process
though the output
data setting.
instruction is ON.
State
The setting of the supply valve
type has a mismatch.
The setting of the pressure
SF LED is green
threshold/hysteresis has a failure.
flashing.(0.5Hz)
Valve protection function is
operating.
(Significant vacuum pressure drop
during vacuum pressure holding.)
NOTE
The Diagnostic history
Table 10-5. Troubleshooting "SF LED is red ON"
Probable causes
Table 10-6. Troubleshooting "Valve is not working"
Probable causes
Table 10-7. Troubleshooting "SF LED is green flashing"
Probable causes
(Section
7.2) allows to identify the CH that has the issues.
Checking methods and measures
Refer to Diagnosis history
CH(s) have a short circuit.
Refer to the manual for vacuum manifold to check the
relevant ejector(s) connections and replace the
ejector(s) if necessary.
Refer to the manual for vacuum manifold to check all
ejectors connections and replace the ejector(s) if
necessary.
Refer to Diagnosis history
CH(s) have a failure/disconnection.
Refer to the manual for vacuum manifold to check the
relevant ejector(s) connections and replace the
ejector(s) if necessary.
If the vacuum manifold includes a blanking plate, check
the pressure sensor use setting
Check the connections between the SI Unit and the
vacuum manifold and restart the SI Unit power supply.
Download the latest firmware and update the firmware.
Checking methods and measures
Refer to the manual for vacuum manifold and
check/replace the valve.
Refer to the manual for vacuum manifold and carry out
maintenance.
Check the program and output address settings for the
problem area.
Checking methods and measures
Check and correct the supply valve type setting
5.1.8) for the relevant CH, then carry out a vacuum
instruction.
Check and correct the pressure threshold/hysteresis
setting
(Section 5.1.1
Check and if necessary replace the vacuum pad or air
tubing etc. on the relevant CH(s).
Refer to
Section 5.1.11
number of times.
-32-
(Section
7.2) to identify which
(Section
7.2) to identify which
(Section
5.1.7).
onwards) for the relevant CH.
and consider changing the
No.DOC1048575-1
(Section
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