4.1. Input process data
4.1.1. Vacuum status
Type
Size
Offset
BIT
0.1
0.0
BIT
0.1
0.1
BIT
0.1
0.2
BIT
0.1
0.3
BIT
0.1
0.4
BIT
0.1
0.5
BIT
0.1
0.6
BIT
0.1
0.7
BIT
0.1
1.0
BIT
0.1
1.1
BIT
0.1
1.2
BIT
0.1
1.3
BIT
0.1
1.4
BIT
0.1
1.5
BIT
0.1
1.6
BIT
0.1
1.7
4.1.2. Release status
Type
Size
Offset
BIT
0.1
0.0
BIT
0.1
0.1
BIT
0.1
0.2
BIT
0.1
0.3
BIT
0.1
0.4
BIT
0.1
0.5
BIT
0.1
0.6
BIT
0.1
0.7
BIT
0.1
1.0
BIT
0.1
1.1
BIT
0.1
1.2
BIT
0.1
1.3
BIT
0.1
1.4
BIT
0.1
1.5
BIT
0.1
1.6
BIT
0.1
1.7
Table 4-2. Vacuum status
Name
Vacuum confirmation CH0
Vacuum confirmation CH1
Vacuum confirmation CH2
Vacuum confirmation CH3
Vacuum confirmation CH4
Vacuum confirmation CH5
Vacuum confirmation CH6
Vacuum confirmation CH7
Vacuum confirmation CH8
Vacuum confirmation CH9
Vacuum confirmation CH10
Vacuum confirmation CH11
Vacuum confirmation CH12
Vacuum confirmation CH13
Vacuum confirmation CH14
Vacuum confirmation CH15
Table 4-3. Release status
Name
Release confirmation CH0
Release confirmation CH1
Release confirmation CH2
Release confirmation CH3
Release confirmation CH4
Release confirmation CH5
Release confirmation CH6
Release confirmation CH7
Release confirmation CH8
Release confirmation CH9
Release confirmation CH10
Release confirmation CH11
Release confirmation CH12
Release confirmation CH13
Release confirmation CH14
Release confirmation CH15
Description
0: No vacuum adsorption
1: During vacuum adsorption
The vacuum status thresholds and hysteresis are
set in
Sections 5.1.1
Valid values are up to CH3 for the vacuum manifold
4-stations setting, up to CH7 for the 8-stations
setting and up to CH11 for the 12-stations setting.
Description
0: No vacuum release
1: During vacuum release
The release status thresholds and hysteresis are
set in
Sections 5.1.5
Valid values are up to CH3 for the vacuum manifold
4-stations setting, up to CH7 for the 8-stations
setting and up to CH11 for the 12-stations setting.
-15-
and
Section
5.1.2.
and
Section
5.1.6.
No.DOC1048575-1
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