7. LED indication / Diagnosis history
7.1. LED indication
LED
Colour
Indication
OFF
Blinking(2.5 Hz)
RUN
Green
Single Flash
Flickering(10 Hz) Bootstrap
ON
Double Flash
Single Flash
ERR
Red
Blinking(2.5 Hz)
OFF
Red ON
Red/
SF
Green
Green Flashing
(0.5 Hz)
OFF
OFF
L/A1
Green
ON
Flickering(10 Hz) Port 1:
OFF
L/A2
Green
ON
Flickering(10 Hz) Port 2:
OFF
PWR
Green
Flashing(0.5 Hz)
ON
OFF
PWR(V) Green
ON
RUN
ERR
SF
Init
Pre-Operational
Safe-Operational
Operational
Process Data Watchdog Timeout / EtherCAT Watchdog Timeout
Local Error
Invalid Configuration
No Error
One of the following may have occurred.
Valve has a short circuit.
Pressure sensor has a short circuit.
Pressure sensor has a failure/disconnection.
No connection or a disconnection between the SI Unit and the vacuum
manifold.
A firmware error is occurring.
One of the following may have occurred.
The setting of the supply valve type has a mismatch.
The setting of the pressure threshold/hysteresis has a failure.
Valve protection function is operating.
No diagnosis information.
Port 1: No Link / No Activity
Port 1:
Port 2: No Link / No Activity
Port 2:
Power supply for logic/input (PWR) is not present.
Power supply for logic/input (PWR) is present but is low.
(< approx. 18 VDC)
Power supply for logic/input (PWR) is present.
Power supply for output (PWR(V)) is low or is not present.
Power supply for output (PWR(V)) is present.
Fig 7-1. LED indication
L/A1
L/A2
Description
Link / No Activity
Link /
Activity
Link / No Activity
Link /
Activity
-24-
PWR PWR(V)
No.DOC1048575-1
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