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5.2
Close valve
Local operation:
('Control View', 'Control Performance Analyzer' or
'Service Box 2')
Push CLOSE button
5.3
Open valve
Local operation:
('Control View', 'Control Performance Analyzer' or
'Service Box 2')
Push OPEN button
5.4
Position control
The valve position is directly controlled according to the position setpoint.
Local operation:
('Control View', 'Control Performance Analyzer' or
'Service Box 2')
Select or enter position setpoint
5.5
Pressure control
The included PID controller controls the chamber pressure according to the pressure setpoint by means
of the valve position. The PID controller works with an adaptive algorithm to achieve best results under
altering conditions (gasflow, gas type).
Local operation:
('Control View', 'Control Performance Analyzer'
or 'Service Box 2')
Select or enter pressure setpoint
54/83
OPERATION
To prepare valve for PRESSURE CONTROL perform complete «Setup procedure».
The valve has parameters that may be modified to tune pressure control
performance. Refer to «Tuning of control performance».
Edition 2013-04-12
Remote operation:
(Refer to chapter: «Control commands» for
details)
Send CLOSE VALVE
Remote operation:
(Refer to chapter: «Control commands» for
details)
Send OPEN VALVE
Remote operation:
(Refer to chapter: «Control commands» for
details)
Send POSITION CONTROL
Remote operation:
(Refer to chapter: «Control commands» for details)
Send PRESSURE CONTROL
Series 612
601894EA
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