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Series 612
4.4.2
Requirements to sensor connection
To achieve fast and accurate pressure control a fast sensor response is required. Sensor response time:
< 50ms. The sensor is normally connected to the chamber by a pipe. To maintain that the response time
is not degraded by this connection it needs to meet the following requirements:
Inner diameter of connection pipe: > = 10 mm
Length of connection pipe:
These conductance guidelines must include all valves and limiting orifices that may also be present. Make
also sure that there is no obstruction in front of sensor connection port inside the chamber. The sensor
should also be mounted free of mechanical shock and vibration. Dynamic stray magnetic fields may
introduce noise to sensor output and should be avoided or shielded.
min.
10 mm
Process
Chamber
4.5
Electrical connection
601894EA
INSTALLATION
Pressure Sensor
L1
Isolation Valve
L1 + L2 < = 300 mm
Wrong connection
Wrong connection may result in damage of controller or power supply.
Connect all cables exactly as shown in the following descriptions and schematics.
Burned connector pins (spark)
Connector pins or electronic parts could damage, if plugged and unplugged under
power.
Do not plug or unplug connectors under power.
Edition 2013-04-12
< = 300 mm
L2
min. 10 mm
(optional)
NOTICE
NOTICE
19/83
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