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Series 612
3.2.1
Pressure control system overview and function
Vacuum pressures are always absolute pressures unless explicitly specified as pressure differences.
2
601894EA
DESIGN AND FUNCTION
Q
p
V
Seff
1
6
M
9
Example: Downstream control
Edition 2013-04-12
1
Valve
2
Process chamber
3
3
Gas inlet
4
Pressure sensor(s)
4
5
Sensor cable
6
Controller and actuator
7
Cable to remote control unit
5
8
Cable to power supply
9
HV Pump
7
S
Q / p
eff
8
S
effective pump speed (ls
eff
Q Gas flow (mbar)
p
Pressure (mbar)
or units used in USA
= 12.7 • Q / p
S
eff
S
effective pump speed (ls
eff
Q Gas flow (sccm)
p
Pressure (mTorr)
-1
)
-1
)
11/83
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