3.7
Close valve
('Control View', 'Control Performance Analyzer' or
Push CLOSE button
3.8
Open valve
('Control View', 'Control Performance Analyzer' or
Push OPEN button
3.9
Position control
The valve position is directly controlled according to the position setpoint.
('Control View', 'Control Performance Analyzer' or
Select or enter position setpoint
3.10 Pressure control
To prepare valve for PRESSURE CONTROL perform complete «Setup procedure».
The valve has parameters that may be modified to tune pressure control performance.
Refer to «Tuning of control performance».
The included PID controller controls the chamber pressure according to the pressure setpoint by means of the valve
position. The PID controller works with an adaptive algorithm to achieve best results under altering conditions (gasflow,
gas type).
('Control View', 'Control Performance Analyzer' or
Select or enter pressure setpoint
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com
Installation, Operating & Maintenance Instructions
Series 612 DN 40 (I.D. 1.5"), RS485
Local
operation:
'Service Box 2')
Local
operation:
'Service Box 2')
Local
operation:
'Service Box 2')
Local
operation:
'Service Box 2')
Remote
operation:
(Refer to chapter «RS485 control commands» for
details)
Send CLOSE VALVE
Remote
operation:
(Refer to chapter «RS485 control commands» for
details)
Send OPEN VALVE
Remote
operation:
(Refer to chapter «RS485 control commands» for
details)
Send POSITION CONTROL
Remote
operation:
(Refer to chapter «RS485 control commands» for
details)
Send PRESSURE CONTROL
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2011-07-07