Considering Earthquake Protection; Using A Splinter Shield Or Protective Screen; Tbl. 6: Requirements For Dimensioning High Vacuum Connection Supplied By Cus; Tbl. 7: Behavior Of Pumping Speed When Using A Splinter Shield Or Protective Screen - Pfeiffer Vacuum HiPace 800 Operating Instructions Manual

Parameter
Flatness
Minimum tensile strength of the flange material in all operating states in rela-
tion to the engagement depth of the fixing screws
Maximum permissible surrounding magnetic field
Maximum permissible irradiated thermal output
Maximum permissible rotor temperature
Tbl. 6:
5.3.2 Considering earthquake protection
Vacuum pump damage caused by external vibrations
In the event of earthquakes or other external vibrations, there is the risk of the rotor coming into con-
tact with the safety bearings, or the housing wall touching the turbopump. This can produce mechani-
cal loads up to and including destruction of the turbopump.
► Make sure that all flange and safety connections absorb the resulting forces.
► Secure the vacuum chamber against displacement or tipping.
Fig. 3:
1
5.3.3 Using a splinter shield or protective screen
Pfeiffer Vacuum centering rings with splinter shield or protective screen in the high vacuum flange pro-
tect the Turbopump against foreign matter from the vacuum chamber. The puming speed of the pump is
reduced according to the passage guide values and the size of the high vacuum flange.
Flange size
Splinter shield DN 200
Protective screen DN 200
Tbl. 7:
1)
2)
Requirements for dimensioning high vacuum connection supplied by customer
VACUUM SYSTEM
Example: Safety connections
Safety connections, customer-side
Behavior of pumping speed when using a splinter shield or protective screen
The theoretically calculated torque in the event of a burst (rotor shaft breakage) according to ISO 27892 was
not reached in any experimental test.
A one-sided load is not permitted.
NOTICE
1
Reduced pumping speed in % by gas type
H He
2
10 13
3 3
Installation
HiPace 800
± 0.05 mm
170 N/mm 2 at 2.5 x d
2
270 N/mm at 1.5 x d
6.0 mT
4.2 W
90 ℃
N Ar
2
26 28
8 9
23/64