Considering Earthquake Protection; Using Splinter Shield Or Protective Screen; Tbl. 6: Requirements For Dimensioning High Vacuum Connection Supplied By Cus; Tbl. 7: Effect Of Splinter Shield Or Protective Screen On Pumping Speed - Pfeiffer Vacuum HIPACE 80 MINI Operating Instructions Manual

Installation
Parameter
Maximum torque occurring in the event of a burst
Maximum permissible axial load on the high vacuum flange
Flatness
Minimum tensile strength of the flange material in all operating states in rela-
tion to the engagement depth of the fixing screws
Maximum permissible rotor temperature
Maximum permissible bakeout temperature at the high vacuum flange
Tbl. 6:
Important information for correct installation
► Only use the approved mounting kits of Pfeiffer Vacuum for the high vacuum connection of the
5.3.2 Considering earthquake protection
Vacuum pump damage caused by external vibrations
In the event of earthquakes or other external vibrations, there is the risk of the rotor coming into con-
tact with the safety bearings, or the housing wall touching the turbopump. This can produce mechani-
cal loads up to and including destruction of the turbopump.
► Make sure that all flange and safety connections absorb the resulting forces.
► Secure the vacuum chamber against displacement or tipping.
Fig. 3:
1 Safety connection, customer-side
5.3.3 Using splinter shield or protective screen
Pfeiffer Vacuum centering rings with splinter shield or protective screen in the high vacuum flange pro-
tect the turbopump against foreign matter from the vacuum chamber. The pumping speed of the turbo-
pump decreases according to the conductivity and the size of the high vacuum flange.
Flange size
Splinter shield DN 63
Protective screen DN 63
Tbl. 7:
1)
2)
22/54
Requirements for dimensioning high vacuum connection supplied by customer
turbopump.
VACUUM CHAMBER
Example: Securing against displacement and tipping caused by external vibrations
Effect of splinter shield or protective screen on pumping speed
The theoretically calculated torque in the event of a burst (rotor shaft breakage) according to ISO 27892 was
not reached in any experimental test.
A one-sided load is not permitted.
1)
2)
NOTICE
1
Reduced pumping speed in % for the gas type
H He
2
3 6
1 1
HiPace 80 mini
600 Nm
200 N
± 0.05 mm
170 N/mm 2 at 2.5 x d
270 N/mm 2 at 1.5 x d
90 ℃
120 ℃
N Ar
2
15 16
4 4