Technical Data And Dimensions; General; Technical Data - Pfeiffer Vacuum HiPace 800 Operating Instructions Manual

Technical data and dimensions

14 Technical data and dimensions
14.1 General
This section describes the basis for the technical data of Pfeiffer Vacuum turbopumps.
● Specifications according to PNEUROP committee PN5
● ISO 27892 2010:"Vacuum technology - Turbomolecular pumps - Measurement of rapid shutdown
● ISO 21360 2012: "Vacuum technology - Standard methods for measuring vacuum-pump perform-
● ISO 21360 2018: "Vacuum technology - Standard methods for measuring vacuum-pump perform-
● Ultimate pressure with test dome after 48 h bake out duration
● Gas throughput with water cooling; backing pump = rotary vane pump (10 m
● Cooling water consumption at maximum gas throughput, cooling water temperature 25 °C
● Integral leakage rate with 100 % helium concentration, 10 s measurement duration
● Sound pressure level at distance to vacuum pump = 1 m
mbar
bar
Pa
hPa
kPa
Torr | mm Hg
Tbl. 19:
mbar l/s
Pa m
sccm
Torr l/s
atm cm
Tbl. 20:
14.2 Technical data
Type designation extended
Part number
Connection flange (in)
Connection flange (out)
Final pressure
Compression ratio for Ar
Compression ratio for H
56/64

Technical data

Maximum values refer exclusively to the input as a single load.
torque"
ance - Part 1: General description"
ance - Part 4: Turbomolecular vacuum pumps"
mbar
1
1000
0.01
1
10
1.33
Conversion table: Pressure units
mbar l/s
1
10
3 /s
-2
1.69 · 10
1.33
3 /s 1.01
Conversion table: Units for gas throughput
2
bar Pa
1 · 10 -3 100
1
1 · 10 5
1
1 · 10 -5
100
1 · 10 -3
0.01 1000
133.32
1.33 · 10 -3
2
1 Pa = 1 N/m
sccm
Pa m 3 /s
0.1 59.2
1 592
-3 1
1.69 · 10
0.133 78.9
0.101 59.8
HiPace® 800 with
TC 400
PM P04 300
DN 200 ISO-K
DN 25 ISO-KF/G ¼"
< 1 · 10 -7 hPa
> 1 · 10 11
5
4 · 10
3
/h)
hPa kPa Torr | mm Hg
1 0.1 0.75
1000 100 750
0.01
1 · 10 -3 7.5 · 10
1 0.1 0.75
10 1 7.5
1.33 0.133 1
Torr l/s
0.75
7.5
-2
1.27 · 10
1
0.76
HiPace® 800 with HiPace® 800 with
TC 400 TC 400
PM P04 301 PM P04 302
DN 200 CF-F DN 200 ISO-F
DN 25 ISO-KF/ DN 25 ISO-KF/G ¼"
G ¼"
< 5 · 10 -10 hPa < 1 · 10
> 1 · 10 11 > 1 · 10
5
4 · 10 4 · 10
-3
atm cm 3 /s
0.987
9.87
-2
1.67 · 10
1.32
1
-7 hPa
11
5