Technical Data; Specifications; Data Table - PI P-73 Series User Manual

10 Technical Data

In this Chapter

Specifications .............................................................................................................. 37

Dimensions .................................................................................................................. 41
Torque for Stainless Steel Screws (A2-70) ................................................................. 46
Pin Assignment ............................................................................................................ 47
Suitable Piezo Controllers ........................................................................................... 50
10.1 Specifications

10.1.1 Data Table

Unit
Active axes
Motion and
positioning
Integrated sensor
Open-loop travel in µm
X, Y, –20 to +120 V
Open-loop travel in µm
Z, –20 to +120 V
Closed-loop travel in µm
X, Y
Closed-loop travel in µm
Z
Open-loop resolution nm
in X, Y
nm
Open-loop resolution
in Z
Closed-loop nm
resolution in X, Y
Closed-loop nm
resolution in Z
Linearity %
deviation in X, Y
Linearity %
deviation in Z
nm
Repeat-
ability in X, Y
P-73x Nanopositioners
P-733.2CD P-733.3CD
P-733.2CL P-733.3CL
X, Y X, Y, Z
Capacitive Capacitive
115 115
– 12
100 100
– 10
0.2 0.2
– 0.1
0.3 0.3
– 0.2
0.03 0.03
– 0.03
<2 <2
PZ103E
P-733.2DD P-733.3DD
X, Y X, Y, Z
Capacitive Capacitive
33 33
– 14
30 30
– 10
0.1 0.1
– 0.1
0.1 0.1
– 0.1
0.03* 0.03*
– 0.03*
< 2 <2
Version: 1.0.0
10 Technical Data
P-734.2CD P-733.ZCD
P-734.2CL P-733.ZCL
X, Y Z
Capacitive Capacitive
110 –
– 115
100 –
– 100
0.2 –
– 0.2
0.3 –
– 0.3
0.03 –
– 0.03
<2.5 –
37