Technical Data; Specifications; Data Table - PI P­73 Series User Manual

10 Technical Data

10 Technical Data
In this Chapter

Specifications ............................................................................................................................... 37

Dimensions .................................................................................................................................. 43
Torque for Stainless Steel Screws (A2-70) ................................................................................... 48
Pin Assignment ............................................................................................................................ 49
10.1 Specifications
10.1.1

Data Table

Active axes
Motion and positioning
Integrated sensor
Travel range at -20 to 120 V,
open loop
Travel range, closed loop
Resolution, open loop
Resolution, closed loop
Linearity error (X, Y)
Repeatability (X, Y)
Pitch (X, Y)
Yaw (X, Y)
Mechanical properties
Stiffness
Resonant frequency, no load
Resonant frequency, under
load, 120 g
Resonant frequency, under
load, 200 g
Push/pull force capacity in
motion direction
Drive properties
Piezo ceramic
Electrical capacitance
P­73x Nanopositioner
P­733.2CD P­733.2DD
P­733.2CL
X, Y X, Y
Capacitive Capacitive
115 µm × 115 µm 33 µm × 33 µm
100 µm × 100 µm 30 µm × 30 µm
0.2 0.1
0.3 0.1
0.03 0.03*
<2 <2
±3 ±5
±10 ±10
1.5 20
500 2230
370 –
340 1550
50 / 20 50 / 20
PICMA® P-885 PICMA® P-885
6 (per axis) 6.2 (per axis)
PZ103E
Unit Tolerance
+20 % /
-0 %
nm Typ.
nm Typ.
% Typ.
nm Typ.
µrad Typ.
µrad Typ.
N/µm ±20 %
Hz ±20 %
Hz ±20 %
Hz ±20 %
N Max.
µF ±20 %
Version: 1.1.0 37