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PZ247E
P-63x Nanopositioner
User Manual
Version: 1.1.0
Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany
Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, www.pi.ws
Date: 29.04.2022
This document describes the following products:
P-630.XCD
Linear piezo nanopositioner with aperture,
40 µm, direct position measuring, capacitive
sensor
P-631.XCD
Linear piezo nanopositioner with aperture,
80 µm, direct position measuring, capacitive
sensor
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Summary of Contents for PI P-63 Series
- Page 1 P-631.XCD Linear piezo nanopositioner with aperture, 80 µm, direct position measuring, capacitive sensor Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, www.pi.ws...
- Page 2 The patents held by PI are found in our patent list: https://www.physikinstrumente.com/en/about-pi/patents © 2022 Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany. The text, photographs and drawings in this manual are protected by copyright. With regard thereto, Physik Instrumente (PI) GmbH & Co. KG retains all the rights.
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Page 3: Table Of Contents
Contents About this Document Objective and Target Group of this User Manual ............1 Symbols and Typographic Conventions..............1 Definition of Terms ..................... 2 Figures ........................2 Other Applicable Documents ..................2 Downloading Manuals ....................3 Safety Intended Use ......................5 General Safety Instructions .................. - Page 4 Maintenance General Notes on Maintenance ................27 Cleaning the P-63x ....................27 Troubleshooting Customer Service Technical Data 10.1 Specifications ......................33 10.1.1 Data Table ....................33 10.1.2 Maximum Ratings ..................34 10.1.3 Ambient Conditions and Classifications ............35 10.2 Dimensions ....................... 35 10.3 Torque for Stainless Steel Screws (A2-70) ..............
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Page 5: About This Document
1 About this Document About this Document In this Chapter Objective and Target Group of this User Manual ................1 Symbols and Typographic Conventions ..................1 Definition of Terms ........................2 Figures ............................2 Other Applicable Documents ......................2 Downloading Manuals ........................3 Objective and Target Group of this User Manual This user manual contains the information required for using the P-63x as intended ("x"... -
Page 6: Definition Of Terms
For better understandability, the colors, proportions, and degree of detail in illustrations can deviate from the actual circumstances. Photographic illustrations may also differ and must not be seen as guaranteed properties. Other Applicable Documents The devices and software tools from PI mentioned in this documentation are described in separate manuals. Product Document... -
Page 7: Downloading Manuals
If a manual is missing or problems occur with downloading: Contact our customer service department (p. 31). Downloading Manuals 1. Open the website www.pi.ws. 2. Search the website for the product number (e.g., P-630) or the product family (e.g., nanopositioner). -
Page 9: Safety
It is only possible to use the P-63x as intended in conjunction with suitable electronics (p. 11) available from PI. The electronics is not included in the scope of delivery of the P-63x. The electronics must provide the required operating voltages. To ensure proper performance of the servo control system, the electronics must be able to read out and process the signals from the capacitive sensors. - Page 10 Do not open the P-63x. Discharge the positioner's piezo actuators before installing: Connect the positioner to the switched-off PI electronics equipped with an internal discharge resistor. Do not pull the plug connector out of the electronics during operation.
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Page 11: Organizational Measures
2 Safety Organizational Measures User manual Always keep this user manual together with the P-63x. The latest versions of the user manuals are available for download (p. 3) on our website. Add all information from the manufacturer to the user manual, for example supplements or technical notes. -
Page 13: Product Description
3 Product Description Product Description In this Chapter Model Overview ..........................9 Product View ..........................9 Product Labeling .......................... 10 Scope of Delivery ......................... 11 Suitable Electronics ........................11 Technical Features ........................12 Model Overview The P-63x is available in the following versions: Model Description P-630.XCD... -
Page 14: Product Labeling
Meaning of each position (from the left): 1 = internal information 2 and 3 = year of manufacture 4 to 9 = consecutive number WWW.PI.WS Manufacturer's address (website) CE conformity mark Warning sign "Pay attention to the manual!" Symbol for the protective earth conductor (p. 16) The arrow indicates the positive direction of motion. -
Page 15: Scope Of Delivery
3 Product Description Scope of Delivery Product number Description P-63x Positioner according to order (p. 9) 000036450 M4 screw set for protective earth, consisting of: 1 M4x8 flat-head screw with cross recess, ISO 7045 2 lock washers 2 flat washers ... -
Page 16: Technical Features
3 Product Description Technical Features 3.6.1 PICMA® Piezo Actuators P-63x positioners are driven by PICMA® piezo actuators. PICMA® actuators have all-ceramic insulation and their performance and lifetime are therefore far superior to conventional actuators. The ceramic insulation layer protects the monolithic piezoceramic block against humidity and failure due to increased leakage current. -
Page 17: Unpacking
4 Unpacking Unpacking NOTICE Mechanical overload due to incorrect handling! An impermissible mechanical load on the motion platform of the P-63x can cause damage to the piezo actuators, sensors, and flexures of the P-63x as well as loss of accuracy. ... -
Page 19: Installation
Do not open the P-63x. Discharge the positioner's piezo actuators before installing: Connect the positioner to the switched-off PI electronics equipped with an internal discharge resistor. Do not pull the plug connector out of the electronics during operation. -
Page 20: Connecting The P-63X To The Protective Earth Conductor
NOTICE Damage due to unsuitable cables! Unsuitable cables can damage the P-63x and the electronics. Use cables provided by PI only to connect the P-63x to the electronics. NOTICE Damage due to improper mounting! Improper mounting of the P-63x or incorrectly mounted parts can damage the P-63x. - Page 21 5 Installation INFORMATION Ground loops can occur when the P-63x is grounded via its protective earth connector and also via the shielding around the cable connected to the electronics. If a ground loop occurs, contact our customer service department (p. 31). The P-63x has an M4 hole for attaching the protective earth conductor.
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Page 22: Mounting The P-63X
5 Installation Mounting the P-63x NOTICE Warping the P-63x when mounting onto uneven surfaces! Fixing the P-63x onto an uneven surface can warp the P-63x. Warping reduces the accuracy. Fix the P-63x onto a flat surface. The recommended flatness of the surface is ≤20 µm. ... -
Page 23: Fixing The Load
5 Installation You have provided a suitable surface for fixing the P-63x: The surface has four suitable threaded holes for M2.5 screws. Refer to − "Dimensions" (p. 35) for the required position and depth of the holes. − The surface flatness is ≤20 µm. −... - Page 24 5 Installation NOTICE Warping of the P-63x when fixing loads with an uneven contact surface! Fixing loads with an uneven contact surface could warp the P-63x. Warping reduces the accuracy. Fix loads to the P-63x only when the surface contacting the P-63x's platform has a flatness of at least 20 μm.
- Page 25 5 Installation Center of load at an unsuitable position: Figure 6: Tall load and center of load too far above the platform Figure 7: Unwanted lever effect and center of load on the side of the platform Requirements You have read and understood the general notes on installing (p. 15). ...
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Page 26: Connecting The P-63X To The Electronics
5 Installation Connecting the P-63x to the Electronics INFORMATION When connecting, pay attention to the assignment specified on the labeling of the sockets, plug connectors, and cables. Requirements You have read and understood the general notes on installing (p. 15). ... -
Page 27: Starting And Operating
6 Starting and Operating Starting and Operating In this Chapter General Notes on Starting and Operating ................... 23 Operating the P-63x ........................24 Discharging the P-63x ........................25 General Notes on Starting and Operating CAUTION Risk of electric shock if the protective earth conductor is not connected! If a protective earth conductor is not or not properly connected, dangerous touch voltages can occur on the P-63x in the case of malfunction or failure of the system. -
Page 28: Operating The P-63X
Operating voltages that are too high or incorrectly connected can cause damage to the P-63x. Operate the P-63x only with controllers/drivers and original accessories from PI. Do not exceed the operating voltage range (p. 34) specified for the P-63x. -
Page 29: Discharging The P-63X
Before demounting (e.g., before cleaning and transporting the P-63x and for modifications) The P-63x is discharged via the discharge resistor inside the electronics from PI. Discharging a positioner connected to the electronics In closed-loop operation: 1. Switch off the servo mode on the controller. -
Page 31: Maintenance
7 Maintenance Maintenance In this Chapter General Notes on Maintenance ....................27 Cleaning the P-63x ........................27 General Notes on Maintenance NOTICE Misalignment due to loosening screws! The P-63x is maintenance-free and achieves its positioning accuracy as a result of the optimal alignment of mechanical components and piezo actuators. -
Page 33: Troubleshooting
8 Troubleshooting Troubleshooting Problem Possible causes Solution No or limited Cable not connected Check the cable connections. motion correctly Excessive load Do not exceed the maximum permissible stress and load capacities according to the specifications (p. 33). Zero shift of the sensor for ... -
Page 35: Customer Service
9 Customer Service Customer Service For inquiries and orders, contact your PI sales engineer or send us an email (service@pi.de). If you have any questions concerning your system, provide the following information: Product and serial numbers of all products in the system −... -
Page 37: Technical Data
10 Technical Data Technical Data Subject to change. You can find the latest product specifications on the product web page at www.pi.ws (https://www.pi.ws). In this Chapter Specifications ..........................33 Dimensions ..........................35 Torque for Stainless Steel Screws (A2-70) ................... 36 Pin Assignment .......................... -
Page 38: Maximum Ratings
10 Technical Data P-630.XCD P-631.XCD Unit Drive properties Piezo ceramic PICMA® P-887 PICMA® P-885; P-887 Electrical capacitance 12.6 µF Miscellaneous Operating temperature range 0 to 40 0 to 40 °C Material Aluminum Aluminum Dimensions 102 mm × 50 mm × 102 mm ×... -
Page 39: Ambient Conditions And Classifications
10 Technical Data 10.1.3 Ambient Conditions and Classifications Pay attention to the following ambient conditions and classifications for the P-63x: Area of application For indoor use only Maximum altitude 2000 m Air pressure 1100 hPa to 0.1 hPa Relative humidity Highest relative humidity 80% for temperatures up to 31 °C Decreasing linearly to 50% relative humidity at 40 °C Operating temperature... -
Page 40: Torque For Stainless Steel Screws (A2-70)
10 Technical Data 10.3 Torque for Stainless Steel Screws (A2-70) Screw size Minimum torque Maximum torque 4 Nm 6 Nm 2.5 Nm 3.5 Nm 1.5 Nm 2.5 Nm 0.8 Nm 1.1 Nm M2.5 0.3 Nm 0.4 Nm 0.15 Nm 0.2 Nm M1.6 0.06 Nm 0.12 Nm... - Page 41 10 Technical Data Signal Function Piezo voltage Probe sensor signal (immovable part of the Probe capacitive sensor) Data ID chip Data line for ID chip GND Target and ID chip Target and ID chip ground GND PZT Piezo voltage ground (not connected) Target sensor signal (movable part of the Target...
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Page 43: Old Equipment Disposal
Dispose of your old equipment according to international, national, and local rules and regulations. In order to fulfill its responsibility as the product manufacturer, Physik Instrumente (PI) GmbH & Co. KG undertakes environmentally correct disposal of all old PI equipment made available on the market after 13 August 2005 without charge. - Page 45 12 European Declarations of Conformity European Declarations of Conformity For the P-63x, declarations of conformity were issued according to the following European statutory requirements: Low Voltage Directive EMC Directive RoHS Directive The standards applied for certifying conformity are listed below. Safety (Low Voltage Directive): EN 61010-1 EMC: EN 61326-1 RoHS: EN IEC 63000...
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