Model Overview; Piezo Xy Stage; Piezo Xyz Stage - PI P-73 Series User Manual

3 Product Description

3.2 Model Overview

The following standard versions of the P-733 and P-734 are available:

3.2.1 Piezo XY Stage

Model
P-733.2CD
P-733.2CL
P-733.2DD
P-734.2CD
P-734.2CL

3.2.2 Piezo XYZ Stage

Model
P-733.3CD
P-733.3CL
P-733.3DD
10 Version: 1.0.0
Description
High-Precision XY Nanopositioning System, 100 µm × 100 µm,
Capacitive Sensors, Parallel Metrology, Sub-D Connector
High-Precision XY Nanopositioning System, 100 µm × 100 µm,
Capacitive Sensors, Parallel Metrology, LEMO Connector
High-Dynamics High-Precision XY Nanopositioning System,
30 µm × 30 µm, Direct Drive, Capacitive Sensors, Parallel
Metrology, Sub-D Connector
High-Precision XY Nanopositioning System with Minimum
Runout, 100 µm × 100 µm, Capacitive Sensors, Parallel
Metrology, Sub-D Connector
High-Precision XY Nanopositioning System with Minimum
Runout, 100 µm × 100 µm, Capacitive Sensors, Parallel
Metrology, LEMO Connector
Description
Precision XYZ Nanopositioning System, 100 µm × 100 µm ×
10 µm, Capacitive Sensors, Parallel Metrology, Sub-D Connector
Precision XYZ Nanopositioning System, 100 µm × 100 µm ×
10 µm, Capacitive Sensors, Parallel Metrology, LEMO Connector
High-Dynamics Precision XYZ Nanopositioning System, 30 µm ×
30 µm × 10 µm, Direct Drive, Capacitive Sensors, Parallel
Metrology, Sub-D Connector
PZ103E P-73x Nanopositioners