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PZ82E
P-5x7/P-5x8 Positioners
User Manual
Version: 3.2.0
Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany
Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, www.pi.ws
Date: 23.06.2022
This document describes the following products:
P-517, P-527
Precision XY nanopositioner
P-517.2CD/.2CL, 100 µm × 100 µm
P-527.2CD/.2CL, 200 µm × 200 µm
P-517, P-527
Precision XYZ nanopositioner
P-517.3CD/.3CL, 100 µm × 100 µm × 20 µm
P-527.3CD/.3CL, 200 µm × 200 µm × 20 µm
P-517, P-527
Precision XY / rotation nanopositioner
P-517.RCD, 100 µm × 100 µm, 2 mrad
P-527.RCD, 200 µm × 200 µm, 4 mrad
P-558, P-518, P-528
Precision nanopositioning Z stage
P-558.ZCD/.ZCL, 50 µm
P-518.ZCD/.ZCL, 100 µm
P-528.ZCD/.ZCL, 200 µm
P-558, P-518, P-528
Precision nanopositioning Z and tip/tilt stage
P-558.TCD, 50 µm, 0.5 mrad
P-518.TCD, 100 µm, 1 mrad
P-528.TCD, 200 µm, 2 mrad
.2CD/.3CD/.ZCD/.RCD/.TCD with D-sub
connector
.2CL/.3CL/.ZCL with LEMO connectors
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Summary of Contents for PI P-5 7 Series
- Page 1 P-518.TCD, 100 µm, 1 mrad P-528.TCD, 200 µm, 2 mrad .2CD/.3CD/.ZCD/.RCD/.TCD with D-sub connector .2CL/.3CL/.ZCL with LEMO connectors Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, www.pi.ws...
- Page 2 The patents held by PI are found in our patent list: https://www.physikinstrumente.com/en/about-pi/patents © 2022 Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany. The text, photographs and drawings in this manual are protected by copyright. With regard thereto, Physik Instrumente (PI) GmbH & Co. KG retains all the rights.
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Page 3: Table Of Contents
Contents About this Document Objective and Target Group of this User Manual ............1 Symbols and Typographic Conventions..............1 Definition of Terms ..................... 2 Figures ........................2 Other Applicable Documents ..................3 Downloading Manuals ....................3 Safety Intended Use ......................5 General Safety Instructions .................. - Page 4 Maintenance General Notes on Maintenance ................29 Packing the P-5x7/P-5x8 for Transport ..............29 Cleaning the P-5x7/P-5x8 ..................31 Troubleshooting Customer Service Technical Data 10.1 Specifications ......................37 10.1.1 P-5x7 Data Table ..................37 10.1.2 P-5x8 Data Table ..................39 10.1.3 Maximum Ratings ..................
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Page 5: About This Document
1 About this Document About this Document In this Chapter Objective and Target Group of this User Manual ................1 Symbols and Typographic Conventions ..................1 Definition of Terms ........................2 Figures ............................2 Other Applicable Documents ......................3 Downloading Manuals ........................3 Objective and Target Group of this User Manual This user manual contains the information required for using the P-5x7/P-5x8 as intended ("x"... -
Page 6: Definition Of Terms
1 About this Document Symbol/Label Meaning Action consisting of several steps with strict sequential order Action consisting of one or more steps without relevant sequential order. Bullet p. 5 Cross-reference to page 5 RS-232 Label on the product indicating an operating element (example: RS-232 interface socket) Warning signs on the product that refer to detailed information in this manual. -
Page 7: Other Applicable Documents
1 About this Document Other Applicable Documents The devices and software tools from PI mentioned in this documentation are described in separate manuals. The latest versions of the user manuals are available for download (p. 3) on our website. Product... -
Page 9: Safety
The P-5x7/P-5x8 can only be used as intended in conjunction with suitable electronics (p. 11) available from PI. The electronics are not in the P-5x7/P-5x8's scope of delivery. The electronics must provide the required operating voltages. To ensure proper performance of the servo control system, the electronics must also be able to read out and process the signals from the position sensors. - Page 10 Do not open the P-5x7/P-5x8. Discharge the positioner's piezo actuators before installing: Connect the positioner to the switched-off PI electronics equipped with an internal discharge resistor. Do not pull the plug connector out of the electronics during operation.
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Page 11: Organizational Measures
2 Safety Organizational Measures User manual Always keep this user manual together with the P-5x7/P-5x8. The latest versions of the user manuals are available for download (p. 3) on our website. Add all information from the manufacturer to the user manual, for example supplements or technical notes. -
Page 13: Product Description
3 Product Description Product Description In this Chapter Model Overview ..........................9 Product View ..........................10 Scope of Delivery ......................... 11 Suitable Electronics ........................11 Accessories ........................... 12 Technical Features ........................13 Model Overview The following standard versions of the P-5x7/P-5x8 are available: Model Description P-517.2CD... -
Page 14: Product View
3 Product Description Model Description P-518.ZCL Precision nanopositioning Z stage, 100 µm, direct position measuring, capacitive sensors, LEMO connectors Precision nanopositioning Z stage, 200 µm, direct position measuring, P-528.ZCD capacitive sensors, D-sub connector P-528.ZCL Precision nanopositioning Z stage, 200 µm, direct position measuring, capacitive sensors, LEMO connectors P-558.TCD Precision nanopositioning Z and tip/tilt stage, 50 µm, 0.5 mrad, parallel... -
Page 15: Scope Of Delivery
3 Product Description Scope of Delivery Product number Description P-5x7/P-5x8 Positioner according to order (p. 9) Transport safeguard, consisting of: Support frame 4 plastic screws 000036450 M4 screw set for protective earth, consisting of: 1 M4x8 flat-head screw with cross recess, ISO 7045 ... -
Page 16: Accessories
3 Product Description Accessories Adapter cable with LEMO (mechanics) to D-sub (electronics) Product number Description P-895.1LDC Adapter cable LEMO to D-sub 7W2 (m) for piezo actuator nanopositioning systems with capacitive sensors, 1 channel, length: 0.3 m. P-895.3LDC Adapter cable LEMO to D-sub 25W3 (m) for piezo actuator nanopositioning systems with capacitive sensors, 3 channels, length: 0.3 m. -
Page 17: Technical Features
3 Product Description Technical Features 3.6.1 PICMA® Piezo Actuators P-5x7/P-5x8 positioners are driven by PICMA® piezo actuators. PICMA® actuators have all-ceramic insulation and their performance and lifetime are therefore far superior to conventional actuators. The ceramic insulation layer protects the monolithic piezoceramic block against humidity and failure due to increased leakage current. -
Page 19: Unpacking
4 Unpacking Unpacking NOTICE Mechanical overload due to incorrect handling! Impermissible mechanical overload of the motion platform of the P-5x7/P-5x8 can cause damage to the piezo actuators, sensors, and flexures of the P-5x7/P-5x8 as well as loss of accuracy. Ship the P-5x7/P-5x8 in the original packaging only. ... - Page 20 4 Unpacking 4. Remove the transport safeguard: a) Put the P-5x7/P-5x8 onto a surface with the support frame facing downwards. b) Release the four plastic screws with a screwdriver. In the following figure, one of the screws is marked with an arrow. c) Remove the plastic screws and the support frame.
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Page 21: Installation
Do not open the P-5x7/P-5x8. Discharge the positioner's piezo actuators before installing: Connect the positioner to the switched-off PI electronics equipped with an internal discharge resistor. Do not pull the plug connector out of the electronics during operation. -
Page 22: Connecting The P-5X7/P-5X8 To The Protective Earth Conductor
NOTICE Damage due to unsuitable cables! Unsuitable cables can damage the P-5x7/P-5x8 and the electronics. Use cables provided by PI only to connect the P-5x7/P-5x8 to the electronics. NOTICE Damage due to improper mounting! Improper mounting of the P-5x7/P-5x8 or incorrectly mounted parts can damage the P-5x7/P-5x8. - Page 23 5 Installation INFORMATION In the case of P-5x7/P-5x8 positioners with D-sub connectors, ground loops can occur when the positioner is grounded via its protective earth connector as well as via the connecting cable's shielding for the electronics. If a ground loop occurs, contact our customer service department (p. 35). The P-5x7/P-5x8 has an M4 hole for connecting the protective earth conductor.
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Page 24: Mounting The P-5X7/P-5X8
5 Installation Mounting the P-5x7/P-5x8 NOTICE Warping the P-5x7/P-5x8 when mounting onto uneven surfaces! The P-5x7/P-5x8 could warp if mounted on an uneven surface. Warping reduces the accuracy. Mount the P-5x7/P-5x8 onto a flat surface. The recommended flatness of the surface is ≤20 µm. -
Page 25: Fixing The Load
5 Installation Tools and accessories Four M6 screws of suitable length (p. 42) Suitable screwdriver Mounting the P-5x7/P-5x8 1. Align the P-5x7/P-5x8 on the underlying surface so that the corresponding mounting holes in the base body (see figure) and the surface are in line. 2. - Page 26 5 Installation NOTICE Center of load at unsuitable position! If the center of load is located too far away from the center of the motion platform (e.g., tall load and unwanted lever effect), the P-5x7/P-5x8 can be damaged, especially in dynamic operation, by high strain on the flexure guides, high torques, and oscillations.
- Page 27 5 Installation Figure 7: Unwanted lever effect and center of load on the side of the platform Figure 8: Mounting holes in the motion platform Requirements You have read and understood the general notes on installing (p. 17). The P-5x7/P-5x8 is not connected to the electronics. Tools and accessories Screws of suitable size and length (p.
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Page 29: Starting And Operating
6 Starting and Operating Starting and Operating In this Chapter General Notes on Starting and Operating ................... 25 Operating the P-5x7/P-5x8 ......................27 Discharging the P-5x7/P-5x8 ......................27 General Notes on Starting and Operating CAUTION Risk of electric shock if the protective earth conductor is not connected! If a protective earth conductor is not or not properly connected, dangerous touch voltages can occur on the P-5x7/P-5x8 in the case of malfunction or failure of the system. - Page 30 Operating voltages that are too high or incorrectly connected can cause damage to the P-5x7/P-5x8. Operate the P-5x7/P-5x8 only with controllers/drivers and original accessories from PI. Do not exceed the operating voltage range (p. 40) specified for the P-5x7/P-5x8.
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Page 31: Operating The P-5X7/P-5X8
Before demounting (e.g., before cleaning and transporting the P-5x7/P-5x8 and for modifications) The P-5x7/P-5x8 is discharged via the discharge resistor inside the electronics from PI. Discharging a positioner connected to the electronics In closed-loop operation: 1. Switch off the servo mode on the controller. -
Page 33: Maintenance
7 Maintenance Maintenance In this Chapter General Notes on Maintenance ....................29 Packing the P-5x7/P-5x8 for Transport ..................29 Cleaning the P-5x7/P-5x8 ......................31 General Notes on Maintenance NOTICE Misalignment due to loosening screws! The P-5x7/P-5x8 is maintenance-free and achieves its positioning accuracy as a result of the optimal alignment of mechanical components and piezo actuators. - Page 34 7 Maintenance Packing the P-5x7/P-5x8 1. Attach the transport safeguard: a) Put the supporting frame onto a surface. b) Put the positioner onto the support frame with its top facing downwards. c) Align the positioner so that the mounting holes in the positioner are in line with the mounting holes in the supporting frame.
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Page 35: Cleaning The P-5X7/P-5X8
7 Maintenance Cleaning the P-5x7/P-5x8 NOTICE Damage from ultrasonic cleaning! Ultrasonic cleaning can damage the P-5x7/P-5x8. Do not do any ultrasonic cleaning. Requirements You have discharged the piezo actuators of the P-5x7/P-5x8 (p. 27). You have disconnected the P-5x7/P-5x8 from the electronics. Cleaning the P-5x7/P-5x8 ... -
Page 37: Troubleshooting
8 Troubleshooting Troubleshooting Problem Possible causes Solution No or limited Cable not connected Check the cable connections. motion correctly Excessive load Do not exceed the maximum permissible stress and load capacities according to the specifications (p. 37). Zero shift of the sensor for ... - Page 38 8 Troubleshooting Problem Possible causes Solution Axes were mixed up during Pay attention to the assignment of the connection (LEMO axes when connecting the positioner to connectors only) the controller. This assignment is indicated by labels on the devices. The positioner Servo control parameters 1.
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Page 39: Customer Service
9 Customer Service Customer Service For inquiries and orders, contact your PI sales engineer or send us an email (service@pi.de). If you have any questions concerning your system, provide the following information: Product and serial numbers of all products in the system −... -
Page 41: Technical Data
10 Technical Data Technical Data Subject to change. You can find the latest product specifications on the product web page at www.pi.ws (https://www.pi.ws). In this Chapter Specifications ..........................37 Ambient Conditions and Classifications ..................41 Dimensions ..........................42 Torque for Stainless Steel Screws (A2-70) ................... 45 Pin Assignment .......................... - Page 42 Electrical capacitance: Specified per channel (refer to "Pin Assignment" (p. 45)). The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo nanopositioning systems are free of friction. All specifications based on room temperature (22 °C ±3 °C).
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Page 43: P-5X8 Data Table
10 Technical Data 10.1.2 P-5x8 Data Table Motion P-558.ZCD P-558.ZCL P-518.ZCD P-518.ZCL P-528.ZCD P-528.ZCL P-558.TCD P-518.TCD P-528.TCD Tolerance Active axes Z, θX, θY Z, θX, θY Z, θX, θY Travel range in Z 50 µm 50 µm 100 µm 100 µm 200 µm 200 µm 50 µm... -
Page 44: Maximum Ratings
Electrical capacitance: Specified per channel (refer to "Pin Assignment" (p. 45)). The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo nanopositioning systems are free of friction. All specifications based on room temperature (22 °C ±3 °C). -
Page 45: Ambient Conditions And Classifications
10 Technical Data Model Maximum operating Maximum operating Maximum power voltage frequency (unloaded) consumption P-558.ZCD -20 to 120 V 190 Hz 22 W P-558.ZCL P-558.TCD P-518.ZCD -20 to 120 V 167 Hz 28 W P-518.ZCL P-518.TCD P-528.ZCD -20 to 120 V 117 Hz 34 W P-528.ZCL... -
Page 46: Dimensions
10 Technical Data 10.3 Dimensions Figure 9: P-5x7, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point. Version: 3.2.0 PZ82E P-5x7/P-5x8 Positioners... - Page 47 10 Technical Data Figure 10: P-5x8.TCx, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point. P-5x7/P-5x8 Positioners PZ82E Version: 3.2.0...
- Page 48 10 Technical Data Figure 11: P-5x8.ZCx, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point. Version: 3.2.0 PZ82E P-5x7/P-5x8 Positioners...
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Page 49: Torque For Stainless Steel Screws (A2-70)
10 Technical Data 10.4 Torque for Stainless Steel Screws (A2-70) Screw size Minimum torque Maximum torque 4 Nm 6 Nm 2.5 Nm 3.5 Nm 1.5 Nm 2.5 Nm 0.8 Nm 1.1 Nm M2.5 0.3 Nm 0.4 Nm 0.15 Nm 0.2 Nm M1.6 0.06 Nm 0.12 Nm... - Page 50 10 Technical Data D-sub 25W3 connector (m) Only for P-5x7.2CD/.3CD/.RCD and P-5x8.TCD Figure 13: D-sub 25W3 connector (m): Front with connections Signal Function Probe sensor signal, channel 2 A1 inner conductor Output (immovable part of the capacitive sensor) A1 outer conductor GND Shielding for probe sensor signal, channel 2 A2 inner conductor Output Probe sensor signal, channel 3...
- Page 51 10 Technical Data Signal Function Input Piezo voltage -, channel 3 Input Piezo voltage -, channel 2 Input Piezo voltage -, channel 1 Shielding for target sensor signal, channel 1 Model-dependent assignment of the D-sub 25W3 connector (m) (X = used): Model Piezo voltage Sensor signal...
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Page 53: Old Equipment Disposal
Dispose of your old equipment according to international, national, and local rules and regulations. In order to fulfill its responsibility as the product manufacturer, Physik Instrumente (PI) GmbH & Co. KG undertakes environmentally correct disposal of all old PI equipment made available on the market after 13 August 2005 without charge. - Page 55 12 European Declarations of Conformity European Declarations of Conformity For the P-5x7/P-5x8, declarations of conformity were issued according to the following European statutory requirements: Low Voltage Directive EMC Directive RoHS Directive The standards applied for certifying conformity are listed below. Safety (Low Voltage Directive): EN 61010-1 EMC: EN 61326-1 RoHS: EN IEC 63000...
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