PI P­73 Series User Manual
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PI P­73 Series User Manual

Nanopositioner
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PZ103E
P­73x Nanopositioner
User Manual
Version: 1.1.0
Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany
Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, www.pi.ws
Date: 26.10.2020
This document describes the following products:
P­733.2
XY nanopositioner
P-733.2CD/.2CL, 100 µm × 100 µm
P-733.2DD, 30 µm × 30 µm, high dynamics,
direct drive
P­734.2
XY nanopositioner
P-734.2CD/.2CL, 100 µm × 100 µm, very high
travel accuracy
P­733.3
XYZ nanopositioner
P-733.3CD/.3CL, 100 µm × 100 µm × 10 µm
P-733.3DD, 30 µm × 30 µm × 10 µm, high
dynamics, direct drive
P­733.Z
Nanopositioner Z stage
P-733.ZCD/.ZCL, 100 µm
.2CD/.3CD/.2DD/.3DD with D-sub 25W3
connector (m)
.ZCD with D-sub 7W2 connector (m)
.2CL/.3CL/.ZCL with LEMO connector (m)

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  • Page 1 .2CD/.3CD/.2DD/.3DD with D-sub 25W3 connector (m) .ZCD with D-sub 7W2 connector (m) .2CL/.3CL/.ZCL with LEMO connector (m) Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, www.pi.ws...
  • Page 2 The patents held by PI are found in our patent list: https://www.physikinstrumente.com/en/about-pi/patents © 2020 Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany. The text, photographs and drawings in this manual are protected by copyright. With regard thereto, Physik Instrumente (PI) GmbH & Co. KG retains all the rights.

  • Page 3: Table Of Contents

    Contents About this Document Objective and Target Group of this User Manual ............1 Symbols and Typographic Conventions..............1 Definition of Terms ..................... 2 Figures ........................2 Other Applicable Documents ..................2 Downloading Manuals ....................3 Safety Intended Use ......................5 General Safety Instructions ..................
  • Page 4 Fixing the Load ......................23 Connecting the P-73x to the Electronics ..............25 Starting and Operating General Notes on Starting and Operating ..............27 Operating the P-73x ....................29 Discharging the P-73x ....................29 Maintenance General Notes on Maintenance ................31 Cleaning the P-73x ....................

  • Page 5: About This Document

    1 About this Document About this Document In this Chapter Objective and Target Group of this User Manual ................1 Symbols and Typographic Conventions ..................1 Definition of Terms ........................2 Figures ............................2 Other Applicable Documents ......................2 Downloading Manuals ........................3 Objective and Target Group of this User Manual This user manual contains the information required for using the P-73x as intended ("x"...

  • Page 6: Definition Of Terms

    For better understandability, the colors, proportions, and degree of detail in illustrations can deviate from the actual circumstances. Photographic illustrations may also differ and must not be seen as guaranteed properties. Other Applicable Documents The devices and software tools from PI mentioned in this documentation are described in separate manuals. Product Document...

  • Page 7: Downloading Manuals

    If a manual is missing or problems occur with downloading:  Contact our customer service department (p. 35). Downloading manuals 1. Open the website www.pi.ws. 2. Search the website for the product number (e.g., P-733) or the product family (e.g., piezo nanopositioner).

  • Page 9: Safety

    The P-73x can only be used as intended in conjunction with suitable electronics (p. 13) available from PI. The electronics are not in the P-73x's scope of delivery. The electronics must provide the required operating voltages. To ensure proper performance of the servo control system, the electronics must be able to read out and process the signals from the capacitive sensors.
  • Page 10  Do not open the P-73x.  Discharge the positioner's piezo actuators before installing: Connect the positioner to the switched-off PI electronics equipped with an internal discharge resistor.  Do not pull the plug connector out of the electronics during operation.

  • Page 11: Organizational Measures

    2 Safety Organizational Measures User manual  Always keep this user manual together with the P-73x. The latest versions of the user manuals are available for download (p. 3) on our website.  Add all information from the manufacturer to the user manual, for example supplements or technical notes.

  • Page 13: Product Description

    3 Product Description Product Description In this Chapter Model Overview ..........................9 Product View ..........................11 Product Labeling .......................... 12 Scope of Delivery ......................... 13 Suitable Electronics ........................13 Accessories ........................... 14 Technical Features ........................15 Model Overview The P-73x is available in the following versions: 3.1.1 XY Nanopositioner Model...

  • Page 14: Xyz Nanopositioner

    3 Product Description 3.1.3 XYZ Nanopositioner Model Description P-733.3CD Precision XYZ nanopositioner, 100 µm × 100 µm × 10 µm, capacitive sensors, parallel metrology, D-sub connector P-733.3CL Precision XYZ nanopositioner, 100 µm × 100 µm × 10 µm, capacitive sensors, parallel metrology, LEMO connectors 3.1.4 XYZ Nanopositioner with Direct Drive Model...

  • Page 15: Product View

    3 Product Description Product View The figures serve as examples and can differ from your positioner model.  Pay attention to the symbols on your device. Figure 1: P-733: Exemplary product view Motion platform Base body Cable exit Protective earth connector Figure 2: P-734: Exemplary product view Motion platform...

  • Page 16: Product Labeling

    Manufacturer's logo Warning sign "Pay attention to the manual!" Old equipment disposal (p. 53) CE conformity mark Country of origin: Germany Country of origin WWW.PI.WS Manufacturer's address (website) Symbol for the protective earth conductor (p. 20) Version: 1.1.0 PZ103E P­73x Nanopositioner...

  • Page 17: Scope Of Delivery

    3 Product Description If applicable: The arrows indicate the positive direction of motion.  The letter X, Y, and Z indicate the axis.  Figure 3: "Residual Voltage" warning sign on the connector of the P-73x "Residual Voltage" warning: Risk of electric shock (p. 5) for models with D-sub plug connector Scope of Delivery Product number Description...

  • Page 18: Accessories

    3 Product Description Accessories Adapter cables for models with D­sub plug connector(s) Product number Description P-895.2D1DDC* Adapter cable D-sub 25W3 (f) and D-sub 7W2 (f) to D-sub 25W3 (m) for piezo actuator nanopositioning systems with capacitive sensors, 3 channels, length: 0.3 m. P-895.2DDC Adapter cable 2×...

  • Page 19: Technical Features

    3 Product Description Technical Features 3.7.1 PICMA® Piezo Actuators P-73x positioners are driven by PICMA® piezo actuators. PICMA® actuators have all-ceramic insulation and their performance and lifetime are therefore far superior to conventional actuators. The ceramic insulation layer protects the monolithic piezoceramic block against humidity and failure due to increased leakage current.

  • Page 21: Unpacking

    4 Unpacking Unpacking NOTICE Mechanical overload due to incorrect handling! An impermissible mechanical load on the platform of the P-73x can cause damage to the piezo actuators, sensors, and flexures of the P-73x as well as loss of accuracy.  Do not touch any sensitive parts (e.g., platform) when handling the P-73x. 1.

  • Page 23: Installation

     Do not open the P-73x.  Discharge the positioner's piezo actuators before installing: Connect the positioner to the switched-off PI electronics equipped with an internal discharge resistor.  Do not pull the plug connector out of the electronics during operation.

  • Page 24: Connecting The P-73X To The Protective Earth Conductor

    NOTICE Damage due to unsuitable cables! Unsuitable cables can damage the P-73x and the electronics.  Use cables provided by PI only to connect the P-73x to the electronics. NOTICE Damage due to improper mounting! Improper mounting of the P-73x or incorrectly mounted parts can damage the P-73x.
  • Page 25 5 Installation The P-73x has an M4 hole for attaching the protective earth conductor. This hole is marked with the symbol for the protective earth conductor . Refer to "Dimensions" (p. 43) for the exact position of the hole. Requirements ...

  • Page 26: Mounting The P-73X

    5 Installation Mounting the P­73x NOTICE Warping the P­73x when mounting onto uneven surfaces! The P-73x could warp if mounted on an uneven surface. Warping reduces the accuracy.  Mount the P­73x onto a flat surface. The recommended flatness of the surface is ≤20 µm. ...

  • Page 27: Fixing The Load

    5 Installation Mounting the P­73x 1. Align the P-73x on the mounting surface so that the holes in the P-73x and mounting surface are in line. 2. For the P-73x.2Cx and P-733.3Cx models: Ensure a distance of at least 0.5 mm between the stage and the surrounding objects. 3.
  • Page 28 5 Installation NOTICE Excessively long screws! The P-73x could be damaged by screws inserted too deeply.  Pay attention to the depth of the mounting holes in the platform (p. 43).  Use screws of the correct length for the respective mounting holes only. INFORMATION Positive direction of axis motion is specified in the product view (p.

  • Page 29: Connecting The P-73X To The Electronics

    5 Installation Requirements  You have read and understood the general notes on installation (p. 19).  The P-73x is not connected to the electronics. Tools and accessories Screws of suitable size and length (p. 43)  Suitable screwdriver  Fixing the load 1.

  • Page 31: Starting And Operating

    6 Starting and Operating Starting and Operating In this Chapter General Notes on Starting and Operating ................... 27 Operating the P-73x ........................29 Discharging the P-73x ........................29 General Notes on Starting and Operating CAUTION Risk of electric shock if the protective earth conductor is not connected! If a protective earth conductor is not or not properly connected, dangerous touch voltages can occur on the P-73x in the case of malfunction or failure of the system.
  • Page 32 Operating voltages that are too high or incorrectly connected can cause damage to the P-73x.  Operate the P-73x only with controllers/drivers and original accessories from PI.  Do not exceed the operating voltage range (p. 42) for which the P-73x is specified.

  • Page 33: Operating The P-73X

    Before demounting (e.g., before cleaning and transporting the P-73x and for  modifications) The P-73x is discharged via the discharge resistor inside the electronics from PI. Discharging a positioner connected to the electronics In closed-loop operation: 1. Switch off the servo mode on the controller.

  • Page 35: Maintenance

    7 Maintenance Maintenance In this Chapter General Notes on Maintenance ....................31 Cleaning the P-73x ........................31 General Notes on Maintenance NOTICE Misalignment from loosening screws! The P-73x is maintenance-free and achieves its positioning accuracy as a result of the optimal alignment of mechanical components and piezo actuators.

  • Page 37: Troubleshooting

    8 Troubleshooting Troubleshooting Problem Possible causes Solution No or limited Cable not connected  Check the cable connections. motion correctly Excessive load  Do not exceed the maximum permissible stress and load capacities according to the specifications (p. 37). Zero shift of the sensor for ...
  • Page 38 8 Troubleshooting Problem Possible causes Solution Axes were mixed up during  Pay attention to the assignment of the connection (LEMO axes when connecting the positioner to connectors only) the controller. This assignment is indicated by labels on the devices. The positioner Servo control parameters 1.

  • Page 39: Customer Service

    9 Customer Service Customer Service For inquiries and orders, contact your PI sales engineer or send us an email (service@pi.de).  If you have any questions concerning your system, provide the following information: − Product and serial numbers of all products in the system −...

  • Page 41: Technical Data

    10 Technical Data Technical Data In this Chapter Specifications ..........................37 Dimensions ..........................43 Torque for Stainless Steel Screws (A2-70) ................... 48 Pin Assignment ..........................49 10.1 Specifications 10.1.1 Data Table P­733.2CD P­733.2DD Unit Tolerance P­733.2CL Active axes X, Y X, Y Motion and positioning Integrated sensor...
  • Page 42 0.1 %. The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo nanopositioning systems are free of friction. All specifications based on room temperature (22 °C ±3 °C).
  • Page 43 0.1 %. The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo nanopositioning systems are free of friction. All specifications based on room temperature (22 °C ±3 °C).
  • Page 44 E-625, E-754 The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo nanopositioning systems are free of friction. All specifications based on room temperature (22 °C ±3 °C). Version: 1.1.0 PZ103E P­73x Nanopositioner...
  • Page 45 E-712, E-727 The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo nanopositioning systems are free of friction. All specifications based on room temperature (22 °C ±3 °C). P­73x Nanopositioner PZ103E Version: 1.1.0...

  • Page 46: Maximum Ratings

    10 Technical Data 10.1.2 Maximum Ratings P-73x positioners are designed for the following operating data: Model Maximum operating Maximum operating Maximum power voltage frequency (unloaded) consumption P-733.2CD, -20 to +120 V 167 Hz (in X and Y) 20 W (in X and Y) P-733.2CL P-733.2DD -20 to +120 V...

  • Page 47: Dimensions

    10 Technical Data 10.2 Dimensions Dimensions in mm. Note that a comma is used in the drawings instead of a decimal point. Figure 9: P-733.2Cx P­73x Nanopositioner PZ103E Version: 1.1.0...
  • Page 48 10 Technical Data Figure 10: P-733.2DD Version: 1.1.0 PZ103E P­73x Nanopositioner...
  • Page 49 10 Technical Data Figure 11: P-733.3Cx P­73x Nanopositioner PZ103E Version: 1.1.0...
  • Page 50 10 Technical Data Figure 12: P-733.3DD Version: 1.1.0 PZ103E P­73x Nanopositioner...
  • Page 51 10 Technical Data Figure 13: P-733.ZCx P­73x Nanopositioner PZ103E Version: 1.1.0...

  • Page 52: Torque For Stainless Steel Screws (A2-70)

    10 Technical Data Figure 14: P-734.2Cx 10.3 Torque for Stainless Steel Screws (A2­70) Screw size Minimum torque Maximum torque 4 Nm 6 Nm 2.5 Nm 3.5 Nm 1.5 Nm 2.5 Nm 0.8 Nm 1.1 Nm M2.5 0.3 Nm 0.4 Nm 0.15 Nm 0.2 Nm M1.6...

  • Page 53: Pin Assignment

    10 Technical Data 10.4 Pin Assignment D­sub 25W3 connector (m) For P-73x.2CD/.2DD/.3CD/.3DD only: Figure 15: D-sub 25W3 connector (m): Front with connections Signal Function A1 inner conductor Output Probe sensor signal, channel 2 (immovable part of the capacitive sensor) A1 outer conductor GND Shield of Probe sensor signal, channel 2 A2 inner conductor Output Probe sensor signal, channel 3...
  • Page 54 10 Technical Data Signal Function Free – Input Piezo voltage –, channel 4 Input Piezo voltage –, channel 3 Input Piezo voltage –, channel 2 Input Piezo voltage –, channel 1 Shield of Target sensor signal, channel 1 Model-dependent assignment of the D-sub 25W3 connector (m) (X = used): Model Piezo voltage Sensor signal...
  • Page 55 10 Technical Data D­sub 7W2 connector (m) For P-733.ZCD only: Figure 16: D-sub 7W2 connector (m): Front with connections Signal Function A1 inner conductor Input Piezo voltage + A2 inner conductor Output Probe sensor signal (immovable part of the capacitive sensor) A2 outer conductor GND Shield Bidirectional...

  • Page 57: Old Equipment Disposal

    Dispose of your old equipment according to international, national, and local rules and regulations. In order to fulfil its responsibility as the product manufacturer, Physik Instrumente (PI) GmbH & Co. KG undertakes environmentally correct disposal of all old PI equipment made available on the market after 13 August 2005 without charge.
  • Page 59 12 EU Declaration of Conformity EU Declaration of Conformity For the P-73x, an EU Declaration of Conformity has been issued in accordance with the following European directives: Low Voltage Directive EMC Directive RoHS Directive The applied standards certifying the conformity are listed below. Safety (Low Voltage Directive): EN 61010-1 EMC: EN 61326-1 RoHS: EN 50581 or EN IEC 63000...

This manual is also suitable for:

P-733.2cdP-733.2clP-734.2cdP-734.2clP-733.2ddP-733.3cd ... Show all

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