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PZ248E
P-56x Nanopositioners
User Manual
Version: 1.0.0
Date: 22.11.2013
This document describes the following
products:
P-561
PIMars XYZ Nanopositioning System
P-561.3CD/.3CL, 100 µm × 100 µm × 100 µm
P-561.3DD, 45 µm × 45 µm × 15 µm, Direct
Drive
P-562
PIMars XYZ Nanopositioning System
P-562.3CD/.3CL, 200 µm × 200 µm × 200 µm
P-563
PIMars XYZ Nanopositioning System
P-563.3CD/.3CL, 300 µm × 300 µm × 300 µm
.3CD/.3DD with Sub-D connector
.3CL with LEMO connectors
Physik Instrumente (PI) GmbH & Co. KG · Auf der Römerstr. 1 76228 Karlsruhe, Germany
Phone +49 721 4846-0 · Fax +49 721 4846-1019 · E-mail info@pi.ws
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Summary of Contents for PI P-56 Series
- Page 1 P-563.3CD/.3CL, 300 µm × 300 µm × 300 µm .3CD/.3DD with Sub-D connector .3CL with LEMO connectors Physik Instrumente (PI) GmbH & Co. KG · Auf der Römerstr. 1 76228 Karlsruhe, Germany Phone +49 721 4846-0 · Fax +49 721 4846-1019 · E-mail info@pi.ws...
- Page 2 With regard thereto, Physik Instrumente (PI) GmbH & Co. KG retains all the rights. Use of said text, photographs and drawings is permitted only in part and only upon citation of the source.
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Page 3: Table Of Contents
Contents About this Document Goal and Target Audience of this User Manual ........... 1 Symbols and Typographic Conventions ............... 1 Other Applicable Documents ................3 Downloading Manuals ..................3 Safety Intended Use ......................5 General Safety Instructions .................. 5 Organizational Measures ..................7 Product Description Model Overview .................... - Page 4 Maintenance General Notes on Maintenance ................31 Packing the P-56x for Transport .................31 Cleaning the P-56x .....................33 Troubleshooting Customer Service Technical Data 10.1 Specifications......................39 10.1.1 Data Table ..................39 10.1.2 Maximum Ratings ................40 10.2 Ambient Conditions and Classifications .............41 10.3 Dimensions ......................42 10.4 Torque for Stainless Steel Screws (A2-70) ............43 10.5...
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Page 5: About This Document
1 About this Document About this Document In this Chapter Goal and Target Audience of this User Manual ............1 Symbols and Typographic Conventions ................ 1 Other Applicable Documents ..................3 Downloading Manuals ....................3 1.1 Goal and Target Audience of this User Manual This user manual contains the necessary information for the intended use of the P-56x (x stands for the different models, p. - Page 6 1 About this Document INFORMATION Information for easier handling, tricks, tips, etc. Symbol/ Meaning Label Action consisting of several steps whose sequential order must be observed Action consisting of one or several steps whose sequential order is irrelevant List item p.
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Page 7: Other Applicable Documents
1 About this Document 1.3 Other Applicable Documents The devices and software tools which are mentioned in this documentation are described in their own manuals. The latest versions of the user manuals are available for download (p. 3) on our website. - Page 8 1 About this Document Download freely accessible manuals 1. Open the website http://www.pi-portal.ws. 2. Click Downloads. 3. Click the corresponding category (e.g. P Piezo Actuators, Nanopositioning & Scanning Systems) 4. Click the corresponding product code (e.g. P-561). 5. Click Documents.
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Page 9: Safety
The intended use of the P-56x is only possible in combination with suitable drive and control electronics (p. 13) available from PI. The electronics is not included in the scope of delivery of the P-56x. The electronics must provide the required operating voltages. To ensure proper performance of the servo-control system, the electronics must be able to read out and process the signals from the capacitive sensors. - Page 10 Do not open the P-56x. Discharge the piezo actuators of the stage before installation: Connect the stage to the switched-off PI controller, which is equipped with an internal discharge resistor. Do not pull out the connector from the electronics during operation.
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Page 11: Organizational Measures
2 Safety The P-56x is maintenance-free and achieves its positioning accuracy as a result of the optimum alignment of mechanical components and piezo actuators. Loosened screws cause a loss in positioning accuracy. Only loosen screws according to the instructions in this manual. ... -
Page 13: Product Description
3 Product Description Product Description In this Chapter Model Overview ......................9 Product View ....................... 10 Product Labeling ......................11 Scope of Delivery ......................12 Recommended Piezo Controllers ................13 Technical Features ...................... 13 3.1 Model Overview The following standard versions of the P-56x are available: Model Description P-561.3CD... -
Page 14: Product View
3 Product Description Model Description P-563.3CD PIMars XYZ nanopositioning system with large travel range, 300 µm × 300 µm × 300 µm, capacitive sensors, parallel metrology, Sub-D connector(s) P-563.3CL PIMars XYZ nanopositioning system with large travel range, 300 µm × 300 µm × 300 µm, capacitive sensors, parallel metrology, LEMO connector(s) 3.2 Product View The figure serves as an example and can differ from your stage model. -
Page 15: Product Labeling
3 Product Description 3.3 Product Labeling Figure 2: P-56x: Type plate (example view) Product name Serial number Brand name Country of origin Manufacturer's logo CE conformity mark Manufacturer's address (website) Disposal of used devices Warning sign "Observe manual!" Figure 3: P-56x: "'Residual voltage" warning sign on connector Warning sign "Residual voltage": Notice of risk of electric shock (p. -
Page 16: Scope Of Delivery
3 Product Description 3.4 Scope of Delivery Order Number Items P-56x Stage according to order (p. 9) Transport lock, consisting of: Support frame 4 plastic screws 000036450 M4 screw set for protective earth, consisting of: 1 M4x8 flat-head screw with cross recess, ISO 7045 ... -
Page 17: Recommended Piezo Controllers
3 Product Description 3.5 Recommended Piezo Controllers To operate a P-56x, you need a piezo controller. The device is selected depending on the type of application. The table below lists suitable controllers (X = suitable). Controller E-500 modular piezo controller with E-509.C3A control module for –... -
Page 18: Flexure Guides
3 Product Description 3.6.2 Flexure Guides P-56x stages have flexure guides (flexures) for frictionless motion and high guiding accuracies. A flexure guide is an element which is free from static and sliding friction. It is based on the elastic deformation (bending) of a solid (e.g. steel) and does not have any rolling or sliding parts. -
Page 19: Unpacking
Suitable screwdriver Unpacking the P-56x 1. Unpack the P-56x with care. 2. Compare the contents against the items covered by the contract and against the packing list. If parts are incorrectly supplied or missing, contact PI immediately. P-56x Nanopositioners PZ248E... - Page 20 4 Unpacking 3. Inspect the contents for signs of damage. If you notice signs of damage, contact PI immediately. 4. Remove the transport lock: a) Place the P-56x on a surface with the support frame facing downwards. b) Release the four plastic screws with a screwdriver. In the following figure, one of the screws is marked with an arrow.
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Page 21: Installation
Do not open the P-56x. Discharge the piezo actuators of the stage before installation: Connect the stage to the switched-off PI controller, which is equipped with an internal discharge resistor. Do not pull out the connector from the electronics during operation. - Page 22 NOTICE Damage from unsuitable cables! Unsuitable cables can damage the stage and the electronics. Only use cables provided by PI for connecting the P-56x to the electronics. NOTICE Damage from incorrect mounting! Incorrect mounting of the P-56x or incorrectly mounted parts can damage the P-56x.
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Page 23: Connecting The P-56X To The Protective Earth Conductor
5 Installation 5.2 Connecting the P-56x to the Protective Earth Conductor INFORMATION In the case of P-56x stages with Sub-D connectors, ground loops can occur when the stage is grounded via its protective earth connector as well as by the shield of the connection cable for the electronics. - Page 24 5 Installation Figure 5: Mounting of the protective earth conductor (profile view) Base body of the P-56x Flat washer Safety washer Screw Cable lug Protective earth conductor Connecting the P-56x to the protective earth conductor 1. If necessary, fasten a suitable cable lug to the protective earth conductor. 2.
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Page 25: Mounting The P-56X
5 Installation 5.3 Mounting the P-56x NOTICE Warping of the P-56x due to mounting on uneven surfaces! Mounting the P-56x on an uneven surface can warp the P-56x. Warping reduces the accuracy. Mount the P-56x on an even surface. The recommended evenness of the surface is ≤20 µm. - Page 26 5 Installation Figure 6: Mounting holes in the base body Prerequisite You have read and understood the General Notes on Installation (p. 17). Tools and accessories Screws of appropriate size and length (see "Dimensions", p. 42) Suitable tools Mounting the stage on a surface 1.
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Page 27: Affixing The Load
5 Installation 5.4 Affixing the Load NOTICE Mechanical overload due to high torques and high loads! When affixing the load, high torques and high loads can overload the moving platform of the P-56x. Mechanical overload can cause damage to the piezo actuators, sensors and flexure joints of the P-56x and lead to losses in accuracy. - Page 28 5 Installation NOTICE Screws that are too long! The P-56x can be damaged by screws that are too long. Note the depth of the mounting holes in the moving platform (p. 42). Only use screws of the correct length for the respective mounting holes. INFORMATION The arrows in the figures (see "Dimensions", p.
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Page 29: Connecting The Adapter Cable To The P-56X (Only P-56X.3Cl Models)
5 Installation Figure 9: Long lever and center of load on the side of the moving platform Prerequisite You have read and understood the General Notes on Installation (p. 17). Tools and accessories Screws of appropriate size and length (p. 42) ... -
Page 31: Start-Up And Operation
6 Start-Up and Operation Start-Up and Operation In this Chapter General Notes on Start-Up and Operation ..............27 Operating the P-56x ....................29 Discharging the P-56x ....................30 6.1 General Notes on Start-Up and Operation CAUTION Risk of electric shock if the protective earth conductor is not connected! If a protective earth conductor is not or not properly connected, dangerous touch voltages can occur on the P-56x in the case of malfunction or failure of the system. - Page 32 Operating voltages that are too high or incorrectly connected can cause damage to the P-56x. Only operate the P-56x with controllers/drivers and original accessories from PI. Do not exceed the operating voltage range (p. 40) for which the P-56x is specified.
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Page 33: Operating The P-56X
6 Start-Up and Operation INFORMATION Systems are calibrated at the factory to achieve optimum positioning accuracy. Replacing the system components will cause a loss in positioning accuracy in the following cases: ID chip (p. 14) of the stage does not contain any calibration data ... -
Page 34: Discharging The P-56X
2. Set the piezo voltage to 0 V on the controller. In open-loop operation: Set the piezo voltage to 0 V on the controller. Discharging a P-56x that is not connected to the controller Connect the stage to the switched-off controller from PI. Version: 1.0.0 PZ248E P-56x Nanopositioners... -
Page 35: Maintenance
7 Maintenance Maintenance In this Chapter General Notes on Maintenance ................... 31 Packing the P-56x for Transport .................. 31 Cleaning the P-56x ...................... 33 7.1 General Notes on Maintenance NOTICE Misalignment from loosening screws! The P-56x is maintenance-free and achieves its positioning accuracy as a result of the optimum alignment of mechanical components and piezo actuators. - Page 36 7 Maintenance The following figures serve as examples and can differ from your stage model. Tools and accessories Original packaging Transport lock, included in delivery, consisting of: − Support frame − 4 plastic screws Suitable screwdriver Packing the P-56x 1.
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Page 37: Cleaning The P-56X
7 Maintenance d) Fasten the support frame to the mounting holes of the stage with the four plastic screws. In the following figure, one of the screws is marked with an arrow. 2. Pack the stage in the original packaging. 7.3 Cleaning the P-56x Prerequisites ... -
Page 39: Troubleshooting
8 Troubleshooting Troubleshooting Problem Possible Causes Solution Check the cable connections. No or limited The cable is not motion connected correctly Do not exceed the maximum permissible Excessive load stress and load capacities according to the specifications (p. 39). ... - Page 40 8 Troubleshooting Problem Possible Causes Solution P-56x, controller, When stages, whose ID chip (p. 14) does not extension cable or contain any calibration data, or LEMO adapter cable has connectors (no ID chip lines present) are been replaced used, the axis displacement has to be recalibrated after the P-56x, the controller, an extension cable or an adapter cable has been replaced.
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Page 41: Customer Service
9 Customer Service Customer Service For inquiries and orders, contact your PI sales engineer or send us an e-mail (info@pi.ws). If you have questions concerning your system, have the following information ready: Product codes and serial numbers of all products in the system ... -
Page 43: Technical Data
10 Technical Data 10 Technical Data In this Chapter Specifications ......................39 Ambient Conditions and Classifications ..............41 Dimensions ........................42 Torque for Stainless Steel Screws (A2-70) ..............43 Pin Assignment ......................44 10.1 Specifications 10.1.1 Data Table P-561.3CD P-562.3CD P-563.3CD P-561.3DD Unit... -
Page 44: Maximum Ratings
CL version: LEMO The resolution of PI piezo nanopositioning systems is not limited by friction or stiction. Value given is noise equivalent motion with E-725 / E-712 controller. * With digital controller. Non-linearity of direct drive stages measured with analog controllers is up to 0.1 % typ. -
Page 45: Ambient Conditions And Classifications
10 Technical Data 10.2 Ambient Conditions and Classifications The following ambient conditions and classifications must be observed for the P-56x: Area of application For indoor use only Maximum altitude 2000 m Air pressure 1100 hPa to 0.1 hPa (corresponds to roughly 825 Torr to 0.075 Torr) Relative humidity Highest relative humidity 80 % for temperatures up to 31 °C... -
Page 46: Dimensions
10 Technical Data 10.3 Dimensions Dimensions in mm. Note that the decimal places are separated by a comma in the drawings. Figure 10: P-56x.3CD and P-56x.3CL Version: 1.0.0 PZ248E P-56x Nanopositioners... -
Page 47: Torque For Stainless Steel Screws (A2-70)
10 Technical Data Figure 11: P-561.3DD 10.4 Torque for Stainless Steel Screws (A2-70) Screw Size Minimum Torque Maximum Torque 4 Nm 6 Nm 2.5 Nm 3.5 Nm 1.5 Nm 2.5 Nm 0.8 Nm 1.1 Nm M2.5 0.3 Nm 0.4 Nm 0.15 Nm 0.2 Nm M1.6... -
Page 48: Pin Assignment
10 Technical Data 10.5 Pin Assignment Sub-D Mix connector 25W3 Only for P-56x.3CD/.3DD: Figure 12: Sub-D Mix connector 25W3: Front side with connections Signal Function A1 inner conductor Output Probe sensor signal, channel 2 (nonmoving part of the capacitive sensor) A1 outer conductor Shield of Probe sensor signal, channel 2 A2 inner conductor... - Page 49 10 Technical Data Signal Function Input Target sensor signal, channel 1 (movable part of the capacitive sensor) Shield of Target sensor signal, channel 2 Shield of Target sensor signal, channel 3 Free – Free – Free – Free – Free –...
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Page 51: Old Equipment Disposal
Instrumente (PI) GmbH & Co. KG ensures environmentally correct disposal of old PI equipment that was first put into circulation after 13 August 2005, free of charge. If you have old PI equipment, you can send it postage-free to the following address: Physik Instrumente (PI) GmbH & Co. KG Auf der Römerstr. - Page 53 12 EC Declaration of Conformity 12 EC Declaration of Conformity For the P-56x, an EC Declaration of Conformity has been issued in accordance with the following European directives: 2006/95/EC, Low Voltage Directive 2004/108/EC, EMC Directive 2011/65/EU, RoHS Directive The applied standards certifying the conformity are listed below. Electromagnetic Emission: EN 61000-6-3:2007, EN 55011:2009 Electromagnetic Immunity: EN 61000-6-1:2007 Safety (Low Voltage Directive): EN 61010-1:2010...
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