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PZ234D
P-62x Positioners
User Manual
Version: 1.2.0
Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany
Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, www.pi.ws
Date: 13.05.2020
This document describes the following products:
P-620, P-621, P-622, P-625, P-628, P-629
PIHera piezo linear stage
P-620.1CD/.1CL/.10L
P-621.1CD/.1CL/.10L/.1U
P-622.1CD/.1CL/.10L/.1U
P-625.1CD/.1CL/.10L
P-628.1CD/.1CL/.10L
P-629.1CD/.1CL/.10L
P-620, P-621, P-622, P-625, P-628, P-629
PIHera piezo XY stage
P-620.2CD/.2CL/.20L
P-621.2CD/.2CL/.20L/.2U
P-622.2CD/.2CL/.20L/.2U
P-625.2CD/.2CL/.20L
P-628.2CD/.2CL/.20L
P-629.2CD/.2CL/.20L
P-620, P-621, P-622
PIHera precision Z stage
P-620.ZCD/.ZCL/.Z0L
P-621.ZCD/.ZCL/.Z0L
P-622.ZCD/.ZCL/.Z0L
.1CD/.2CD/.ZCD
= with D-sub connector 7W2
.1U/.2U
= with D-sub connector 5W1 (f)
.1CL/.2CL/.ZCL/.10L/.20L/.Z0L
= with LEMO connector
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Summary of Contents for PI P-62 Series
- Page 1 = with D-sub connector 7W2 .1U/.2U = with D-sub connector 5W1 (f) .1CL/.2CL/.ZCL/.10L/.20L/.Z0L = with LEMO connector Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, www.pi.ws...
- Page 2 The patents held by PI are found in our patent list: http://www.physikinstrumente.com/en/about-pi/patents © 2020 Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany. The text, photographs and drawings in this manual are protected by copyright. With regard thereto, Physik Instrumente (PI) GmbH & Co. KG retains all the rights.
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Page 3: Table Of Contents
Contents About this Document Objective and Target Group of this User Manual ............1 Symbols and Typographic Conventions ..............1 Definition of Terms ..................... 2 Figures ........................2 Other Applicable Documents ..................2 Downloading Manuals ....................3 Safety Intended Use ......................5 General Safety Instructions .................. - Page 4 Maintenance General Notes on Maintenance ................35 Cleaning the P-62x ....................35 Troubleshooting Customer Service Technical Data 10.1 Specifications ......................41 10.1.1 Data Table ....................41 10.1.2 Materials Used for Vacuum-Compatible Models ........45 10.1.3 Maximum Ratings ..................46 10.1.4 Ambient Conditions and Classifications ............47 10.2 Dimensions .......................
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Page 5: About This Document
1 About this Document About this Document In this Chapter Objective and Target Group of this User Manual ................1 Symbols and Typographic Conventions ..................1 Definition of Terms ........................2 Figures ............................2 Other Applicable Documents ......................2 Downloading Manuals ........................3 Objective and Target Group of this User Manual This user manual contains the information required for using the P-62x as intended ("x"... -
Page 6: Definition Of Terms
For better understandability, the colors, proportions, and degree of detail in illustrations can deviate from the actual circumstances. Photographic illustrations may also differ and must not be seen as guaranteed properties. Other Applicable Documents The devices and software tools from PI mentioned in this documentation are described in separate manuals. Product Document... -
Page 7: Downloading Manuals
If a manual is missing or problems occur with downloading: Contact our customer service department (p. 39). Downloading manuals 1. Open the website www.pi.ws. 2. Search the website for the product number (e.g., P-621) or the product family (e.g., PIHera). -
Page 9: Safety
The P-62x can only be used as intended in conjunction with suitable electronics (p. 15) available from PI. The electronics are not included in the P-62x's scope of delivery. The electronics must provide the required operating voltages. To ensure proper performance of the servo control system, the electronics must be able to read out and process the signals from the capacitive sensors. - Page 10 Do not open the P-62x. Discharge the positioner's piezo actuators before installing: Connect the positioner to the switched-off PI electronics equipped with an internal discharge resistor. Do not pull the plug connector out of the electronics during operation.
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Page 11: Organizational Measures
2 Safety Organizational Measures User manual Always keep this user manual together with the P-62x. The latest versions of the user manuals are available for download (p. 3) on our website. Add all information from the manufacturer to the user manual, for example supplements or technical notes. -
Page 13: Product Description
3 Product Description Product Description In this Chapter Model Overview ..........................9 Product View ..........................12 Product Labeling .......................... 13 Scope of Delivery ......................... 14 Suitable Electronics ........................15 Accessories ........................... 15 Technical Features ........................16 Model Overview The P-62x is available in the following versions: PIHera piezo linear stage Model Description... - Page 14 3 Product Description Model Description PIHera precision linear nanopositioner, 600 µm, without sensor, LEMO P-625.10L connectors P-628.1CD PIHera precision linear nanopositioner, 800 µm, direct position measuring, capacitive sensor, D-sub connector P-628.1CL PIHera precision linear nanopositioner, 800 µm, direct position measuring, capacitive sensor, LEMO connectors P-628.10L PIHera precision linear nanopositioner, 950 µm, without sensor, LEMO connectors...
- Page 15 3 Product Description Model Description PIHera precision XY nanopositioner, 250 µm × 250 µm, direct position P-622.2CL measuring, capacitive sensors, LEMO connectors P-622.20L PIHera precision XY nanopositioner, 300 µm × 300 µm, without sensors, LEMO connectors P-625.2CD PIHera precision XY nanopositioner, 500 µm × 500 µm, direct position measuring, capacitive sensors, D-sub connector P-625.2CL PIHera precision XY nanopositioner, 500 µm ×...
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Page 16: Product View
3 Product Description Model Description Precise PIHera vertical nanopositioning stage, 100 µm, direct position P-621.ZCD measuring, capacitive sensor, D-sub connector P-621.ZCL Precise PIHera vertical nanopositioning stage, 100 µm, direct position measuring, capacitive sensor, LEMO connectors P-621.Z0L Precise PIHera vertical nanopositioning stage, 140 µm, without sensor, LEMO connectors P-622.ZCD Precise PIHera vertical nanopositioning stage, 250 µm, direct position... -
Page 17: Product Labeling
Brand name Warning sign "Pay attention to the manual!" Old equipment disposal (p. 55) Country of origin: Germany Country of origin WWW.PI.WS Manufacturer's address (website) CE conformity mark Manufacturer's logo Symbol for the protective earth conductor (p. 25) P-62x Positioners PZ234D Version: 1.2.0... -
Page 18: Scope Of Delivery
3 Product Description If applicable: The arrows indicate the positive direction of motion. The letter X, Y, and Z indicate the axis. Figure 2: "Residual Voltage" warning sign on the connector of the P-62x "Residual Voltage" warning: Risk of electric shock (p. 5) for models with D-sub plug connector Scope of Delivery Product number... -
Page 19: Suitable Electronics
3 Product Description Suitable Electronics To operate a P-62x, you need suitable electronics. Selection of the device depends on the application and the connectors available. Electronics Connector* Channels** E-505 piezo amplifier module LEMO E-610 piezo amplifier / servo controller (OEM module) LEMO E-503 piezo amplifier module LEMO... -
Page 20: Technical Features
3 Product Description Adapter cables for models with LEMO plug connectors Product number Description P-895.1LDC Adapter cable LEMO to D-sub 7W2 (m) for piezo actuator nanopositioning systems with capacitive sensors, 1 channel, length: 0.3 m. Adapter cable LEMO to D-sub 25W3 (m) for piezo actuator nanopositioning P-895.3LDC systems with capacitive sensors, 3 channels, length: 0.3 m. -
Page 21: Capacitive Sensors
3 Product Description 3.7.3 Capacitive Sensors Except for the models P-62x.x0L, all P-62x are equipped with capacitive sensors. Capacitive sensors measure the position directly on the platform (direct metrology) and work without contact. Neither friction nor hysteresis interferes with the motion, which allows excellent linearity values to be achieved together with the high position resolution. -
Page 23: Unpacking
When handling the vacuum version of the positioner, attention must be paid to appropriate cleanliness. At PI, all parts are cleaned before assembly. Powder-free gloves are worn during assembly and measuring. In addition, the positioner is wipe cleaned afterwards and then shrink-wrapped twice in vacuum-compatible film. -
Page 25: Installation
Damage due to unsuitable cables! Unsuitable cables can damage the P-62x and the electronics. Use cables provided by PI only to connect the P-62x to the electronics. INFORMATION Extension cables can reduce the positioning accuracy of the P-62x or affect sensor processing by the electronics. -
Page 26: Fixing The P-62X And The Load
5 Installation Fixing the P-62x and the Load NOTICE Mechanical overload of the platform! High torques and high loads can overload the platform of the P-62x when fixing the load. Mechanical overload can cause damage to the piezo actuators, sensors, and flexures of the P-62x and lead to loss of accuracy. - Page 27 5 Installation NOTICE Distorting the P-62x when mounted on uneven surfaces! Fixing the P-62x onto an uneven surface can distort the P-62x. Distortion reduces the accuracy. Fix the P-62x onto an even surface. The recommended flatness of the surface is ≤20 µm. ...
- Page 28 5 Installation Center of load at an unsuitable position: Figure 4: Tall load and center of load too far above the platform Figure 5: Unwanted lever effect and center of load on the side of the platform Requirements You have read and understood the general notes on installation (p. 21). ...
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Page 29: Connecting The P-62X To The Protective Earth Conductor
5 Installation Fixing the P-62x and the load 1. Alignment (optional): − Align the positioner to the locating holes (p. 48) in the base body and suitable dowel pins. − Align the load with the help of suitable dowel pins and the locating holes (p. 48) in the platform of the P-62x. - Page 30 5 Installation Separate protective earth connector not available If a separate protective earth connector is not available, all mounting holes marked with the protective earth conductor symbol must be used to ensure proper connection of the protective earth conductor. Figure 7: Mounting hole with symbol for the protective earth conductor Tools and accessories Suitable protective earth conductor: Cable cross section ≥...
- Page 31 5 Installation Connecting the protective earth conductor to the separate protective earth connector (all models except P-620 and P-621.2xx/.2U) Figure 8: Connecting the protective earth conductor (profile view) Base body of the P-62x Flat washer Lock washer Screw Cable lug Protective earth conductor 1.
- Page 32 5 Installation Connecting the protective earth conductor via the mounting holes (P-620 and P-621.2xx/.2U only) Figure 9: Positioner on a surface that must be connected to a protective earth conductor; for mounting holes, see arrows. 1. Optional: Align the positioner using the locating holes (p. 48) in the base body and the dowel pins supplied.
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Page 33: Connecting The Vacuum Version To The Electronics
5 Installation Connecting the Vacuum Version to the Electronics INFORMATION This section describes connection of the vacuum version of the P-62x to electronics with D-sub 7W2 socket. For connecting electronics with D-sub 25W3, you also need a suitable P-895 adapter cable (p. 15) connected to the D-sub 25W3 socket of the electronics. Requirements ... - Page 34 5 Installation Figure 11: Connection of the .2U vacuum version to the electronics with P-890.2CV vacuum feedthrough Version: 1.2.0 PZ234D P-62x Positioners...
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Page 35: Startup And Operation
6 Startup and Operation Startup and Operation In this Chapter General Notes on Startup and Operation ..................31 Operating the P-62x ........................33 Discharging the P-62x ........................33 General Notes on Startup and Operation CAUTION Risk of electric shock if the protective earth conductor is not connected! If a protective earth conductor is not or not properly connected, dangerous touch voltages can occur on the P-62x in the case of malfunction or failure of the system. - Page 36 6 Startup and Operation NOTICE Decreased lifetime due to permanently high voltage! Applying a continuous high static voltage to piezo actuators reduces the lifetime of the piezo ceramic. When the P-62x is not used but the electronics remain switched on to ensure temperature stability, discharge the P-62x (p.
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Page 37: Operating The P-62X
Before demounting (e.g., before cleaning and transporting the P-62x and for modifications) The P-62x is discharged via the discharge resistor inside the electronics from PI. Discharging a positioner connected to the electronics In closed-loop operation: 1. Switch off the servo mode on the controller. -
Page 39: Maintenance
7 Maintenance Maintenance In this Chapter General Notes on Maintenance ....................35 Cleaning the P-62x ........................35 General Notes on Maintenance NOTICE Misalignment from loosening screws! The P-62x is maintenance-free and achieves its positioning accuracy as a result of the optimal alignment of mechanical components and piezo actuators. -
Page 41: Troubleshooting
8 Troubleshooting Troubleshooting Problem Possible causes Solution No or limited Cable not connected Check the cable connections. motion correctly Excessive load Do not exceed the maximum permissible stress and load capacities according to the specifications (p. 41). Zero shift of the sensor for ... - Page 42 8 Troubleshooting Problem Possible causes Solution Axes were mixed up during Pay attention to the assignment of the connection axes when connecting the positioner to the controller. This assignment is indicated by labels on the devices. The positioner Servo control parameters 1.
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Page 43: Customer Service
9 Customer Service Customer Service For inquiries and orders, contact your PI sales engineer or send us an email (service@pi.de). If you have any questions concerning your system, provide the following information: − Product and serial numbers of all products in the system −... -
Page 45: Technical Data
10 Technical Data Technical Data In this Chapter Specifications ..........................41 Dimensions ..........................48 Torque for Stainless Steel Screws (A2-70) ................... 51 Maximum Torque on the Platform ....................51 Pin Assignment ..........................52 10.1 Specifications 10.1.1 Data Table P-620.1CD P-621.1CD P-622.1CD P-625.1CD P-628.1CD... - Page 46 * With digital controller. With analog controllers 0.05 %. ** With digital controller. With analog controllers 0.07 %. The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo nanopositioning systems are free of friction.
- Page 47 10 Technical Data P-620.2CD P-621.2CD P-622.2CD P-625.2CD P-628.2CD P-629.2CD Unit Tolerance P-620.2CL P-621.2CL P-622.2CL P-625.2CL P-628.2CL P-629.2CL Active axes X, Y X, Y X, Y X, Y X, Y X, Y Motion and positioning Integrated sensor Capacitive Capacitive Capacitive Capacitive Capacitive Capacitive Travel range in X, Y at -...
- Page 48 * With digital controller. With analog controllers 0.05 %. ** With digital controller. With analog controllers 0.07 %. The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo nanopositioning systems are free of friction.
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Page 49: Materials Used For Vacuum-Compatible Models
10 Technical Data P-620.ZCD / P-621.ZCD / P-622.ZCD / Unit Tolerance P-620.ZCL P-621.ZCL P-622.ZCL Active axes Motion and positioning Integrated sensor Capacitive Capacitive Capacitive Travel range at -20 to 120 V, open µm +20 % / -0 % loop Travel range, closed loop µm Resolution, open loop typ. -
Page 50: Maximum Ratings
10 Technical Data 10.1.3 Maximum Ratings P-62x positioners are designed for the following operating data: Positioner Maximum operating Maximum operating Maximum power voltage frequency (no load) consumption P-620.1xx -20 to +120 V 367 Hz P-621.1x(x) -20 to +120 V 267 Hz P-622.1x(x) -20 to +120 V 133 Hz... -
Page 51: Ambient Conditions And Classifications
10 Technical Data 10.1.4 Ambient Conditions and Classifications The following ambient conditions and classifications for the P-62x must be observed: Area of application For indoor use only Maximum altitude 2000 m Air pressure All models except vacuum- Vacuum-compatible models: compatible models: 1100 hPa to 10 1100 hPa to 0.1 hPa Relative humidity... -
Page 52: Dimensions
10 Technical Data 10.2 Dimensions Dimensions in mm. Note that the decimal points are separated by a comma in the drawings. Figure 12: P-62x.1CD / .1CL / .10L / .1U The P-620 does not have a separate protective earth connector. P-620.1xx P-621.1x(x) P-622.1x(x) - Page 53 10 Technical Data Figure 13: P-62x.2CD / .2CL / .20L / .2U The P-620 and the P-621.2xx/.2U do not have a separate protective earth connector. Ø F P-620.2xx 21.5 1.01 M2 3.5 P-621.2x(x) 1.51 M3 5 6.25 P-622.2x(x) 1.51 M3 5 6.25 P-625.2xx 1.51...
- Page 54 10 Technical Data Figure 14: P-62x.ZCD / .ZCL / .Z0L The P-620 does not have a separate protective earth connector. Ø F P-620.Zxx 1.01 M2 28 P-621.Zxx 17.5 1.51 M3 36.5 P-622.Zxx 17.5 1.51 M3 46.5 Version: 1.2.0 PZ234D P-62x Positioners...
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Page 55: Torque For Stainless Steel Screws (A2-70)
10 Technical Data 10.3 Torque for Stainless Steel Screws (A2-70) Screw size Minimum torque Maximum torque 4 Nm 6 Nm 2.5 Nm 3.5 Nm 1.5 Nm 2.5 Nm 0.8 Nm 1.1 Nm M2.5 0.3 Nm 0.4 Nm 0.15 Nm 0.2 Nm M1.6 0.06 Nm 0.12 Nm... -
Page 56: Pin Assignment
10 Technical Data 10.5 Pin Assignment D-sub 7W2 connector (m) Figure 15: D-sub 7W2 connector (m): Front with connections Figure 16: D-sub connector: Example top view Signal Function Piezo voltage Probe Probe sensor signal (immovable part of the capacitive sensor) Data ID chip Data line for ID chip GND Target and ID chip... - Page 57 10 Technical Data D-sub connector 5W1 (f) Figure 17: D-sub connector 5W1 (f): Front with connections Signal Function A1 inner Probe Probe sensor signal (immovable part of the capacitive sensor) conductor A1 outer GND probe Probe sensor signal shield conductor Target Target sensor signal (movable part of the capacitive sensor) PZT+...
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Page 59: Old Equipment Disposal
Dispose of your old equipment according to international, national, and local rules and regulations. In order to fulfil its responsibility as the product manufacturer, Physik Instrumente (PI) GmbH & Co. KG undertakes environmentally correct disposal of all old PI equipment made available on the market after 13 August 2005 without charge. - Page 61 12 EU Declaration of Conformity EU Declaration of Conformity For the P-62x, an EU Declaration of Conformity has been issued in accordance with the following European directives: Low Voltage Directive EMC Directive RoHS Directive The applied standards certifying the conformity are listed below. Safety (Low Voltage Directive): EN 61010-1 EMC: EN 61326-1 RoHS: EN 50581 or EN IEC 63000...
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