Capacitive Sensors; Id Chip (Only Models With Sub-D Connector) - PI P-73 Series User Manual

3.5.3 Capacitive Sensors

The capacitive sensors of the P-73x measure the position directly at the moving
platform (direct metrology) and work without contact. Neither friction nor hysteresis
interferes with the measurement, which allows excellent linearity values to be
achieved in combination with the high position resolution. In connection with suitable
electronics, capacitive sensors achieve the best resolution, stability and bandwidth.

3.5.4 ID Chip (Only Models with Sub-D Connector)

An ID chip is located in the Sub-D connector of the stage. When the stage is
calibrated at the factory with digital electronics, the calibration data is saved together
with specific product information on the ID chip. When switched on, digital electronics
read the data from the ID chip of the connected stage. Stages whose ID chip contains
the calibration data can therefore be connected to any suitable digital electronics
without a new calibration.
For more information on the ID chip, see the manual of the controller used.
P-73x Nanopositioners PZ103E
3 Product Description
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