Table of Contents
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Contents
1
1.1
Goal and Target Audience of this User Manual ................................................... 1
1.2
Symbols and Typographic Conventions ............................................................... 1
1.3
Other Applicable Documents ................................................................................ 2
1.4
Downloading Manuals .......................................................................................... 3
2
2.1
Intended Use ........................................................................................................ 5
2.2
General Safety Instructions .................................................................................. 6
2.3
Organizational Measures ...................................................................................... 7
3
3.1
Features and Applications .................................................................................... 9
3.2
Model Overview ..................................................................................................10
3.2.1
3.2.2
3.2.3
3.3
Product View.......................................................................................................11
3.4
Scope of Delivery ...............................................................................................12
3.5
Technical Features .............................................................................................12
3.5.1
3.5.2
3.5.3
3.5.4
4
5
5.1
General Notes on Installation .............................................................................17
5.2
Connecting the P-73x to a Protective Earth Conductor .....................................19
5.3
Mounting the P-73x ............................................................................................21
5.4
Affixing the Load .................................................................................................23
6
6.1
General Notes on Start-Up and Operation .........................................................27
6.2
Operating the P-73x ...........................................................................................30
6.3
Discharging the P-73x ........................................................................................30
Piezo XY Stage.................................................................................10
Piezo XYZ Stage ..............................................................................10
Precision Z Stage .............................................................................11
PICMA® Piezo Actuators .................................................................12
Flexure Guides .................................................................................12
Capacitive Sensors ...........................................................................13
ID Chip (Only Models with Sub-D Connector) ..................................13
1
5
9
15
17
27
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Table of Contents
