Contents About this Document Objective and Target Group of this User Manual ............1 Symbols and Typographic Conventions..............1 Figures ........................2 Other Applicable Documents ..................2 Downloading Manuals ....................3 Safety Intended Use ......................5 General Safety Instructions ..................5 Organizational Measures ....................
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Maintenance General Notes on Maintenance ................29 Cleaning the P-753 ....................29 Troubleshooting Customer Service Technical Data 10.1 Specifications ......................35 10.1.1 Data Table ....................35 10.1.2 Maximum Ratings ..................36 10.1.3 Ambient Conditions and Classifications ............37 10.2 Dimensions ....................... 38 10.3 Torque for Stainless Steel Screws (A2-70) ..............
1 About this Document About this Document In this Chapter Objective and Target Group of this User Manual ................1 Symbols and Typographic Conventions ..................1 Figures ............................2 Other Applicable Documents ......................2 Downloading Manuals ........................3 Objective and Target Group of this User Manual This user manual contains the information required for the intended use of the P-753 (hereinafter referred to as "positioner").
Other Applicable Documents The devices and software tools from PI mentioned in this documentation are described in their own manuals. The latest versions of the user manuals are available for download (p. 3) on our website.
Click the links in the browser window to change to the content for your product and log in using the access data that you received. General procedure: 1. Open the website www.pi.ws. 2. If access to the manuals is protected by a password: a) Click Login.
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1 About this Document 3. Click Search. 4. Enter the product number up to the period (e.g., P-753) or the product family (e.g., LISA) into the search field. 5. Click Start search or press the Enter key. 6. Open the corresponding product detail page in the list of search results: a) If necessary: Scroll down the list.
The intended use of the P-753 is only possible in combination with suitable electronics (p. 11) that is available from PI. The electronics is not included in the scope of delivery of the P-753. The electronics must provide the required operating voltages. To ensure proper performance of the servo control system, the electronics must be able to read out and process the signals from the capacitive sensors.
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Do not open the P-753. Discharge the positioner's piezo actuators before installation: Connect the positioner to the switched-off PI controller, which is equipped with an internal discharge resistor. Do not pull the plug connector out of the electronics during operation.
2 Safety Organizational Measures User manual Always keep this user manual available with the P-753. The latest versions of the user manuals are available for download (p. 3) on our website. Add all information from the manufacturer to the user manual, for example supplements or technical notes.
3 Product Description Product Description In this Chapter Model Overview ..........................9 Product View ..........................10 Product Labeling .......................... 10 Scope of Delivery ......................... 11 Suitable Electronics ........................11 Technical Features ........................11 Model Overview The P-753 is available in the following versions: Model Description P-753.11C...
Warning sign "Pay attention to the manual!" Old equipment disposal (p. 43) Country of origin: Germany Country of origin WWW.PI.WS Manufacturer's address (website) CE conformity mark Symbol for the protective earth conductor, marks the protective earth connection of the P-753 (p. 16) Version: 1.0.1...
3 Product Description Figure 2: "Residual Voltage" warning sign on the connector of the P-753 Warning sign "Residual voltage": Notice of risk of electric shock (p. 5) for models with D-sub plug connector Scope of Delivery Product number Description P-753 Positioner according to order (p.
3 Product Description 3.6.2 Flexure Guides P-753 positioners have flexure guides for friction-free motion and high guiding accuracy. A flexure guide is an element that is free of static and sliding friction. It is based on the elastic deformation (bending) of a solid (e.g., steel) and does not have any rolling or sliding parts. Flexure elements have a high stiffness and load capacity.
4 Unpacking Unpacking 1. Unpack the P-753 with care. 2. Compare the contents with the scope of delivery according to the contract and the delivery note. 3. Inspect the contents for signs of damage. If any parts are damaged or missing, contact our customer service department (p.
Do not open the P-753. Discharge the positioner's piezo actuators before installation: Connect the positioner to the switched-off PI controller, which is equipped with an internal discharge resistor. Do not pull the plug connector out of the electronics during operation.
NOTICE Damage due to unsuitable cables! Unsuitable cables can damage the P-753 and the electronics. Only use cables provided by PI for connecting the P-753 to the electronics. NOTICE Damage due to improper mounting! Improper mounting of the P-753 or incorrectly mounted parts can damage the P-753.
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5 Installation The P-753 has an M4 hole for connecting the protective earth conductor. This hole is located next to the cable exit and is marked with the protective earth symbol (see "Dimensions" (p. 38)). Requirements You have read and understood the general notes on installation (p. 15). ...
5 Installation Mounting the P753 NOTICE Warping of the P753 due to mounting on uneven surfaces! Mounting the P-753 on an uneven surface can warp the P-753. Warping reduces the accuracy. Mount the P-753 onto an even surface. The recommended flatness of the surface is ≤10 µm.
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5 Installation The figure below serves as an example and can differ from your positioner model. Figure 4: P-753: Four countersunk holes for mounting from above (white arrows) and two threaded holes for mounting from below (hatched arrows) Requirements You have read and understood the general notes on installation (p. 15). ...
5 Installation Mounting the P753 1. Align the P-753 on the surface so that the corresponding holes in the P-753 and the surface are aligned. 2. Mount the P-753 on the surface from above or from below: Mounting from above with four M3 screws: a) Introduce four screws into the countersunk holes in the base body of the P-753 from above.
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5 Installation NOTICE Center of load at unsuitable position! If the center of load is located too far away from the center of the motion platform (e.g., tall loads and unwanted lever effect), the P-753 can be damaged by high strain on the flexure guides, high torques, and oscillation, especially when operated dynamically.
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5 Installation Center of load at the optimum position: Figure 6: Example of an optimally placed load (1: center of load) Center of load at an unsuitable position: Figure 7: High setup and center of load (1) far above the motion platform Figure 8: Long lever and center of load (1) on the side of the motion platform Version: 1.0.1...
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5 Installation Requirements You have read and understood the general notes on installation (p. 15). Tools and accessories M2.5 screws of suitable length (p. 38) Suitable tools Fixing the load Fix loads only to the threaded holes (p. 38) intended for this purpose and use suitable screws.
6 Startup and Operation Startup and Operation In this Chapter General Notes on Startup and Operation ..................25 Operating the P-753 ........................26 Discharging the P-753 ........................27 General Notes on Startup and Operation CAUTION Risk of electric shock if the protective earth conductor is not connected! If a protective earth conductor is not or not properly connected, dangerous touch voltages can occur on the P-753 in the case of malfunction or failure of the system.
Operating voltages that are too high or incorrectly connected can cause damage to the P-753. Operate the P-753 only with controllers/drivers and original accessories from PI. Do not exceed the operating voltage range (p. 36) for which the P-753 is specified.
Before demounting (e.g., before cleaning and transporting the P-753 and for modifications) The P-753 is discharged via the internal discharge resistor of the controller from PI. Discharging a positioner that is connected to the controller In closed-loop operation: 1. Switch off the servo mode on the controller.
7 Maintenance Maintenance In this Chapter General Notes on Maintenance ....................29 Cleaning the P-753 ........................29 General Notes on Maintenance NOTICE Misalignment from loosening screws on the base body! The P-753 is maintenance-free and precisely aligned. Loosened screws on the base body cause a loss in positioning accuracy.
8 Troubleshooting Troubleshooting Problem Possible causes Solution No or limited Cable not connected Check the cable connections. motion correctly Excessive load Do not exceed the maximum permissible stress and load capacities according to the specifications (p. 35). Zero shift of the sensor for ...
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8 Troubleshooting Problem Possible causes Solution P-753 or controller has been When using positioners, whose ID chip replaced (p. 12) does not contain any calibration data, or LEMO plug connectors, axis displacement has to be recalibrated after the P-753 or the controller has been replaced.
9 Customer Service Customer Service For inquiries and orders, contact your PI sales engineer or send us an email (service@pi.de). If you have any questions concerning your system, provide the following information: − Product and serial numbers of all products in the system −...
10 Technical Data Technical Data In this Chapter Specifications ..........................35 Dimensions ..........................38 Torque for Stainless Steel Screws (A2-70) ................... 41 Pin Assignment ..........................41 10.1 Specifications 10.1.1 Data Table P753.1CD P753.2CD P753.3CD Unit Tolerance Active axes Motion and positioning Integrated sensor Capacitive Capacitive...
E-625, E-754 The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo nanopositioning systems are free of friction. Versions with LEMO connector available as P-753.x1C. Vacuum versions to 10 hPa available as P-753.xUD.
10 Technical Data 10.1.3 Ambient Conditions and Classifications Pay attention to the following ambient conditions and classifications for the P-753: Area of application For indoor use only Maximum altitude 2000 m Air pressure 1100 hPa to 0.1 hPa Relative humidity Highest relative humidity 80 % for temperatures up to 31 °C Decreasing linearly to 50 % relative humidity at 40 °C Operating temperature...
10 Technical Data 10.2 Dimensions Dimensions in mm. Note that the decimal places are separated by a comma in the drawings. Figure 9: P-753.11C / P-753.1CD Version: 1.0.1 PZ254E P753 Positioning Systems...
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10 Technical Data Figure 10: P-753.21C / P-753.2CD P753 Positioning Systems PZ254E Version: 1.0.1...
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10 Technical Data Signal Function Piezo voltage Probe Probe sensor signal (nonmoving part of the capacitive sensor) Data ID chip Data line for ID chip GND target and ID chip Ground of target and ID chip GND PZT Piezo voltage ground (Not connected) Target Target sensor signal (movable part of the...
Dispose of your old equipment according to international, national, and local rules and regulations. In order to fulfil its responsibility as the product manufacturer, Physik Instrumente (PI) GmbH & Co. KG undertakes environmentally correct disposal of all old PI equipment made available on the market after 13 August 2005 without charge.
12 EU Declaration of Conformity EU Declaration of Conformity For the P-753, an EU Declaration of Conformity has been issued in accordance with the following European directives: Low Voltage Directive EMC Directive RoHS Directive The applied standards certifying the conformity are listed below. Safety (Low Voltage Directive): EN 61010-1 EMC: EN 61326-1 RoHS: EN 50581...
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