PI P753 User Manual

PI P753 User Manual

Positioning systems
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PZ254E
P­753 Positioning Systems
User Manual
Version: 1.0.1
Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany
Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, www.pi.ws
Date: 28.11.2018
This document describes the following products:
P­753.11C / P­753.1CD
LISA high dynamics piezo nanopositioning
system, 15 µm, direct position measuring,
capacitive sensor
P­753.21C / P­753.2CD
LISA high dynamics piezo nanopositioning
system, 30 µm, direct position measuring,
capacitive sensor
P­753.31C / P­753.3CD
LISA high dynamics piezo nanopositioning
system, 38 µm, direct position measuring,
capacitive sensor
.11C/.21C/.31C = with LEMO connectors
.1CD/.2CD/.3CD = with D-sub connector

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Summary of Contents for PI P753

  • Page 1 38 µm, direct position measuring, capacitive sensor .11C/.21C/.31C = with LEMO connectors .1CD/.2CD/.3CD = with D-sub connector Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, www.pi.ws...
  • Page 2 The patents held by PI are found in our patent list: (http://www.physikinstrumente.com/en/about- pi/patents) © 2018 Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany. The text, photographs and drawings in this manual are protected by copyright. With regard thereto, Physik Instrumente (PI) GmbH & Co. KG retains all the rights.
  • Page 3: Table Of Contents

    Contents About this Document Objective and Target Group of this User Manual ............1 Symbols and Typographic Conventions..............1 Figures ........................2 Other Applicable Documents ..................2 Downloading Manuals ....................3 Safety Intended Use ......................5 General Safety Instructions ..................5 Organizational Measures ....................
  • Page 4 Maintenance General Notes on Maintenance ................29 Cleaning the P-753 ....................29 Troubleshooting Customer Service Technical Data 10.1 Specifications ......................35 10.1.1 Data Table ....................35 10.1.2 Maximum Ratings ..................36 10.1.3 Ambient Conditions and Classifications ............37 10.2 Dimensions ....................... 38 10.3 Torque for Stainless Steel Screws (A2-70) ..............
  • Page 5: About This Document

    1 About this Document About this Document In this Chapter Objective and Target Group of this User Manual ................1 Symbols and Typographic Conventions ..................1 Figures ............................2 Other Applicable Documents ......................2 Downloading Manuals ........................3 Objective and Target Group of this User Manual This user manual contains the information required for the intended use of the P-753 (hereinafter referred to as "positioner").
  • Page 6: Figures

    Other Applicable Documents The devices and software tools from PI mentioned in this documentation are described in their own manuals. The latest versions of the user manuals are available for download (p. 3) on our website.
  • Page 7: Downloading Manuals

     Click the links in the browser window to change to the content for your product and log in using the access data that you received. General procedure: 1. Open the website www.pi.ws. 2. If access to the manuals is protected by a password: a) Click Login.
  • Page 8 1 About this Document 3. Click Search. 4. Enter the product number up to the period (e.g., P-753) or the product family (e.g., LISA) into the search field. 5. Click Start search or press the Enter key. 6. Open the corresponding product detail page in the list of search results: a) If necessary: Scroll down the list.
  • Page 9: Safety

    The intended use of the P-753 is only possible in combination with suitable electronics (p. 11) that is available from PI. The electronics is not included in the scope of delivery of the P-753. The electronics must provide the required operating voltages. To ensure proper performance of the servo control system, the electronics must be able to read out and process the signals from the capacitive sensors.
  • Page 10  Do not open the P-753.  Discharge the positioner's piezo actuators before installation: Connect the positioner to the switched-off PI controller, which is equipped with an internal discharge resistor.  Do not pull the plug connector out of the electronics during operation.
  • Page 11: Organizational Measures

    2 Safety Organizational Measures User manual  Always keep this user manual available with the P-753. The latest versions of the user manuals are available for download (p. 3) on our website.  Add all information from the manufacturer to the user manual, for example supplements or technical notes.
  • Page 13: Product Description

    3 Product Description Product Description In this Chapter Model Overview ..........................9 Product View ..........................10 Product Labeling .......................... 10 Scope of Delivery ......................... 11 Suitable Electronics ........................11 Technical Features ........................11 Model Overview The P-753 is available in the following versions: Model Description P-753.11C...
  • Page 14: Product View

    Warning sign "Pay attention to the manual!" Old equipment disposal (p. 43) Country of origin: Germany Country of origin WWW.PI.WS Manufacturer's address (website) CE conformity mark Symbol for the protective earth conductor, marks the protective earth connection of the P-753 (p. 16) Version: 1.0.1...
  • Page 15: Scope Of Delivery

    3 Product Description Figure 2: "Residual Voltage" warning sign on the connector of the P-753 Warning sign "Residual voltage": Notice of risk of electric shock (p. 5) for models with D-sub plug connector Scope of Delivery Product number Description P-753 Positioner according to order (p.
  • Page 16: Flexure Guides

    3 Product Description 3.6.2 Flexure Guides P-753 positioners have flexure guides for friction-free motion and high guiding accuracy. A flexure guide is an element that is free of static and sliding friction. It is based on the elastic deformation (bending) of a solid (e.g., steel) and does not have any rolling or sliding parts. Flexure elements have a high stiffness and load capacity.
  • Page 17: Unpacking

    4 Unpacking Unpacking 1. Unpack the P-753 with care. 2. Compare the contents with the scope of delivery according to the contract and the delivery note. 3. Inspect the contents for signs of damage. If any parts are damaged or missing, contact our customer service department (p.
  • Page 19: Installation

     Do not open the P-753.  Discharge the positioner's piezo actuators before installation: Connect the positioner to the switched-off PI controller, which is equipped with an internal discharge resistor.  Do not pull the plug connector out of the electronics during operation.
  • Page 20: Connecting The P-753 To The Protective Earth Conductor

    NOTICE Damage due to unsuitable cables! Unsuitable cables can damage the P-753 and the electronics.  Only use cables provided by PI for connecting the P-753 to the electronics. NOTICE Damage due to improper mounting! Improper mounting of the P-753 or incorrectly mounted parts can damage the P-753.
  • Page 21 5 Installation The P-753 has an M4 hole for connecting the protective earth conductor. This hole is located next to the cable exit and is marked with the protective earth symbol (see "Dimensions" (p. 38)). Requirements  You have read and understood the general notes on installation (p. 15). ...
  • Page 22: Mounting The P-753

    5 Installation Mounting the P­753 NOTICE Warping of the P­753 due to mounting on uneven surfaces! Mounting the P-753 on an uneven surface can warp the P-753. Warping reduces the accuracy.  Mount the P-753 onto an even surface. The recommended flatness of the surface is ≤10 µm.
  • Page 23 5 Installation The figure below serves as an example and can differ from your positioner model. Figure 4: P-753: Four countersunk holes for mounting from above (white arrows) and two threaded holes for mounting from below (hatched arrows) Requirements  You have read and understood the general notes on installation (p. 15). ...
  • Page 24: Fixing The Load

    5 Installation Mounting the P­753 1. Align the P-753 on the surface so that the corresponding holes in the P-753 and the surface are aligned. 2. Mount the P-753 on the surface from above or from below: Mounting from above with four M3 screws: a) Introduce four screws into the countersunk holes in the base body of the P-753 from above.
  • Page 25 5 Installation NOTICE Center of load at unsuitable position! If the center of load is located too far away from the center of the motion platform (e.g., tall loads and unwanted lever effect), the P-753 can be damaged by high strain on the flexure guides, high torques, and oscillation, especially when operated dynamically.
  • Page 26 5 Installation Center of load at the optimum position: Figure 6: Example of an optimally placed load (1: center of load) Center of load at an unsuitable position: Figure 7: High setup and center of load (1) far above the motion platform Figure 8: Long lever and center of load (1) on the side of the motion platform Version: 1.0.1...
  • Page 27 5 Installation Requirements  You have read and understood the general notes on installation (p. 15). Tools and accessories M2.5 screws of suitable length (p. 38)  Suitable tools  Fixing the load  Fix loads only to the threaded holes (p. 38) intended for this purpose and use suitable screws.
  • Page 29: Startup And Operation

    6 Startup and Operation Startup and Operation In this Chapter General Notes on Startup and Operation ..................25 Operating the P-753 ........................26 Discharging the P-753 ........................27 General Notes on Startup and Operation CAUTION Risk of electric shock if the protective earth conductor is not connected! If a protective earth conductor is not or not properly connected, dangerous touch voltages can occur on the P-753 in the case of malfunction or failure of the system.
  • Page 30: Operating The P-753

    Operating voltages that are too high or incorrectly connected can cause damage to the P-753.  Operate the P-753 only with controllers/drivers and original accessories from PI.  Do not exceed the operating voltage range (p. 36) for which the P-753 is specified.
  • Page 31: Discharging The P-753

    Before demounting (e.g., before cleaning and transporting the P-753 and for  modifications) The P-753 is discharged via the internal discharge resistor of the controller from PI. Discharging a positioner that is connected to the controller In closed-loop operation: 1. Switch off the servo mode on the controller.
  • Page 33: Maintenance

    7 Maintenance Maintenance In this Chapter General Notes on Maintenance ....................29 Cleaning the P-753 ........................29 General Notes on Maintenance NOTICE Misalignment from loosening screws on the base body! The P-753 is maintenance-free and precisely aligned. Loosened screws on the base body cause a loss in positioning accuracy.
  • Page 35: Troubleshooting

    8 Troubleshooting Troubleshooting Problem Possible causes Solution No or limited Cable not connected  Check the cable connections. motion correctly Excessive load  Do not exceed the maximum permissible stress and load capacities according to the specifications (p. 35). Zero shift of the sensor for ...
  • Page 36 8 Troubleshooting Problem Possible causes Solution P-753 or controller has been When using positioners, whose ID chip replaced (p. 12) does not contain any calibration data, or LEMO plug connectors, axis displacement has to be recalibrated after the P-753 or the controller has been replaced.
  • Page 37: Customer Service

    9 Customer Service Customer Service For inquiries and orders, contact your PI sales engineer or send us an email (service@pi.de).  If you have any questions concerning your system, provide the following information: − Product and serial numbers of all products in the system −...
  • Page 39: Technical Data

    10 Technical Data Technical Data In this Chapter Specifications ..........................35 Dimensions ..........................38 Torque for Stainless Steel Screws (A2-70) ................... 41 Pin Assignment ..........................41 10.1 Specifications 10.1.1 Data Table P­753.1CD P­753.2CD P­753.3CD Unit Tolerance Active axes Motion and positioning Integrated sensor Capacitive Capacitive...
  • Page 40: Maximum Ratings

    E-625, E-754 The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo nanopositioning systems are free of friction. Versions with LEMO connector available as P-753.x1C. Vacuum versions to 10 hPa available as P-753.xUD.
  • Page 41: Ambient Conditions And Classifications

    10 Technical Data 10.1.3 Ambient Conditions and Classifications Pay attention to the following ambient conditions and classifications for the P-753: Area of application For indoor use only Maximum altitude 2000 m Air pressure 1100 hPa to 0.1 hPa Relative humidity Highest relative humidity 80 % for temperatures up to 31 °C Decreasing linearly to 50 % relative humidity at 40 °C Operating temperature...
  • Page 42: Dimensions

    10 Technical Data 10.2 Dimensions Dimensions in mm. Note that the decimal places are separated by a comma in the drawings. Figure 9: P-753.11C / P-753.1CD Version: 1.0.1 PZ254E P­753 Positioning Systems...
  • Page 43 10 Technical Data Figure 10: P-753.21C / P-753.2CD P­753 Positioning Systems PZ254E Version: 1.0.1...
  • Page 44 10 Technical Data Figure 11: P-753.31C / P-753.3CD Version: 1.0.1 PZ254E P­753 Positioning Systems...
  • Page 45: Torque For Stainless Steel Screws (A2-70)

    10 Technical Data 10.3 Torque for Stainless Steel Screws (A2­70) Screw size Minimum torque Maximum torque 4 Nm 6 Nm 2.5 Nm 3.5 Nm 1.5 Nm 2.5 Nm 0.8 Nm 1.1 Nm M2.5 0.3 Nm 0.4 Nm 0.15 Nm 0.2 Nm M1.6 0.06 Nm 0.12 Nm...
  • Page 46 10 Technical Data Signal Function Piezo voltage Probe Probe sensor signal (nonmoving part of the capacitive sensor) Data ID chip Data line for ID chip GND target and ID chip Ground of target and ID chip GND PZT Piezo voltage ground (Not connected) Target Target sensor signal (movable part of the...
  • Page 47: Old Equipment Disposal

    Dispose of your old equipment according to international, national, and local rules and regulations. In order to fulfil its responsibility as the product manufacturer, Physik Instrumente (PI) GmbH & Co. KG undertakes environmentally correct disposal of all old PI equipment made available on the market after 13 August 2005 without charge.
  • Page 49: Eu Declaration Of Conformity

    12 EU Declaration of Conformity EU Declaration of Conformity For the P-753, an EU Declaration of Conformity has been issued in accordance with the following European directives: Low Voltage Directive EMC Directive RoHS Directive The applied standards certifying the conformity are listed below. Safety (Low Voltage Directive): EN 61010-1 EMC: EN 61326-1 RoHS: EN 50581...

This manual is also suitable for:

P-753.11cP-753.1cdP-753.31cP-753.3cdP-753.21cP-753.2cd

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