PI P-54 Series User Manual
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PI P-54 Series User Manual

Nanopositioner
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PZ244E
P­54x Nanopositioner
User Manual
Version: 1.2.0
Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany
Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, www.pi.ws
Date: 27.07.2020
This document describes the following products:
P­541.2 / P­542.2
XY nanopositioning system with large aperture
P-541.2xx, 100 µm × 100 µm
P-542.2xx, 200 µm × 200 µm
P-541.2DD, 45 µm × 45 µm, direct drive
P­541.Z
Nanopositioner Z stage with large aperture
P-541.ZCD, 100 µm, direct position measuring
P-541.ZSL, 100 µm
P-541.Z0L, 150 µm
P­541.T
Nanopositioner and tip/tilt stage with large
aperture
P-541.TCD, 100 µm / 0.8 mrad, parallel
metrology
P-541.TSL, 100 µm / 0.8 mrad
P-541.T0L, 150 µm / 1.2 mrad
Model-specific properties:
Integrated sensor:
Capacitive sensors: 2CD, 2CL, 2DD, ZCD, TCD
Strain gauge sensors: 2SL, ZSL, TSL
Without sensor: 20L, Z0L, T0L
Sensor / voltage connector:
D-sub 25W3 (m): 2CD, 2DD, TCD
D-sub 7W2 (m): ZCD
LEMO: 2CL, 2SL, 20L, ZSL, Z0L, TSL, T0L

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Summary of Contents for PI P-54 Series

  • Page 1 D-sub 25W3 (m): 2CD, 2DD, TCD D-sub 7W2 (m): ZCD LEMO: 2CL, 2SL, 20L, ZSL, Z0L, TSL, T0L Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, www.pi.ws...
  • Page 2 The patents held by PI are found in our patent list: https://www.physikinstrumente.com/en/about-pi/patents © 2020 Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany. The text, photographs and drawings in this manual are protected by copyright. With regard thereto, Physik Instrumente (PI) GmbH & Co. KG retains all the rights.

  • Page 3: Table Of Contents

    Contents About this Document Objective and Target Group of this User Manual ............1 Symbols and Typographic Conventions ..............1 Definition of Terms ..................... 2 Figures ........................2 Other Applicable Documents ..................3 Downloading Manuals ....................3 Safety Intended Use ......................5 General Safety Instructions ..................
  • Page 4 Operating the P-541.T0L ..................27 Discharging the P-54x ....................28 Maintenance General Notes on Maintenance ................29 Cleaning the P-54x ....................29 Troubleshooting Customer Service Technical Data 10.1 Specifications ......................35 10.1.1 Data Table ....................35 10.1.2 Maximum Ratings ..................38 10.1.3 Ambient Conditions and Classifications ............

  • Page 5: About This Document

    1 About this Document About this Document In this Chapter Objective and Target Group of this User Manual ................1 Symbols and Typographic Conventions ..................1 Definition of Terms ........................2 Figures ............................2 Other Applicable Documents ......................3 Downloading Manuals ........................3 Objective and Target Group of this User Manual This user manual contains the information required for using the P-54x as intended ("x"...

  • Page 6: Definition Of Terms

    1 About this Document Symbol/ Meaning Label Action consisting of several steps with strict sequential order Action consisting of one or more steps without relevant sequential  order. Bullet  p. 5 Cross-reference to page 5 RS­232 Label on the product indicating an operating element (example: RS-232 interface socket) Warning signs attached to the product that refer to detailed information in this manual.

  • Page 7: Other Applicable Documents

    1 About this Document Other Applicable Documents The devices and software tools from PI mentioned in this documentation are described in separate manuals. Product Document E-503 Piezo Amplifier Module PZ62E User Manual E-505 Piezo Amplifier Module E-610 Piezo Amplifier / Servo Controller (OEM...

  • Page 9: Safety

    The P-54x can only be used as intended in conjunction with suitable electronics (p. 12) available from PI. The electronics are not in the P-54x's scope of delivery. The electronics must provide the required operating voltages. To ensure proper performance of the servo control system, the electronics must also be able to read out and process the signals from the position sensors.
  • Page 10  Do not open the P-54x.  Discharge the positioner's piezo actuators before installing: Connect the positioner to the switched-off PI electronics equipped with an internal discharge resistor.  Do not pull the plug connector out of the electronics during operation.

  • Page 11: Organizational Measures

    2 Safety Organizational Measures User manual  Always keep this user manual together with the P-54x. The latest versions of the user manuals are available for download (p. 3) on our website.  Add all information from the manufacturer to the user manual, for example supplements or technical notes.

  • Page 13: Product Description

    3 Product Description Product Description In this Chapter Model Overview ..........................9 Product View ..........................10 Product Labeling .......................... 11 Scope of Delivery ......................... 11 Suitable Electronics ........................12 Accessories ........................... 12 Technical Features ........................13 Model Overview The following standard versions of the P-54x are available: XY nanopositioning system with large aperture Model Description...

  • Page 14: Product View

    3 Product Description Nanopositioner Z stage with large aperture Model Description P-541.ZCD Vertical nanopositioning stage with large aperture, 100 µm, direct position measuring, capacitive sensors P-541.ZSL Vertical nanopositioning stage with large aperture, 100 µm, strain gauge sensors P-541.Z0L Vertical nanopositioning stage with large aperture, 150 µm, without sensor Nanopositioner Z and tip/tilt stage with large aperture Model...

  • Page 15: Product Labeling

    Warning sign "Pay attention to the manual!" Old equipment disposal (p. 47) Country of origin: Germany Country of origin WWW.PI.WS Manufacturer's address (website) CE conformity mark Symbol for the protective earth conductor, marks the protective earth connection of the P-54x (p. 18) Positive direction of motion of the X axis (P-54x.2xx models...

  • Page 16: Suitable Electronics

    3 Product Description Suitable Electronics You need suitable electronics to operate a P-54x. Selecting the device depends on the application and the connectors available. Electronics Connector* Channels** E-505 Piezo Amplifier Module LEMO E-610 Piezo Amplifier / Servo Controller (OEM Module) LEMO E-503 Piezo Amplifier Module LEMO E-663 Piezo Amplifier***...

  • Page 17: Technical Features

    3 Product Description Adapter cable with D­sub (mechanics) to D­sub (electronics) Product number Description P-895.2D1DDC* Adapter cable D-sub 25W3 (f) and D-sub 7W2 (f) to D-sub 25W3 (m) for piezo actuator nanopositioning systems with capacitive sensors, 3 channels, length: 0.3 m. P-895.2DDC Adapter cable 2×...

  • Page 18: Id Chip (Models With D-Sub Connector Only)

    3 Product Description Strain gauge sensors (SGS) Strain gauge sensors derive the position information from their expansion. They are attached at a suitable position in the drivetrain, where they measure the displacement of the positioner's moving part against the base body. This type of position measuring is indirect and requires contact, because the position of the platform is derived from a measurement on the lever, guide or piezo stack.

  • Page 19: Unpacking

    4 Unpacking Unpacking NOTICE Mechanical overload due to incorrect handling! An impermissible mechanical load on the platform of the P-54x can cause damage to the piezo actuators, sensors, and flexures of the P-54x as well as loss of accuracy.  Do not touch any sensitive parts (e.g., platform) when handling the P-54x. 1.

  • Page 21: Installation

     Do not open the P-54x.  Discharge the positioner's piezo actuators before installing: Connect the positioner to the switched-off PI electronics equipped with an internal discharge resistor.  Do not pull the plug connector out of the electronics during operation.

  • Page 22: Connecting The P-54X To The Protective Earth Conductor

    NOTICE Damage due to unsuitable cables! Unsuitable cables can damage the P-54x and the electronics.  Use cables provided by PI only to connect the P-54x to the electronics. NOTICE Damage due to improper mounting! Improper mounting of the P-54x or incorrectly mounted parts can damage the P-54x.
  • Page 23 5 Installation The P-54x has an M4 hole for attaching the protective earth conductor. This hole is marked with the symbol for the protective earth conductor . Refer to "Dimensions" (p. 40) for the exact position of the hole. Requirements ...

  • Page 24: Mounting The P-54X

    5 Installation Mounting the P­54x NOTICE Distorting the P­54x when mounted on uneven surfaces! Fixing the P-54x onto an uneven surface can distort the P-54x. Distortion reduces the accuracy.  Fix the P­54x onto an even surface. The recommended flatness of the surface is ≤20 µm. ...

  • Page 25: Fixing The Load

    5 Installation − For applications with large temperature fluctuations: The surface should have the same or similar thermal expansion properties as the P-54x (e.g., aluminum surface). Tools and accessories Screws of suitable size and length (refer to "Dimensions" (p. 40)) ...
  • Page 26 5 Installation NOTICE Center of load at unsuitable position! If the center of load is located too far away from the center of the platform (e.g., tall loads and unwanted lever effect), the P-54x can be damaged by high strain on the flexure guides, high torques, and oscillation, especially when operated dynamically.
  • Page 27 5 Installation Figure 7: Unwanted lever effect and center of load on the side of the platform Requirements  You have read and understood the general notes on installation (p. 17).  The P-54x is not connected to the electronics. Tools and accessories Screws of suitable size and length (p.

  • Page 28: Connecting The P-54X To The Electronics

    5 Installation Connecting the P­54x to the Electronics INFORMATION  When connecting, pay attention to the assignment specified on the labeling of the sockets, plug connectors, and cables. Requirements  You have read and understood the general notes on installation (p. 17). ...

  • Page 29: Starting And Operating

    6 Starting and Operating Starting and Operating In this Chapter General Notes on Starting and Operating ................... 25 Operating the P-54x (All Models Except the P-541.T0L) .............. 27 Operating the P-541.T0L ......................27 Discharging the P-54x ........................28 General Notes on Starting and Operating CAUTION Risk of electric shock if the protective earth conductor is not connected! If a protective earth conductor is not or not properly connected, dangerous touch voltages can...
  • Page 30 Operating voltages that are too high or incorrectly connected can cause damage to the P-54x.  Operate the P-54x only with controllers/drivers and original accessories from PI.  Do not exceed the operating voltage range (p. 38) for which the P-54x is specified.

  • Page 31: Operating The P-54X (All Models Except The P-541.T0L)

    6 Starting and Operating INFORMATION Sound and vibration (e.g., footfall, knocks) can be transmitted to the P-54x and can affect its performance with regard to position stability.  Avoid sound and vibration while the P-54x is being operated. Operating the P­54x (All Models Except the P­541.T0L) ...

  • Page 32: Discharging The P-54X

    Before demounting (e.g., before cleaning and transporting the P-54x and for  modifications) The P-54x is discharged via the discharge resistor inside the electronics from PI. Discharging a positioner connected to the electronics In closed-loop operation: 1. Switch off the servo mode on the controller.

  • Page 33: Maintenance

    7 Maintenance Maintenance In this Chapter General Notes on Maintenance ....................29 Cleaning the P-54x ........................29 General Notes on Maintenance NOTICE Misalignment due to loosening screws! The P-54x is maintenance-free and achieves its positioning accuracy as a result of the optimal alignment of mechanical components and piezo actuators.

  • Page 35: Troubleshooting

    8 Troubleshooting Troubleshooting Problem Possible causes Solution No or limited Cable not connected  Check the cable connections. motion correctly Excessive load  Do not exceed the maximum permissible stress and load capacities according to the specifications (p. 35). Zero shift of the sensor for ...
  • Page 36 8 Troubleshooting Problem Possible causes Solution Axes were mixed up during  Pay attention to the assignment of the connection (only with LEMO axes when connecting the positioner to connectors) the controller. This assignment is indicated by labels on the devices. The positioner Servo control parameters 1.

  • Page 37: Customer Service

    9 Customer Service Customer Service For inquiries and orders, contact your PI sales engineer or send us an email (service@pi.de).  If you have any questions concerning your system, provide the following information: − Product and serial numbers of all products in the system Firmware version of the controller (if applicable) −...

  • Page 39: Technical Data

    10 Technical Data Technical Data In this Chapter Specifications ..........................35 Dimensions ..........................40 Torque for Stainless Steel Screws (A2-70) ................... 42 Pin Assignment ..........................42 10.1 Specifications 10.1.1 Data Table P­541.2CD / P­542.2CD / P­541.2DD P­541.2SL P­542.2SL P­541.20L / Unit Tolerance P­541.2CL...
  • Page 40 * With digital controller. With analog controllers, the typical linearity error for direct drive positioners can be up to 0.1 %. The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo nanopositioning systems are free of friction.
  • Page 41 * Parallel kinematics design; the maximum displacement for translation motion and tip/tilt motion cannot be achieved simultaneously. The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo nanopositioning systems are free of friction.

  • Page 42: Maximum Ratings

    10 Technical Data 10.1.2 Maximum Ratings P-54x positioners are designed for the following operating data: Model Maximum operating Maximum operating Maximum power voltage frequency (unloaded) consumption P-541.2DD -20 to 120 V 517 Hz 25 W P-541.2CD -20 to 120 V 85 Hz 12 W P-541.2CL...

  • Page 43: Ambient Conditions And Classifications

    10 Technical Data 10.1.3 Ambient Conditions and Classifications Pay attention to the following ambient conditions and classifications for the P-54x: Area of application For indoor use only Maximum altitude 2000 m Air pressure 1100 hPa to 0.1 hPa Relative humidity Highest relative humidity 80 % for temperatures up to 31 °C Decreasing linearly to 50 % relative humidity at 40 °C Operating temperature...

  • Page 44: Dimensions

    10 Technical Data 10.2 Dimensions Dimensions in mm. Note that the decimal places are separated by a comma in the drawings. Figure 8: P-541.2 / P-542.2 Version: 1.2.0 PZ244E P­54x Nanopositioner...
  • Page 45 10 Technical Data Figure 9: P-541.Z / P-541.T P­54x Nanopositioner PZ244E Version: 1.2.0...

  • Page 46: Torque For Stainless Steel Screws (A2-70)

    10 Technical Data 10.3 Torque for Stainless Steel Screws (A2­70) Screw size Minimum torque Maximum torque 4 Nm 6 Nm 2.5 Nm 3.5 Nm 1.5 Nm 2.5 Nm 0.8 Nm 1.1 Nm M2.5 0.3 Nm 0.4 Nm 0.15 Nm 0.2 Nm M1.6 0.06 Nm 0.12 Nm...
  • Page 47 10 Technical Data Pin assignment for P­54x.2CD/.2DD models: Signal Function A1 inner conductor Output Probe sensor signal, channel 2 (immovable part of the capacitive sensor) A1 outer conductor GND Shielding for probe sensor signal, channel 2 A2 inner conductor --- (not connected) A2 outer conductor --- (not connected)
  • Page 48 10 Technical Data Pin assignment for the P­54x.TCD models: Signal Function A1 inner conductor Output Probe sensor signal, channel 2 (immovable part of the capacitive sensor) A1 outer conductor GND Shielding for probe sensor signal, channel 2 A2 inner conductor Output Probe sensor signal, channel 3 (immovable part of the capacitive sensor) A2 outer conductor GND...
  • Page 49 10 Technical Data D­sub 7W2 connector (m) For P-541.ZCD only: Figure 11: D-sub 7W2 connector (m): Front with connections Figure 12: D-sub connector: Example top view Signal Function Piezo voltage Probe sensor signal (immovable part of the Probe capacitive sensor) Data ID chip Data line for ID chip GND Target and ID chip...
  • Page 50 10 Technical Data LEMO connectors Figure 13: LEMO connector (side view) LEMO connectors according to model (one connector per axis) P­54x Connector Signal Function Connector Model (front view) shell .2CL Inner Input Piezo voltage Ground conductor -20 to 120 V .2SL .20L .ZSL...

  • Page 51: Old Equipment Disposal

    Dispose of your old equipment according to international, national, and local rules and regulations. In order to fulfil its responsibility as the product manufacturer, Physik Instrumente (PI) GmbH & Co. KG undertakes environmentally correct disposal of all old PI equipment made available on the market after 13 August 2005 without charge.

This manual is also suitable for:

P-541.2P-542.2P-541.zP-541.t

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