PI P-611 Series User Manual
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PI P-611 Series User Manual

Positioning systems
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PZ253E
P­611 Positioning Systems
User Manual
Version: 1.1.0
Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany
Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, www.pi.ws
Date: 25.03.2019
This document describes the following products:
P­611.1
Linear piezo positioning system
P-611.1S/.10
P­611.XZ / P­611.2
XZ and XYZ nanopositioner
P-611.2S/.20/.XZS/.XZ0
P­611.3
NanoCube® XYZ system
P-611.3S/.3SF/.3O/.3OF
P­611.Z
Piezo Z stage
P-611.ZS/.Z0
.1S/.10/.2S/.20/.XZS/.XZ0/.ZS/.Z0
= with LEMO connector(s)
.3S/.3SF/.3O/.3OF
= with D-sub connector

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Summary of Contents for PI P-611 Series

  • Page 1  Piezo Z stage P-611.ZS/.Z0 .1S/.10/.2S/.20/.XZS/.XZ0/.ZS/.Z0 = with LEMO connector(s) .3S/.3SF/.3O/.3OF = with D-sub connector Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, www.pi.ws...
  • Page 2 The patents held by PI are found in our patent list: http://www.physikinstrumente.com/en/about-pi/patents © 2019 Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany. The text, photographs and drawings in this manual are protected by copyright. With regard thereto, Physik Instrumente (PI) GmbH & Co. KG retains all the rights.

  • Page 3: Table Of Contents

    Contents About this Document Objective and Target Audience of this User Manual..........1 Symbols and Typographic Conventions..............1 Figures ........................2 Other Applicable Documents ..................2 Downloading Manuals ....................3 Safety Intended Use ......................5 General Safety Instructions ..................6 Organizational Measures ....................
  • Page 4 Maintenance General Notes on Maintenance ................29 Cleaning the P-611 ....................29 Troubleshooting Customer Service Technical Data 10.1 Specifications ......................35 10.1.1 Data Table ....................35 10.1.2 Maximum Ratings ..................39 10.1.3 Ambient Conditions and Classifications ............40 10.2 Dimensions ....................... 41 10.3 Torque for Stainless Steel Screws (A2-70) ..............

  • Page 5: About This Document

    1 About this Document About this Document In this Chapter Objective and Target Audience of this User Manual ..............1 Symbols and Typographic Conventions ..................1 Figures ............................2 Other Applicable Documents ......................2 Downloading Manuals ........................3 Objective and Target Audience of this User Manual This user manual contains the necessary information for the intended use of the P-611 (x stands for the different models (p.

  • Page 6: Figures

    Other Applicable Documents The devices and software tools from PI mentioned in this documentation are described in their own manuals. The latest versions of the user manuals are available for download (p. 3) on our website.

  • Page 7: Downloading Manuals

    1 About this Document Downloading Manuals INFORMATION If a manual is missing or problems occur with downloading:  Contact our customer service department (p. 33). INFORMATION For products that are supplied with software (CD in the scope of delivery), access to the manuals is protected by a password.
  • Page 8 1 About this Document General procedure: 1. Open the website www.pi.ws. 2. If access to the manuals is protected by a password: a) Click Login. b) Log in with the user name and password. 3. Click Search. 4. Enter the product number up to the period (e.g., P-611) or the product family (e.g., NanoCube®) into the search field.

  • Page 9: Safety

    The intended use of the P-611 is only possible in conjunction with suitable electronics (p. 13) available from PI. The electronics are not included in the scope of delivery of the P-611. The electronics must provide the required operating voltages. To ensure proper performance of the servo control system, the electronics must also be able to read out and process the signals from the position sensors.

  • Page 10: General Safety Instructions

     Do not open the P-611.  Discharge the positioner's piezo actuators before installation: Connect the positioner to the switched-off PI controller, which is equipped with an internal discharge resistor.  Do not pull the plug connector out of the electronics during operation.

  • Page 11: Organizational Measures

    2 Safety Mechanical forces can damage or misalign the P-611.  Avoid impacts that affect the P-611.  Do not drop the P-611.  Do not exceed the maximum permissible stress and load capacities according to the specifications (p. 35). ...

  • Page 13: Product Description

    3 Product Description Product Description In this Chapter Model Overview ..........................9 Product View ..........................10 Product Labeling .......................... 12 Scope of Delivery ......................... 12 Suitable Electronics ........................13 Accessories ........................... 13 Technical Features ........................13 Model Overview The following standard versions of the P-611 are available: P­611.1: Linear piezo positioning system Model Description...

  • Page 14: Product View

    3 Product Description P­611.3: NanoCube® XYZ system Model Description P-611.3S NanoCube® XYZ nanopositioning system, 100 µm × 100 µm × 100 µm, strain gauge sensors P-611.3SF NanoCube® XYZ nanopositioning system, 100 µm × 100 µm × 100 µm, strain gauge sensors, integrated fiber holder P-611.3O NanoCube®...
  • Page 15 3 Product Description Direction of motion of the P­611 The arrows indicate the positive direction of motion in each case. P-611.1x P-611.Zx P-611.2x P-611.XZx P-611.3x / P-611.3xF P­611 Positioning Systems PZ253E Version: 1.1.0...

  • Page 16: Product Labeling

    Brand name (.3x and .3xF models only) Country of origin: Germany Country of origin Warning sign "Pay attention to the manual!" Old equipment disposal (p. 51) WWW.PI.WS Manufacturer's address (website) Manufacturer's logo CE conformity mark Symbol for the protective earth conductor, marks the protective earth connection of the P-611 (p.

  • Page 17: Suitable Electronics

    3 Product Description Suitable Electronics You need suitable electronics to operate a P-611. Selecting the device depends on the application and the connectors available. Electronics Connector* Channels** E-505 Piezo Amplifier Module LEMO E-610 Piezo Amplifier / Servo Controller (OEM module) LEMO E-836 Piezo Amplifier LEMO E-503 Piezo Amplifier Module...

  • Page 18: Flexure Guides

    3 Product Description 3.7.2 Flexure Guides P-611 positioners have flexure guides for friction-free motion and high guiding accuracy. A flexure guide is an element that is free of static and sliding friction. It is based on the elastic deformation (bending) of a solid (e.g., steel) and does not have any rolling or sliding parts. Flexure elements have a high stiffness and load capacity.

  • Page 19: Unpacking

    2. Compare the contents of the shipment with the items listed in the contract and the delivery note. 3. Inspect the contents for signs of damage. If there is any sign of damage or missing parts, contact PI immediately. 4. Keep all packaging materials in case the product needs to be returned. P­611 Positioning Systems PZ253E Version: 1.1.0...
  • Page 20 4 Unpacking Version: 1.1.0 PZ253E P­611 Positioning Systems...

  • Page 21: Installation

     Do not open the P-611.  Discharge the positioner's piezo actuators before installation: Connect the positioner to the switched-off PI controller, which is equipped with an internal discharge resistor.  Do not pull the plug connector out of the electronics during operation.

  • Page 22: Connecting The P-611 To The Protective Earth Conductor

    NOTICE Damage due to unsuitable cables! Unsuitable cables can damage the P-611 and the electronics.  Use cables provided by PI only to connect the P-611 to the electronics. NOTICE Damage due to improper mounting! Improper mounting of the P-611 or incorrectly mounted parts can damage the P-611.
  • Page 23 5 Installation Requirements  You have read and understood the general notes on installation (p. 17).  The positioner is not connected to the electronics. Tools and accessories Suitable protective earth conductor: Cable cross section ≥ 0.75 mm  M4 protective earth screw set (p. 12) supplied for connecting the protective earth ...

  • Page 24: Mounting The P-611

    5 Installation Mounting the P­611 NOTICE Warping of the P­611 when mounted on uneven surfaces! The P-611 could warp if mounted on an uneven surface. Warping reduces the accuracy.  Mount the P-611 onto an even surface. The recommended flatness of the surface is ≤20 µm.
  • Page 25 5 Installation Figure 6: P-611.XZx, .3x, .3xF, and .Zx: One of four recesses in the base body for mounting the positioner onto an underlying surface Requirements  You have read and understood the general notes on installation (p. 17). Tools and accessories When mounting a P-611.2x: ...

  • Page 26: Fixing The Load

    5 Installation Fixing the Load NOTICE Mechanical overload due to high torques and high loads! When affixing the load, high torques and high loads can overload the motion platform of the P-611. Mechanical overload can cause damage to the piezo actuators, sensors, and flexures of the P-611 and lead to loss in accuracy.
  • Page 27 5 Installation INFORMATION Positive direction of axis motion is specified in the product view (p. 10). Center of load at the optimum position: Figure 7: Example of an optimally placed load Center of load at an unsuitable position: Figure 8: Tall load and center of load too far above the motion platform Figure 9: Unwanted lever effect and center of load on the side of the motion platform...
  • Page 28 5 Installation Tools and accessories Screws of suitable size and length (p. 41)  Suitable tools  Fixing the load  Fix loads only by inserting suitable screws into the threaded holes (p. 41) provided. Pay attention to the torque range (p. 48) specified for the screws, and avoid torques >50 Ncm on the motion platform.

  • Page 29: Startup And Operation

    6 Startup and Operation Startup and Operation In this Chapter General Notes on Startup and Operation ..................25 Operating the P-611 ........................26 Discharging the P-611 ........................27 General Notes on Startup and Operation CAUTION Risk of electric shock if the protective earth conductor is not connected! If a protective earth conductor is not or not properly connected, dangerous touch voltages can occur on the P-611 in the case of malfunction or failure of the system.

  • Page 30: Operating The P-611

    Operating voltages that are too high or incorrectly connected can cause damage to the P-611.  Operate the P-611 only with controllers/drivers and original accessories from PI.  Do not exceed the operating voltage range (p. 39) for which the P-611 is specified.

  • Page 31: Discharging The P-611

    Before demounting (e.g., before cleaning and transporting the P-611 and for  modifications) The P-611 is discharged via the internal discharge resistor of the controller from PI. Discharging a positioner connected to the controller In closed-loop operation: 1. Switch off the servo mode on the controller.

  • Page 33: Maintenance

    7 Maintenance Maintenance In this Chapter General Notes on Maintenance ....................29 Cleaning the P-611 ........................29 General Notes on Maintenance NOTICE Misalignment due to loosening screws! The P-611 is maintenance-free and achieves its positioning accuracy as a result of the optimum alignment of mechanical components and piezo actuators.

  • Page 35: Troubleshooting

    8 Troubleshooting Troubleshooting Problem Possible causes Solution No or limited Cable not connected  Check the cable connections. motion correctly Excessive load  Do not exceed the maximum permissible stress and load capacities according to the specifications (p. 35). Zero shift of the sensor for ...
  • Page 36 8 Troubleshooting Problem Possible causes Solution Axes were mixed up during  Pay attention to the assignment of the connection (only with LEMO axes when connecting the positioner to connectors) the controller. This assignment is indicated by labels on the devices. The positioner is not ...

  • Page 37: Customer Service

    9 Customer Service Customer Service For inquiries and orders, contact your PI sales engineer or send us an email (service@pi.de).  If you have any questions concerning your system, provide the following information: − Product and serial numbers of all products in the system −...

  • Page 39: Technical Data

    10 Technical Data Technical Data In this Chapter Specifications ..........................35 Dimensions ..........................41 Torque for Stainless Steel Screws (A2-70) ................... 48 Pin Assignment ..........................48 10.1 Specifications 10.1.1 Data Table P­611.1S P­611.10 Unit Tolerance Active axes Motion and positioning Integrated sensor Travel range at -20 to +120 V, open loop µm...
  • Page 40 E-621, E-625, E-665, E-836 E-836 The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo nanopositioning systems are free of friction. All specifications based on room temperature (22 °C ±3 °C).
  • Page 41 E-727 E-727 E-727 The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo nanopositioning systems are free of friction. All specifications based on room temperature (22 °C ±3 °C).
  • Page 42 E-664, E-727 E-664, E-727 The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo nanopositioning systems are free of friction. Adapter cables with LEMO connectors for sensor and operating voltage available.

  • Page 43: Maximum Ratings

    E-610, E-625, E-665, E-836 E-836 The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo nanopositioning systems are free of friction. All specifications based on room temperature (22 °C ±3 °C).

  • Page 44: Ambient Conditions And Classifications

    10 Technical Data 10.1.3 Ambient Conditions and Classifications Pay attention to the following ambient conditions and classifications for the P-611: Area of application For indoor use only Maximum altitude 2000 m Air pressure 1100 hPa to 0.1 hPa Relative humidity Highest relative humidity 80 % for temperatures up to 31 °C Decreasing linearly to 50 % relative humidity at 40 °C Operating temperature...

  • Page 45: Dimensions

    10 Technical Data 10.2 Dimensions Dimensions in mm. Note that a comma is used in the drawings instead of a decimal point. Figure 10: P-611.1S P­611 Positioning Systems PZ253E Version: 1.1.0...
  • Page 46 10 Technical Data Figure 11: P-611.10 Version: 1.1.0 PZ253E P­611 Positioning Systems...
  • Page 47 10 Technical Data Figure 12: P-611.2S and P-611.20 P­611 Positioning Systems PZ253E Version: 1.1.0...
  • Page 48 10 Technical Data Figure 13: P-611.XZS and P-611.XZ0 Version: 1.1.0 PZ253E P­611 Positioning Systems...
  • Page 49 10 Technical Data Figure 14: P-611.3O, P-611.3S, P-611.3OF and P-611.3SF P-611.3O 38.2 37.8 43.2 P-611.3S 38.2 37.8 43.2 P-611.3OF 38.2 37.8 44.2 P-611.3SF 44.2 P­611 Positioning Systems PZ253E Version: 1.1.0...
  • Page 50 10 Technical Data Figure 15: P-611.ZS Version: 1.1.0 PZ253E P­611 Positioning Systems...
  • Page 51 10 Technical Data Figure 16: P-611.Z0 P­611 Positioning Systems PZ253E Version: 1.1.0...

  • Page 52: Torque For Stainless Steel Screws (A2-70)

    10 Technical Data 10.3 Torque for Stainless Steel Screws (A2­70) Screw size Minimum torque Maximum torque 4 Nm 6 Nm 2.5 Nm 3.5 Nm 1.5 Nm 2.5 Nm 0.8 Nm 1.1 Nm M2.5 0.3 Nm 0.4 Nm 0.15 Nm 0.2 Nm M1.6 0.06 Nm 0.12 Nm...
  • Page 53 10 Technical Data Signal Function Output SGS 3-B2 sensor signal SGS 3 GND Output SGS 2-B2 sensor signal SGS 2 GND Output SGS 1-B2 sensor signal SGS 1 GND 20 to 22 Free Input Piezo voltage –, channel 3 Input Piezo voltage –, channel 2 Input Piezo voltage –, channel 1...
  • Page 54 10 Technical Data LEMO connectors Only for P-611.1S/.10/.2S/.20/.XZS/.XZ0/.ZS/.Z0 Figure 18: LEMO connector (side view) LEMO connectors according to model (one connector per axis) P­611 Connector Signal Function Connector model (front shell view) .1S / .10 Inner Input Piezo voltage Ground .2S / .20 connecto –20 to 120 V...

  • Page 55: Old Equipment Disposal

    Dispose of your old equipment according to international, national, and local rules and regulations. In order to fulfil its responsibility as the product manufacturer, Physik Instrumente (PI) GmbH & Co. KG undertakes environmentally correct disposal of all old PI equipment made available on the market after 13 August 2005 without charge.

  • Page 57: Eu Declaration Of Conformity

    12 EU Declaration of Conformity EU Declaration of Conformity For the P-611, an EU Declaration of Conformity has been issued in accordance with the following European directives: Low Voltage Directive EMC Directive RoHS Directive The applied standards certifying the conformity are listed below. Safety (Low Voltage Directive): EN 61010-1 EMC: EN 61326-1 RoHS: EN 50581...

This manual is also suitable for:

P-611.1sP-611.1P-611.xzP-611.10P-611.2P-611.2s ... Show all

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