Pin Assignment - PI P­73 Series User Manual

10 Technical Data
10.4

Pin Assignment

D­sub 25W3 connector (m)
For P-73x.2CD/.2DD/.3CD/.3DD only:
Figure 15:
Pin
A1 inner conductor Output
A1 outer conductor GND
A2 inner conductor Output
A2 outer conductor GND
A3 inner conductor Output
A3 outer conductor GND
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
P­73x Nanopositioner
D-sub 25W3 connector (m): Front with connections
Signal
Input
Input
GND
Bidirectional
Free
Free
Input
Input
Input
Input
Input
GND
GND
Free
Free
Free
Function
Probe sensor signal, channel 2
(immovable part of the capacitive sensor)
Shield of Probe sensor signal, channel 2
Probe sensor signal, channel 3
(immovable part of the capacitive sensor)
Shield of Probe sensor signal, channel 3
Probe sensor signal, channel 1
(immovable part of the capacitive sensor)
Shield of Probe sensor signal, channel 1
Target sensor signal, channel 2
(movable part of the capacitive sensor)
Target sensor signal, channel 3
(movable part of the capacitive sensor)
Ground of ID chip
Data line for ID chip
–
–
Piezo voltage +, channel 4
Piezo voltage +, channel 3
Piezo voltage +, channel 2
Piezo voltage +, channel 1
Target sensor signal, channel 1
(movable part of the capacitive sensor)
Shield of Target sensor signal, channel 2
Shield of Target sensor signal, channel 3
–
–
–
PZ103E Version: 1.1.0 49