Xyz Nanopositioner; Xyz Nanopositioner With Direct Drive; Nanopositioner Z Stage - PI P­73 Series User Manual

3 Product Description
3.1.3

XYZ Nanopositioner

Model
P-733.3CD
P-733.3CL
3.1.4

XYZ Nanopositioner with Direct Drive

Model
P-733.3DD
3.1.5

Nanopositioner Z Stage

Model
P-733.ZCD
P-733.ZCL
10 Version: 1.1.0
Description
Precision XYZ nanopositioner, 100 µm × 100 µm × 10 µm, capacitive
sensors, parallel metrology, D-sub connector
Precision XYZ nanopositioner, 100 µm × 100 µm × 10 µm, capacitive
sensors, parallel metrology, LEMO connectors
Description
High dynamics, precision XYZ nanopositioner, 30 µm × 30 µm × 10 µm,
direct drive, capacitive sensors, parallel metrology, D-sub connector
Description
Compact, precision nanopositioner Z stage, 100 µm, capacitive sensor,
D-sub connector
Compact, precision nanopositioner Z stage, 100 µm, capacitive sensor,
LEMO connectors
PZ103E P­73x Nanopositioner