Table of Contents
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Contents
1
1.1
Objective and Target Group of this User Manual ...................................................... 1
1.2
Symbols and Typographic Conventions...................................................................... 1
1.3
Definition of Terms ..................................................................................................... 2
1.4
Figures ........................................................................................................................ 2
1.5
Other Applicable Documents ..................................................................................... 2
1.6
Downloading Manuals ................................................................................................ 3
2
2.1
Intended Use .............................................................................................................. 5
2.2
General Safety Instructions ........................................................................................ 5
2.3
Organizational Measures ............................................................................................ 7
3
3.1
Model Overview ......................................................................................................... 9
3.1.1
XY Nanopositioner ......................................................................................... 9
3.1.2
XY Nanopositioner with Direct Drive ............................................................. 9
3.1.3
XYZ Nanopositioner ..................................................................................... 10
3.1.4
XYZ Nanopositioner with Direct Drive ......................................................... 10
3.1.5
Nanopositioner Z Stage ............................................................................... 10
3.2
Product View ............................................................................................................ 11
3.3
Product Labeling ....................................................................................................... 12
3.4
Scope of Delivery ...................................................................................................... 13
3.5
Suitable Electronics .................................................................................................. 13
3.6
Accessories ............................................................................................................... 14
3.6.1
Adapter Plates ............................................................................................. 14
3.7
Technical Features .................................................................................................... 15
3.7.1
PICMA® Piezo Actuators .............................................................................. 15
3.7.2
Flexure Guides ............................................................................................. 15
3.7.3
Capacitive Sensors ....................................................................................... 15
3.7.4
ID Chip (Models with D-sub Connector Only).............................................. 15
4
5
5.1
General Notes on Installation ................................................................................... 19
5.2
Connecting the P-73x to the Protective Earth Conductor ........................................ 20
5.3
Mounting the P-73x .................................................................................................. 22
1
5
9
17
19
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Table of Contents
