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Summary of Contents for Aerotech AGR50
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Page 1: Agr Gear-Driven Rotary Stage
AGR Gear-Driven Rotary Stage HARDWARE MANUAL Revision 2.00... - Page 2 Global Technical Support Portal for information and support about your Aerotech, Inc. products. The website supplies software, product manuals, Help files, training schedules, and PC-to-PC remote technical support. If necessary, you can complete Product Return (RMA) forms and get information about repairs and spare or replacement parts.
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Page 3: Table Of Contents
3.4. Limits, Marker, and Machine Direction 3.5. Motor and Feedback Phasing Chapter 4: Maintenance 4.1. Service and Inspection Schedule 4.2. Cleaning and Lubrication 4.3. Motor Mounting 4.4. Troubleshooting Appendix A: Warranty and Field Service Appendix B: Revision History Index www.aerotech.com... -
Page 4: List Of Figures
Figure 2-15: AGR150 Cantilevered Load Capabilities Figure 2-16: AGR200 Cantilevered Load Capabilities Figure 3-1: Brushless Motor and Feedback Wiring (AGR50, AGR75, AGR100, AGR150) Figure 3-2: Brushless Motor and Feedback Wiring (AGR200) Figure 3-3: Stepper Motor and Feedback Wiring Figure 3-4:... -
Page 5: List Of Tables
Table 2-2: Stage to Mounting Surface Hardware Table 2-3: Mounting Interface Flatness Requirement Table 3-1: Brushless Motor Connector Pinout (AGR50, AGR75, AGR100, AGR150) Table 3-2: Mating Connector Part Numbers for D-Style Motor Connectors Table 3-3: Brushless Motor Connector Pinout (AGR200) -
Page 6: Eu Declaration Of Incorporation
Hardware Manual EU Declaration of Incorporation Manufacturer Aerotech, Inc. 101 Zeta Drive Pittsburgh, PA 15238-2811 herewith declares that the product: AGR stage is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006/42/EC as amended; and that the following harmonized European standards have been applied:... -
Page 7: Ukca Declaration Of Incorporation
Hardware Manual UKCA Declaration of Incorporation Manufacturer Aerotech, Inc. 101 Zeta Drive Pittsburgh, PA 15238-2811 herewith declares that the product: AGR stage To which this declaration relates, meets the essential health and safety requirements and is in conformity with the relevant UK Legislation listed below:... -
Page 8: Safety Procedures And Warnings
To find the newest information about this product, refer to www.aerotech.com. If you do not understand the information in this manual, contact Aerotech Global Technical Support. IMPORTANT: This product has been designed for light industrial manufacturing or laboratory environments. -
Page 9: Installation And Operation
Use care when you move the stage or you could negatively affect the performance of WARNING: Trip Hazard! Route, house, and secure all cables, duct work, air, or water lines. Failure to do so could introduce trip hazards around the system that could result in physical injury or could damage the equipment. www.aerotech.com... -
Page 10: Electrical Warnings
It is the responsibility of the End User/System Integrator to make sure that stages are properly connected and grounded per Engineering Standards and applicable safety requirements. It is the responsibility of the End User/System Integrator to configure the system drive or controller within the Aerotech motor/stage electrical and mechanical specifications. www.aerotech.com... -
Page 11: Motor-Related Warnings
Hardware Manual Motor-Related Warnings Aerotech motors are capable of producing high forces and velocities. Obey all warnings and all applicable codes and standards when you use or operate a stage or system that incorporates Aerotech motors. DANGER: Mechanical Hazard! Personnel must be made aware of the mechanical hazards during set up or when you do service to the stage. -
Page 12: Pinch Points
(during normal operation, for example). when the system is moved manually (during the installation process or when you do maintenance, for example). Motors are capable of very high speeds and acceleration rates. Figure 1: Typical Pinch Point Locations www.aerotech.com... -
Page 13: Handling And Storage
Carefully remove the stage from its protective shipping container. Lift this product only by the base. For multi-axis assemblies, always lift the system by the lower axis. Use a cart, dolly, or similar device to move the stage to a new location. www.aerotech.com... - Page 14 Before you operate the stage, let it stabilize at room temperature for at least 12 hours. This will ensure that all of the alignments, preloads, and tolerances are the same as they were when they were tested at Aerotech. Shipping Brackets If the AGR has shipped as part of a system, shipping brackets (typically red, anodized aluminum) might have been installed to secure the system prior to shipment.
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Page 15: Chapter 1: Overview
BMS60 brushless motor and 1000-line 1 Vp-p sine-wave encoder (AGR100, AGR150) BMS280 brushless motor and 1000-line 1 Vp-p sine-wave encoder (AGR200) BMS35 brushless motor and 1000-line 1 Vp-p sine-wave encoder with brake (AGR50, AGR75) BMS60 brushless motor and 1000-line 1 Vp-p sine-wave encoder with brake (AGR100, AGR150) - Page 16 Universal English/metric mounting plate -MP2 Metric mounting plate, side mounting option Seals (Optional) (refer to Figure 1-5) -SL1 Labyrinth seal Metrology (Required) -PL0 No metrology performance plots -PL1 Metrology, uncalibrated with performance plots -PL2 Metrology, calibrated (HALAR) with performance plots www.aerotech.com...
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Page 17: Figure 1-1: Standard Features
Hardware Manual Figure 1-1: Standard Features Figure 1-2: Motor Location Options Figure 1-3: Motor Orientation Options www.aerotech.com... -
Page 18: Figure 1-4: Encoder Option
Hardware Manual Figure 1-4: Encoder Option Figure 1-5: Seal Option Figure 1-6: Stage Accessories Figure 1-7: No Motor Option www.aerotech.com... -
Page 19: Environmental Specifications
Indoor use only 1.2. Accuracy and Temperature Effects Aerotech products are designed for and built in a 20°C (68°F) environment. Temperature changes could cause a decrease in performance or permanent damage to the stage. At a minimum, the environmental temperature must be controlled to within 0.25ºC per 24 hours to ensure the stage specifications are repeatable over an extended period of time. -
Page 20: Basic Specifications
(1) Direct encoder repeatability specifications are for systems using the -E1 or -E3 direct encoder options only. (2) Requires the use of an Aerotech controller. Consult factory if using a third-party controller. (3) Maximum speed is load dependent. Contact an Aerotech Application Engineer if imbalanced loads are present. (4) Unloaded acceleration. -
Page 21: Table 1-4: Agr Series Specifications (Agr150 And Agr200)
(1) Direct encoder repeatability specifications are for systems using the -E1 or -E3 direct encoder options only. (2) Requires the use of an Aerotech controller. Consult factory if using a third-party controller. (3) Maximum speed is load dependent. Contact an Aerotech Application Engineer if imbalanced loads are present. (4) Unloaded acceleration. -
Page 22: Vacuum Operation
Hardware Manual 1.4. Vacuum Operation Vacuum option preparations are available as special orders. Contact Aerotech for more information. There are two vacuum preparation options: Low Vacuum (for use in atmospheric pressures down to 10 Torr) High Vacuum (preparation for environments from 10 Torr down to 10 Torr). -
Page 23: Chapter 2: Installation
Chapter 2: Installation The stage installation must be in accordance with the instructions provided by this manual and any accompanying documentation. Failure to follow these instructions could result in injury or damage to the equipment. 2.1. Dimensions Figure 2-1: AGR50 Dimensions www.aerotech.com... -
Page 24: Figure 2-2: Agr50 Accessories Dimensions
Hardware Manual Figure 2-2: AGR50 Accessories Dimensions www.aerotech.com... -
Page 25: Figure 2-3: Agr75 Dimensions
Hardware Manual Figure 2-3: AGR75 Dimensions www.aerotech.com... -
Page 26: Figure 2-4: Agr75 Accessories Dimensions
Hardware Manual Figure 2-4: AGR75 Accessories Dimensions www.aerotech.com... -
Page 27: Figure 2-5: Agr100 Dimensions
Hardware Manual Figure 2-5: AGR100 Dimensions www.aerotech.com... -
Page 28: Figure 2-6: Agr100 Accessories Dimensions
Hardware Manual Figure 2-6: AGR100 Accessories Dimensions www.aerotech.com... -
Page 29: Figure 2-7: Agr150 Dimensions
Hardware Manual Figure 2-7: AGR150 Dimensions www.aerotech.com... -
Page 30: Figure 2-8: Agr150 Accessories Dimensions
Hardware Manual Figure 2-8: AGR150 Accessories Dimensions www.aerotech.com... -
Page 31: Figure 2-9: Agr200 Dimensions
Hardware Manual Figure 2-9: AGR200 Dimensions www.aerotech.com... -
Page 32: Figure 2-10: Agr200 Accessories Dimensions
Hardware Manual Figure 2-10: AGR200 Accessories Dimensions www.aerotech.com... -
Page 33: Securing The Stage To The Mounting Surface
Refer to Section 2.1. for specific model mounting locations and dimensions. Table 2-2: Stage to Mounting Surface Hardware Mounting Hardware Typical Screw Torque M5 SHCS 4.1 N·m M6 SHCS 7.0 N·m M8 SHCS 17.0 N·m www.aerotech.com... -
Page 34: Figure 2-11: Stage Mounting Holes
Hardware Manual Figure 2-11: Stage Mounting Holes www.aerotech.com... -
Page 35: Attaching The Payload Or Fixturing To The Stage
If you start the AGR without a payload, the servo gains provided by Aerotech with the shipment may not be appropriate and servo instability can occur. Refer to the controller help file for tuning assistance. -
Page 36: Figure 2-12: Agr50 Cantilevered Load Capabilities
Hardware Manual Figure 2-12: AGR50 Cantilevered Load Capabilities Figure 2-13: AGR75 Cantilevered Load Capabilities www.aerotech.com... -
Page 37: Figure 2-14: Agr100 Cantilevered Load Capabilities
Hardware Manual Figure 2-14: AGR100 Cantilevered Load Capabilities Figure 2-15: AGR150 Cantilevered Load Capabilities www.aerotech.com... -
Page 38: Figure 2-16: Agr200 Cantilevered Load Capabilities
Hardware Manual Figure 2-16: AGR200 Cantilevered Load Capabilities www.aerotech.com... -
Page 39: Chapter 3: Electrical Installation
Aerotech motion control systems are adjusted at the factory for optimum performance. When the AGR is part of a complete Aerotech motion control system, setup should only require that you connect the stage to the appropriate drive chassis with the cables provided. Labels on the system components should indicate the appropriate connections. -
Page 40: Motor And Feedback Connectors
Stages equipped with standard motors and encoders come from the factory completely wired and assembled. IMPORTANT: Refer to the other documentation accompanying your Aerotech equipment. Call your Aerotech representative if there are any questions on system configuration. IMPORTANT: If you are using standard Aerotech motors and cables, motor and encoder connection adjustments are not required. -
Page 41: Table 3-3: Brushless Motor Connector Pinout (Agr200)
Motor Phase C Frame Ground (motor protective ground) Backshell Motor Cable Shield P/N: MS3101A18-10P Table 3-4: Mating Connector Part Numbers for MS-Style Motor Connectors Mating Connector Aerotech P/N Third Party P/N Plug MCM00475 Amphenol MS3106A18 Insert MCM00495 Amphenol 9718-10S Bushing... -
Page 42: Table 3-7: Feedback Connector Pinout (Agr50, Agr75, Agr100, Agr150)
Hardware Manual Table 3-7: Feedback Connector Pinout (AGR50, AGR75, AGR100, AGR150) Description Connector Case Shield Connection Reserved BMS Motors: Over-Temperature Thermistor Sensor BM Motors: Reserved 5V Power Supply Input Reserved Hall Effect Sensor (Phase B) MRK- (Encoder Marker-) MRK+ (Encoder Marker+) Reserved... -
Page 43: Table 3-9: Feedback Connector Pinout (Agr200)
Brake + (with Brake Option) Reserved Brake - (with Brake Option) (1) 24 VDC @ 1 A max Table 3-10: Mating Connector Part Numbers for MS-Style Feedback Connectors Mating Connector Aerotech P/N Third Party P/N Plug MCM00454 Amphenol MS3106A-20 Insert MCM00464... -
Page 44: Table 3-11: Stepper Motor Feedback Connector Pinout
5V Power Supply Input SIN+ (Encoder Sine+) SIN- (Encoder Sine-) Reserved Common Common Reserved Reserved Reserved Reserved Table 3-12: Mating Connector Part Numbers for D-Style Feedback Connectors Mating Connector Aerotech P/N Third Party P/N 25-Socket D-Connector ECK00300 FCI DB25S064TLF Backshell ECK00656 Amphenol 17E-1726-2 www.aerotech.com... -
Page 45: Motor And Feedback Wiring
Hardware Manual 3.2. Motor and Feedback Wiring Shielded cables are required for the motor and feedback connections. Figure 3-1: Brushless Motor and Feedback Wiring (AGR50, AGR75, AGR100, AGR150) www.aerotech.com... -
Page 46: Figure 3-2: Brushless Motor And Feedback Wiring (Agr200)
Hardware Manual Figure 3-2: Brushless Motor and Feedback Wiring (AGR200) www.aerotech.com... -
Page 47: Figure 3-3: Stepper Motor And Feedback Wiring
Hardware Manual Figure 3-3: Stepper Motor and Feedback Wiring www.aerotech.com... -
Page 48: Motor And Feedback Specifications
Requires external pull-up to +5 V (10 kΩ recommended) Table 3-16: Brake Specifications Specification Supply Voltage 24 VDC 250 mA Typical (AGR50, AGR75, AGR100, AGR150, AGR200) Supply Current 500 mA Typical (AGR200) (1) Required to release the brake and allow motion. www.aerotech.com... -
Page 49: Table 3-17: Encoder Specifications
; Digital (RS422): MRK+, MRK- signals. pk-pk Output Signals (-E2, - Digital Output (Incremental Encoder): TTL Encoder line-driver signals; RS422/485 compatible Table 3-18: Encoder Resolution Model AGR50 AGR75 6.353 arc sec/line 4.836 arc sec/line BMS (TTL) 3.176 arc sec/line 2.418 arc sec/line BM (TTL) 2.541 arc sec/line... -
Page 50: Table 3-19: Bms35 And Bms60 Motor Specifications
(2) Values shown at 75 °C rise above a 25 °C ambient temperature, with housed motor mounted to a 250 mm x 250 mm x 6 mm aluminum heat sink. (3) Peak torque assumes correct rms current; consult Aerotech. (4) Torque constant and motor constant specified at stall. -
Page 51: Table 3-20: Bms280 Motor Specifications
(2) Values shown at 75 °C rise above a 25 °C ambient temperature, with housed motor mounted to a 250 mm x 250 mm x 6 mm aluminum heat sink. (3) Peak torque assumes correct rms current; consult Aerotech. (4) Torque constant and motor constant specified at stall. -
Page 52: Table 3-21: Bm24 And Bm75 Motor Specifications
(4) Values shown at 75 °C rise above a 25 °C ambient temperature, with housed motor mounted to a 250 mm x 250 mm x 6 mm aluminum heat sink. (5) Peak torque assumes correct rms current; consult Aerotech. (6) Torque constant and motor constant specified at stall. -
Page 53: Table 3-22: Bm250 Motor Specifications
(3) Values shown at 130 °C rise above a 25 °C ambient temperature, with housed motor mounted to a 305 mm x 305 mm x 12.7 mm aluminum heat sink. (4) Peak torque assumes correct rms current; consult Aerotech. (5) Torque constant and motor constant specified at stall. -
Page 54: Table 3-23: Sm35 Stepper Motor Specifications
Maximum Voltage Across the Motor 160 V 2.70E-04 kg·m Mechanical Rotor Inertia (0.038 oz·in·s Full Step Angle 1.8° Accuracy ±0.09° Maximum Radial Load 22.5 kg (50 lb) Maximum Thrust Load 6.1 kg (14 lb) Weight 3.8 kg (8.4 lb) www.aerotech.com... -
Page 55: Limits, Marker, And Machine Direction
Hardware Manual 3.4. Limits, Marker, and Machine Direction Aerotech stages are configured to have positive and negative "machine" directions. The machine direction defines the phasing of the feedback and motor signals and is dictated by the stage wiring (refer to Section 3.2.). -
Page 56: Figure 3-5: Limit Flag Locations
To make adjustments to the limits, remove the two covers and, if applicable, the tabletop (- TTx option). When you reinstall the covers (and tabletop), make sure that there is no contact between the covers and the stage shaft. Figure 3-5: Limit Flag Locations www.aerotech.com... -
Page 57: Motor And Feedback Phasing
Hardware Manual 3.5. Motor and Feedback Phasing Motor phase voltage is measured relative to the virtual wye common point. Figure 3-6: Hall Phasing Diagram www.aerotech.com... -
Page 58: Figure 3-7: Encoder Phasing Reference Diagram (Standard/Square Wave)
Hardware Manual Figure 3-7: Encoder Phasing Reference Diagram (Standard/Square Wave) Figure 3-8: Encoder Phasing Reference Diagram (Analog/Sine Wave) www.aerotech.com... -
Page 59: Chapter 4: Maintenance
Visually inspect the stage and cables. Re-tighten loose connectors. Replace or repair damaged cables. Clean the AGR and any components and cables as needed. Repair any damage before operating the AGR. Inspect and perform an operational check on all safeguards and protective devices. www.aerotech.com... -
Page 60: Cleaning And Lubrication
4. We recommend that you do not disassemble the stage beyond the instructions given in this manual. Proper assembly and calibration can only be done at the factory. Contact Aerotech for more information. -
Page 61: Figure 4-1: View Of The Current Draw Before And After Lubrication (Typical)
AGR stage. With the added lubricant the resulting current pull is much smoother, leading to much better mechanical performance and maximum life of the product. Figure 4-1: View of the Current Draw Before and After Lubrication (Typical) www.aerotech.com... -
Page 62: Motor Mounting
4-2). Loctite products are printed with an expiration date. Before use, be sure that the expiration date is legible and the product has not expired. If your stage is used in a vacuum or cleanroom environment, contact Aerotech. Figure 4-2: Motor Mounting Overview www.aerotech.com... -
Page 63: Figure 4-3: Attach The Coupling Adapter To The Motor Shaft
6. Attach the Motor to the Stage in the correct orientation (Figure 4-4). Use a hex wrench to ensure that the motor flange is fully seated and the hardware is tight. The motor housing prevents the use of a torque wrench. Figure 4-4: Attach the Motor the Stage www.aerotech.com... -
Page 64: Figure 4-5: Tighten The Shaft Coupling To The Drive Screw
Figure 4-5: Tighten the Shaft Coupling to the Drive Screw IMPORTANT: You must reapply Loctite to the mounting hardware if the Motor or Shaft Coupling screws are removed, adjusted, loosened, or replaced. www.aerotech.com... -
Page 65: Troubleshooting
Access to the motor coupling is provided by removing half of the split top option has been cover that is directly above the rotary motor (refer to Figure 1-1 for locations selected or for of the coupling access holes). motor service www.aerotech.com... - Page 66 Hardware Manual This page intentionally left blank. www.aerotech.com...
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Page 67: Appendix A: Warranty And Field Service
All Other Repairs - After Aerotech's evaluation, the buyer shall be notified of the repair cost. At such time the buyer must issue a valid purchase order to cover the cost of the repair and freight, or authorize the product(s) to be shipped back as is, at the buyer's expense. - Page 68 Aerotech's approval. On-site Warranty Repair If an Aerotech product cannot be made functional by telephone assistance or by sending and having the customer install replacement parts, and cannot be returned to the Aerotech service center for...
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Page 69: Appendix B: Revision History
Revision General Information Product update Updated safety information 2.00 Updated EU Declaration of Incorporation Added UKCA Declaration of Incorporation 1.06 1.05 1.04 Revision changes have been archived. If you need a copy of this revision, contact 1.03 Aerotech Global Technical Support. 1.02 1.01 1.00 www.aerotech.com... - Page 70 Hardware Manual This page intentionally left blank. www.aerotech.com...
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Page 71: Index
Dimensions part number Directive 2006/42/EC Possible Cause Protection Rating protective ground connection Electrical Installation Electrical Warnings EN 60204-1 2010 red, anodized aluminum EN ISO 12100 2010 Encoder Specifications EU 2015/863 serial number shims shipping brackets grease shipping clamps www.aerotech.com... - Page 72 Specifications Brake Encoder Hall-Effect Sensors Limit Switch Thermistor Specifications stabilizing stage stage distortion stabilizing Storage Symptom Table of Contents Temperature Effects Thermistor Specifications Troubleshooting vacuum guidelines vacuum lubricant (Braycote 602EF) Vacuum Operation Vibration Warnings Warranty and Field Service www.aerotech.com...