7.5 Multi-film Carrier MFC10AY (Optional)
7.5.6 Mask Table Slider Position Sensor (D486) Replacement
Removal
1. Remove the CYB circuit board cover
.
(See Subsection 7.5.1)
2. Disconnect the CYB4 connector.
3. Remove the screw and then the sensor bracket
assembly.
4. Remove the screw and then the cover.
5. Remove the screw and then the sensor from the
bracket.
6. Disconnect the connector from the sensor.
Installation
Installation is essentially in the reverse order of
removal.
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Connector
7-85
CYB4 Connector
Sensor Bracket Assembly
Cover
Screw
Sensor (D486)
Screw
7
Screw
Z2406
Z2407
Z2408