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Keysight Technologies B1500A Self-Paced Training Manual page 176

Semiconductor device analyzer
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Module 5
SPGU Control and Applications
Vth must be measured after writing or erasing. To perform the Vth measurement, all of the
selector/ASU channels must make the path to the SMU. Vth is measured at each decade, so a
mechanical relay will be used, not the solid state relay. The mechanical relay has low leakage
specifications to better match the capabilities of the SMUs.
5-28

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