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Keysight Technologies B1500A Self-Paced Training Manual page 112

Semiconductor device analyzer
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Module 3
Low Current Measurement
With lid closed, you should see this typical response using the IDVG setup data. If the subthreshold
region is much higher, at the pA or nA level, the MOS device may be statically damaged. Replace
the device using the handling procedure detailed on the previous page.
3-22

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