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Keysight Technologies B1500A Self-Paced Training Manual page 118

Semiconductor device analyzer
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Module 3
Low Current Measurement
Medium integration smoothes the plot at the ultra low levels. Make sure the range is set to AUTO or
LIMITED to lowest current range:
HRSMU: 10 pA
MPSMU: 1 nA
HPSMU: 1 nA
3-28

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