Keysight Technologies B1500A Self-Paced Training Manual page 121

Module 3
Low Current Measurement
This curve shows the high quality measurement that you would typically expect with the B1500A
and a well guarded probe station. The MARKER is sitting at 5.3 fA near the subthreshold region.
To get best ultra low current accuracy, zero the SMU offset error just prior to taking the
measurement by using the Calibration window. See beginning of this module, before page 10 in this
module. Do the ZEROing procedure with the probes up.
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