Running A Glow Discharge Process; Running A Sequence - Leica EM ACE600 Operating Manual

High vacuum sputter coater
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3.11.2 Running a glow discharge process

When a protocol is chosen and/or adjusted the process can be run by pressing
the
When the glow discharge vacuum is reached and stabilized, high voltage switches
on and the plasma starts around the shutter.
Glow discharge will run for the set time. When the process is finished a summary
will be shown.

3.12. Running a sequence

Single processes can be combined into a sequence. Depending on the
configuration of the instrument sputtering, carbon thread evaporation and glow
discharge can be automatically run one after the other. They can be put in any
order and repeated. All protocols of the library can be combined to a sequence. In
between, 'waiting' elements to pause between two processes can be placed.
Turn on the mains switch at the back of the unit, wait for the Start screen (see 3.1)
and press on
The sequence main screen loads (see below).
Operating Manual Leica EM ACE600
button which will turn into a
.
Version 06/15
button.
Page 94

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