Safety - Leica EM ACE600 Operating Manual

High vacuum sputter coater
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1.1

Safety

All electronic components are protected by covers: door lock (1), source cover (2),
housing (3).The door and source covers are equipped with sensors which cut off
power when they are opened. The housing must not be opened except by an
authorized Leica representative. Additionally there are software switches which
cut off power when a malfunction is noticed.
2
1
3
There is an overheat protection for the sources. When reaching 65°C the process
is stopped until a temperature of 45°C is reached then the process automatically
continues.
When there is a sudden vacuum break down the instrument switches off
automatically to protect pump and electric parts.
The housing must not be opened except by an authorized Leica representative.
If the Leica EM ACE600 coating system is damaged or malfunctions, all use of the
system should be suspended until the malfunction or damage has been corrected.
All modifications and conversions to the system are prohibited and invalidate the
warranty.
Operating Manual Leica EM ACE600
Version 06/15
Page 6

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