Leica EM ACE600 Operating Manual page 129

Cleaning material
Metal cleaning paste works well. Scotch brite should only be used on metal parts.
Do not use it on the glass door because scratches can lead to a small leaks.
Washing the parts afterwards with soapy water and letting them dry off is an easy
way to finish the cleaning. Also, Isopropanol or Ethanol can be used for the finish.
Caution!
Do not use thin tissues and ethanol for removing platinum – there is a risk
of the tissue catching fire.
Door
Remove the door by lifting it from its hinges (see 4.2.1)
Place the door on a flat soft surface with the inner surface up
To remove carbon coatings use a 70% isopropanol solution and lint-free
tissue for the rough cleaning. Then use fine metal polish paste. Finish with
soap-water or isopropanol
To remove sputter coatings start with the fine polish paste and finish with
soap-water or isopropanol
Internal shielding, shutter and glow discharge electrode
How to remove the chamber parts see 4.2.1
The internal shielding can be cleaned
using Scotch-Brite or metal cleaning
paste. Finish with soap water and
then clear water or isopropanol
When cleaning the shutter it is
recommended
fastening screw hinge with a drop of
high vacuum Fomblin oil before
assembly
The glow discharge electrode is
available as a spare part.
Anode ring
The anode ring is implemented in the opening for the sputter head. It can be
removed by pushing downwards when the internal shielding is removed (see 2.4).
Occasionally, it can happen that an elongated flake builds up by the sputtered
material. This can cause a shirt circuit which will be indicated by a warning when
starting a sputtering process. Clean the anode ring by wiping with ethanol.
Operating Manual Leica EM ACE600
to lubricate the
Version 06/15 Page 125