Leica EM ACE600 Operating Manual page 63

Standard stage and quartz holder mounted on the EM ACE600
After choosing and starting a protocol for e-beam evaporation the system will
perform the following steps automatically (see 3.9.2 and 3.9.3).
Pumping
Pumping until base vacuum is reached
Setting the stage
Degassing the target material (if activated)
Opening the shutter and starting rotation (if activated)
Evaporating until final thickness is reached or defined time has elapsed
Closing the shutter
Displaying the results of the process, venting or staying in vacuum
Caution!
Be careful when reloading a just used e-beam source. The inside of
the source can get extremely hot.
Operating Manual Leica EM ACE600 Version 06/15 Page 59