Only for a double sputter Instrument there is a choice to define the protocol
for the left or right source.
By pushing the save button the edited protocol is chosen and the process can be
run by pushing the start button (see 3.8.3).
Sputtering by time or thickness measurement
The sputtering process is terminated either by the desired thickness or time.
When a protocol is set up, a limit for time and thickness has to be defined. When
choosing a protocol for a coating run, the termination is either set to thickness or
time on the process screen (3.8.2). The reproducibility of using the QSG and
therefore a termination by thickness is more accurate than a termination by time.
Operating Manual Leica EM ACE600
Version 06/15
Page 104